EEMCS

Nguyen, Minh Duc and Dekkers, M. and van Zalk, M. and Broekmaat, J. and Janssens, A. and Nazeer, H. and Blank, D.H.A. and Rijnders, D. (2011) Large-area pulsed laser deposition and assembly processes for pierzoelectric MEMS devices based on all-oxide LaNiO₃/Pb(Zr,Ti)O₃/LaNiO₃ thin films In: Proceedings of the International Conference on Materials for Advanced Tehcnologies, ICMAT 2011, 26 Jun - 1 Jul 2011, Suntec, Singapore. Organisation Committee of the ICMAT 2011. ISBN not assigned