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Author: Kovalgin, A.Y.

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2012

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE transactions on semiconductor manufacturing, 25 (2). pp. 178-184. ISSN 0894-6507 *** ISI Impact 0,748 ***

Kovalgin, A.Y. and Tiggelman, N. and Wolters, R.A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE transactions on electron devices, 59 (2). pp. 426-432. ISSN 0018-9383 *** ISI Impact 2,255 ***

2011

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Negative Charge in Plasma Oxidized SiO₂ Layers In: 219th ECS Meeting, 1 - 6 May 2011, Montreal QC, Canada. pp. 259-272. The Electrochemical Society. ISSN 1938-5862

Brunets, I. and Walters, R.J. and Kovalgin, A.Y. and Polman, A. and Schmitz, J. (2011) Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source. In: 219th ECS Meeting, 1-6 May 2011, Montreal, QC, Canada. MA2011-01. Electrochemical Society . ISSN 2151-2043

Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of nanoscience and nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880 *** ISI Impact 1,351 ***

Kazmi, S.N.R. and Aarnink, A.A.I. and Kovalgin, A.Y. and Salm, C. and Schmitz, J. (2011) Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS. ECS Transactions, 35 (30). pp. 45-52. ISSN 1938-5862

Lu, Jiwu and Kovalgin, A.Y. and van der Werf, K.H.M. and Schropp, R.E.I. and Schmitz, J. (2011) Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells. IEEE transactions on electron devices, 58 (5). pp. 2014-2021. ISSN 0018-9383 *** ISI Impact 2,255 ***

Lu, Jiwu and Liu, W. and Kovalgin, A.Y. and Sun, Y. and Schmitz, J. (2011) Materials Characterization of CIGS solar cells on Top of CMOS chips. In: Proceedings of 2011 MRS Spring Meeting, 25-29 Apr 2011, San Francisco, USA. e06-23. Cambridge University Press. ISSN 1946-4274

Lu, Jiwu and Liu, Wei and Kovalgin, A.Y. and Sun, Yun and Schmitz, J. (2011) Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells. IEEE transactions on electron devices, 58 (8). pp. 2620-2627. ISSN 0018-9383 *** ISI Impact 2,255 ***

Piccolo, G. and Puliyankot Palackavalapil, V. and Kovalgin, A.Y. and Hueting, R.J.E. and Heringa, A. and Schmitz, J. (2011) Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs. In: 2011 Proceedings of the 41st European Solid-State Device Research Conference (Essderc), 12-16 Sep 2011, Helsinki, Finland. pp. 175-178. IEEE Solid-State Circuits Society. ISBN 978-1-4577-0708-7

Puliyankot Palackavalapil, V. and Piccolo, G. and Hueting, R.J.E. and Heringa, A. and Kovalgin, A.Y. and Schmitz, J. (2011) Increased light emission by geometrical changes in Si LEDs. In: Proceedings of the 8th International Conference on Group IV Photonics (GFP), 14-16 Sep 2011, London, UK. pp. 287-289. IEEE Photonics Society. ISBN 978-1-4244-8340-2

Rangarajan, B. and Brunets, I. and Oesterlin, P. and Kovalgin, A.Y. and Schmitz, J. (2011) Green Laser Crystallization of GeSi thin Films and Dopant Activation. In: 219 th ECS meeting Transactions, 1 - 6 May 2011, Montreal, QC, Canada. pp. 17-25. The Electrochemical Society. ISSN 1938-5862

Rangarajan, B. and Brunets, I. and Oesterlin, P. and Kovalgin, A.Y. and Schmitz, J. (2011) Characterization of Green Laser Crystallized GeSi Thin Films. In: Proceedings of 2011 MRS Spring Meeting, 25-29 Apr 2011, San Francisco, USA. a06-04. MRS Proceedings 1321. Cambridge University Press. ISSN 1946-4274

Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of nanoscience and nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880 *** ISI Impact 1,351 ***

Van Hao, B. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 (3). pp. 214-220. ISSN 0013-4651 *** ISI Impact 2,420 ***

2010

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 89-92. Technology Foundation STW. ISBN 978-90-73461-67-3

Lu, Jiwu and Liu, W. and van der Werf, C.H.M. and Kovalgin, A.Y. and Sun, Y. and Schropp, R.E.I. and Schmitz, J. (2010) Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems. In: Proceedings of the 2010 IEEE International Electron Devices Meeting (IEDM), 6-8 Dec 2010, San Francisco, USA. 31.3.1.-31.3.4. IEEE Electron Devices Society. ISSN 0163-1918 ISBN 978-1-4424-7418-5

