EEMCS

Wali, F. and Martin Knotter, D. and Kelly, J.J. and Kuper, F.G. (2006) Deposition and detection of particles during integrated circuit manufacturing. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands. pp. 483-487. Technology Foundation STW. ISBN 90-73461-44-8

Tjerkstra, R.W. and Gardeniers, J.G.E. and Kelly, J.J. and van den Berg, A. (2000) Multi-walled microchannels: free-standing porous silicon membranes for use in TAS. Journal of microelectromechanical systems, 9 (4). pp. 495-501. ISSN 1057-7157 *** ISI Impact 2,157 ***

Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1997) An electrochemical active valve. Electrochimica acta, 42 (20-22). pp. 3367-3373. ISSN 0013-4686 *** ISI Impact 3,642 ***

Bressers, P.M.M.C. and Kelly, J.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Surface morphology of p-type (100) silicon etched in aqueous alkaline solution. Journal of the Electrochemical Society, 143 (5). pp. 1744-1750. ISSN 0013-4651 *** ISI Impact 2,420 ***

Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1996) An electrochemical microactuator: Principle and first results. Journal of microelectromechanical systems, 5 (1). pp. 2-9. ISSN 1057-7157 *** ISI Impact 2,157 ***