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2010) On the effect of nano-injectors on conduction in silicon p-i-n diodes. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 140-142. Technology Foundation STW. ISBN 978-90-73461-67-3

Tiggelman, N. and Kovalgin, A.Y. and Brennan, R. and Wolters, R.A.M. (2010) Low specific contact resistance of NiSi and PtSi to Si: impact of interface. Electrochemical and solid-state letters, 13 (12). H450-H453. ISSN 1099-0062 *** ISI Impact 1,967 ***

2009

Aarnink, A.A.I. and Van Bui, B. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: Proceedings of the 9th International conference on Atomic Layer Deposition, 19-22 Jul 2009, Monterey, CA, USA. America Vaccum Society, Omnipress. ISBN not assigned

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Net Negative Charge in low-temperature SiO₂ gate dielectric layers Microelectronic engineering, 86 (7-9). pp. 1707-1710. ISSN 0167-9317 *** ISI Impact 1,569 ***

Brunets, I. and Boogaard, A. and Smits, S.M. and de Vries, H. and Aarnink, A.A.I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) Low temperature TFTs with poly-stripes. In: Proceedings of the 5th International Thin Film Transistor Conference ITC'09, 5-6 Mar 2009, Palaiseau, France. pp. 62-65. Ecole Polytechnique. ISBN not assigned

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Boogaard, A. and Schmitz, J. (2009) Low-temperature fabricated TFTs on polysilicon stripes. IEEE transactions on electron devices, 56 (8). pp. 1637-1644. ISSN 0018-9383 *** ISI Impact 2,255 ***

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures, 30 Mar - 2 Apr 2009, Oxnard, CA, USA. pp. 191-195. IEEE Computer Society. ISBN 978-1-4244-4259-1

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 150-152. Technology Foundation STW. ISBN 978-90-73461-62-8

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. (2009) Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling. ECS Transactions, 25 (8). pp. 23-32. ISSN 1938-5862

Kovalgin, A.Y. and Boogaard, A. and Wolters, R.A.M. (2009) Impact of small deviations in EEDF on silane-based plasma chemistry. ECS Transactions, 25 (8). pp. 429-436. ISSN 1938-5862

Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2009) Influence of passivation process on chip performance. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 542-544. Technology Foundation STW. ISBN 978-90-73461-62-8

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2009) Effect of carrier injector size on silicon LED performance. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 167-169. Technology Foundation STW. ISBN 978-90-73461-62-8

Rangarajan, B. and Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) TFTs as photodetectors for optical interconnects. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 52-54. Technology Foundation STW. ISBN 978-90-73461-62-8

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507 *** ISI Impact 0,748 ***

Van Hao, B. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 59-62. Technology Foundation STW. ISBN 978-90-73461-62-8

2008

Boogaard, A. and Roesthuis, R. and Brunets, I. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2008) Deposition of High-Quality SiO₂ Insulating Films at Low Temperatures by means of Remote PECVD In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 452-456. Technology Foundation STW. ISBN 978-90-73461-56-7

Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008, 29 Jun - 2 Jul 2008, Bruges, Belgium. P-54. TUe Eindhoven. ISBN not assigned

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si. In: Proceedings of the 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland. pp. 87-90. IOP Institute of Physics. ISBN 978-1-4244-2363-7

Brunets, I. and van Loon, R.V.A. and Walters, R.J. and Polman, A. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2008) Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 399-402. Technology Foundation STW. ISBN 978-90-73461-56-7

Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 468-471. Technology Foundation STW. ISBN 978-90-73461-56-7

Kovalgin, A.Y. and Isai, I.G. and Holleman, J. and Schmitz, J. (2008) Low-temperature SiO₂ layers deposited by combination of ECR plasma and supersonic silane/helium jet Journal of the Electrochemical Society, 155 (2). G21-G28. ISSN 0013-4651 *** ISI Impact 2,420 ***

Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2008) Functional layers for CIGS solar cell on-chip fabrication during post-processing. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 487-490. Technology Foundation STW. ISBN 978-90-73461-56-7

Piccolo, G. and Hoang, Tù and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Silicon LEDs with antifuse injection. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy. pp. 49-51. IEEE Computer Society. ISBN 978-1-4244-1768-1

Piccolo, G. and Hoang, Tù and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Antifuse injectors for SOI LEDs. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 573-575. Technology Foundation STW. ISBN 978-90-73461-56-7

Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106 *** ISI Impact 2,714 ***

Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE transactions on electron devices, 55 (5). pp. 1170-1176. ISSN 0018-9383 *** ISI Impact 2,255 ***

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland. pp. 199-204. IEEE Computer Society. ISBN 978-1-4244-1801-5

2007

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2007) Characterization of SiO₂ films deposited at low temperature by means of remote ICPECVD Surface & coatings technology, 201. pp. 8976-8980. ISSN 0257-8972 *** ISI Impact 2,135 ***

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) On the verification of EEDFs in plasmas with silane using optical emission spectroscopy. ECS Transactions, 6 (1). pp. 259-270. ISSN 1938-5862

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Optical and Electrical Characterization of SiO₂ films deposited at low temperature by means of remote ICPECVD In: Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 29 - 30 Nov 2007, Veldhoven, The Netherlands. pp. 404-407. Technology Foundation STW. ISBN 978-90-73461-49-9

Brunets, I. and Aarnink, A.A.I. and Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices. Surface & Coatings Technology, 201. pp. 9209-9214. ISSN 0257-8972 *** ISI Impact 2,135 ***

Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature process steps for realization of non-volatile memory devices. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 504-508. Technology Foundation STW. ISBN 978-90-73461-49-9

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 581-583. Technology Foundation STW. ISBN 978-90-73461-49-9

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Chemical modeling of a high-density inductively-coupled plasma reactor containing silane. Surface & Coatings Technology, 201. pp. 8849-8853. ISSN 0257-8972 *** ISI Impact 2,135 ***

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2007) A pillar-shaped antifuse-based silicon chemical sensor and actuator. IEEE sensors journal, 7 (1). pp. 18-27. ISSN 1530-437X *** ISI Impact 1,471 ***

Lu, Jiwu and Kovalgin, A.Y. and Schmitz, J. (2007) Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 603-607. Technology Foundation STW. ISBN 978-90-73461-49-9

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 551-554. Technology Foundation STW. ISBN 978-90-73461-49-9

2006

Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Langmuir-probe characterization of an inductively-coupled remote plasma system intended for CVD and ALD. ECS Transactions, 2 (7). pp. 181-191. ISSN 1938-5862

Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 412-418. Technology Foundation STW. ISBN 978-90-73461-44-4

Brunets, I. and van Hemert, T. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2006) Memory devices with encapsulated Si nano-crystals: Realization and Characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 419-422. Technology Foundation STW. ISBN 978-90-73461-44-4

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Aarnink, A.A.I. and Boogaard, A. and Oesterlin, P. and Schmitz, J. (2006) A green laser Crystallization of α-Si Films using preformed α-Si Lines. In: Proceedings of the 210th Electrochemical Society meeting, 29 okt - 03 nov 2006, Cancun. Mexico. pp. 185-191. ECS Transactions 3, 8 (2006). ECS. ISBN 1-56677-508-6

Kovalgin, A.Y. and Holleman, J. (2006) Low-Temperature LPCVD of Polycrystalline Ge_xSi_1-x Films with High Germanium Content Journal of the Electrochemical Society, 153 (5). G363-G371. ISSN 0013-4651 *** ISI Impact 2,420 ***

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2006) A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In: Proceedings of the IEEE Sensors Conference, 30 Oct - 03 Nov 2005, Irvine, CA, USA. pp. 1225-1228. IEEE CNF. ISBN 0-7803-9056-3

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane. In: Microfabricated systems and MEMS VII: Proceedings of the 206th ECS Meeting, 2004, Honolulu, Hawaii. pp. 173-183. Electrochemical Society. ISBN 1-56677-422-5

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane. Journal of the Electrochemical Society, 153 (9). H181-H188. ISSN 0013-4651 *** ISI Impact 2,420 ***

Kovalgin, A.Y. and Zinine, A.I. and Bankras, R.G. and Wormeester, H. and Poelsema, B. and Schmitz, J. (2006) On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light. In: Proceedings of the Electrochemical Society, 29 okt - 3 nov 2006, Cancun, Mexico. pp. 191-202. ECS Transactions 3 (2). Electrochemical Society. ISSN 1938-5862 ISBN 1-56677-502-7

Stavitski, N. and van Dal, M.J.H. and Klootwijk, J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 436-438. Technology Foundation STW. ISBN 978-90-73461-44-4

Stavitski, N. and van Dal, M.J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Specific Contact Resistance Measurements of Metal Semiconductor-Junctions. In: Proceedings of the IEEE International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, TX, USA. pp. 13-17. IEEE. ISBN 1-4244-0167-4

2005

Aarnink, A.A.I. and Boogaard, A. and Brunets, I. and Isai, I.G. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2005) A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands. pp. 67-69. Technology Foundation STW. ISBN 90-73461-50-2

Brunets, I. and Boogaard, A. and Isai, I.G. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2005) Three-dimensional IC's prolong the life of Moore's law. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands. pp. 76-78. Technology Foundation STW. ISBN 90-73461-50-2

Hof, A.J. and Hoekstra, E. and Kovalgin, A.Y. and van Schaijk, R. and Baks, W.M. and Schmitz, J. (2005) The impact of deuterated CMOS processing on gate oxide reliability. IEEE Transactions on Electron Devices, 52 (9). pp. 2111-2115. ISSN 0018-9383 *** ISI Impact 2,255 ***

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2005) On the oxidation kinetics of silicon in ultradiluted H₂O and D₂O ambient Journal of the Electrochemical Society, 152 (9). F133-F137. ISSN 0013-4651 *** ISI Impact 2,420 ***

Kovalgin, A.Y. and Hof, A.J. and Schmitz, J. (2005) An approach to modeling of silicon oxidation in a wet ultra-diluted ambient. Microelectronic Engineering, 80. pp. 432-435. ISSN 0167-9317 *** ISI Impact 1,569 ***

Stavitski, N. and van Dal, M.J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2005) Specific contact resistance measurements of metal-semiconductor junctions. In: Proceedings of the 8th annual workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE) 2005, 17-18 Nov 2005, Veldhoven, The Netherlands. pp. 52-55. Technology Foundation STW. ISBN 90-73461-50-2

2004

Hof, A.J. and Kovalgin, A.Y. and van Schaijk, R. and Baks, W.M. and Schmitz, J. (2004) Gate oxide reliability and deuterated CMOS processing. In: IEEE Integrated Reliability Workshop, 18-21 October 2004, Lake Tahoe, USA. pp. 7-10. IEEE Computer Society. ISBN 0-7803-8517-9

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2004) A micro-scale hot-surface device based on non-radiative carrier recombination. In: The 34th European Solid-State Device Research conference, 2004, 21-23 September 2004, Leuven, Belgium. pp. 353-356. IEEE Computer Society. ISBN 0780384784

2003

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2003) On oxidation kinetics and electrical quality of gate oxide grown in H₂O or D₂O ambient In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 743-747. Technology Foundation STW. ISBN 90-73461-39-1

Iordache, G. and Holleman, J. and Kovalgin, A.Y. and Jenneboer, A.J.S.M. (2003) Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands. pp. 693-696. Technology Foundation STW. ISBN 90-73461-39-1

2002

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. (2002) Comparison of H₂O and D₂O oxidation kinetics of <100> silicon In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands. pp. 35-38. Technology Foundation STW. ISBN 90-73461-33-2

Kim, G.M. and Kovalgin, A.Y. and Holleman, J. and Brugger, J.P. (2002) Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching. Journal of Nanoscience and Nanotechnology, 2 (1). pp. 55-59. ISSN 1533-4880 *** ISI Impact 1,351 ***

Kovalgin, A.Y. and Holleman, J. and van den Berg, A. (2002) Combined light/heat/gas sensor with decoupled electrical and thermal resistances. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002, 29 November 2002, Veldhoven, The Netherlands. pp. 635-648. Technology Foundation STW. ISBN 90-73461-33-2

Kovalgin, A.Y. and Holleman, J. and van den Berg, A. (2002) A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances. In: Proceedings of Eurosensors 2002, 15-18 Sep 2002, Czech Technical University, Prague, Czech Republi. pp. 88-91. Czech Technical University. ISBN 80-01-02576-4

2001

Kovalgin, A.Y. and Holleman, J. (2001) A study of morphology and texture of LPCVD germanium-silicon films. Journal de physique. IV, 11. Pr3-47-Pr3-54. ISSN 1155-4339

Kovalgin, A.Y. and Holleman, J. and van den Berg, A. and Wallinga, H. (2001) Thin-film antifuses for pellistor type gas sensors. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2001, 30 Nov 2001, Veldhoven, The Netherlands. pp. 809-812. Technology Foundation STW. ISBN 90-73461-29-4

Kovalgin, A.Y. and Holleman, J. and Salm, C. and Woerlee, P.H. (2001) Low-Pressure CVD of Germanium-Silicon films using Silane and Germane sources. In: Thin Film Transistors Technologies V, 23-25 Oct 2000, Phoenix, Arizona, USA. pp. 269-275. Electrochemical Society. ISBN 1566772982