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Author: Jansen, H.V.
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2011

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Jansen, H.V. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics express, 19 (17). pp. 15864-15878. ISSN 1094-4087 *** ISI Impact 3,749 ***
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and De Raedt, W. (2011) Switchable capacitor. Patent EP1398811 (Assigned).

2010

Brunets, N. and Haneveld, J. and Jansen, H.V. and Tas, N.R. (2010) Viscosity of Water in Nano-Confinement. In: Micro- and nanofluidics for cell biology, 18-22 January 2010, Leiden. 1. Lorentz Center. ISSN not assigned
Elwenspoek, M.C. and Abelmann, L. and Berenschot, J.W. and van Honschoten, J.W. and Jansen, H.V. and Tas, N.R. (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of micromechanics and microengineering, 20 (6). 064001. ISSN 0960-1317 *** ISI Impact 2,276 ***
Jansen, H.V. and de Boer, M.J. and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma Journal of micromechanics and microengineering, 20 (7). 075027. ISSN 0960-1317 *** ISI Impact 2,276 ***
de Jong, B.R. and Brouwer, D.M. and de Boer, M.J. and Jansen, H.V. and Soemers, H.M.J.R. and Krijnen, G.J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of microelectromechanical systems, 19 (5). pp. 1116-1130. ISSN 1057-7157 *** ISI Impact 2,157 ***
Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of micromechanics and microengineering, 20 (11). 115011. ISSN 0960-1317 *** ISI Impact 2,276 ***
Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro systems Europe workshop (MME2010), 26-29 Sept 2010, Enschede. pp. 1-4. Universiteit Twente - TST. ISBN 978-90-81673716
Mogulkoc, B. and Knowles, K.M. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820 *** ISI Impact 2,167 ***
Sinno, I. and Sanz-Velasco, A. and Kang, S. and Jansen, H.V. and Olsson, E. and Enoksson, P. and Svensson, K. (2010) Fabrication of nanoscale electrostatic lenses. Journal of micromechanics and microengineering, 20 (9). pp. 1-7. ISSN 0960-1317 *** ISI Impact 2,276 ***
Tas, N.R. and Escalante, M. and van Honschoten, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463 *** ISI Impact 4,268 ***
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and De Raedt, W. (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent US7835157 (Assigned).
Yagubizade, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. and Tas, N.R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA. pp. 128-131. IEEE Nanotechnology Council. ISBN 978-1-4244-8896-4
Zhao, Yiping and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Bouwes, D. and Girones, M. and Huskens, J. and Tas, N.R. (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of micromechanics and microengineering, 20 (9). pp. 1-13. ISSN 0960-1317 *** ISI Impact 2,276 ***

2009

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***
Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Jansen, H.V. and van Dijk, J. and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micromanipulators. Journal of micromechanics and microengineering, 19 (6). pp. 1-20. ISSN 0960-1317 *** ISI Impact 2,276 ***
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, Colorado, USA. pp. 1075-1078. IEEE. ISBN 978-1-4244-4193-8
Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam . Vietnam National University. ISBN not assigned
Jansen, H.V. and de Boer, M.J. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of micromechanics and microengineering, 19 (3). 033001. ISSN 0960-1317 *** ISI Impact 2,276 ***
Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of micromechanics and microengineering, 19 (4). pp. 1-9. ISSN 0960-1317 *** ISI Impact 2,276 ***
Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and ter Brake, H.J.M. and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of micromechanics and microengineering, 19 (085027). pp. 1-10. ISSN 0960-1317 *** ISI Impact 2,276 ***
Tas, N.R. and Haneveld, J. and Jansen, H.V. and Brunets, N. and van Honschoten, J.W. (2009) Capillarity effect in silicon based nanochannels. In: Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam. pp. 1-1. IWNA 2009 International Conference. ISBN not assigned
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a chip, 9 (13). pp. 1966-1969. ISSN 1473-0197 *** ISI Impact 6,260 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, 25-29 January 2009, Sorrento, Italy. pp. 1-4. Technical Digest. ISSN 1084-6999
Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and van Wolferen, H.A.G.M. and de Boer, M.J. and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (30). pp. 1-6. ISSN 0957-4484 *** ISI Impact 3,644 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317 *** ISI Impact 1,569 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***

2008

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China. pp. 729-732. IEEE Computer Society. ISBN 978-1-4244-1907-4
Bruinink, C.M. and Burresi, M. and de Boer, M.J. and Segerink, F.B. and Jansen, H.V. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984 *** ISI Impact 12,186 ***
Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). 14309. ISSN 0021-8979 *** ISI Impact 2,064 ***
van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) Erratum:"Elastocapillary filling of deformable nanochannels" [J. Appl. Phys. 101, 094310 (2007)]. Journal of applied physics, 103 (2). pp. 1-1. ISSN 0021-8979 *** ISI Impact 2,064 ***
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Proceedings of Eurosensors XXII, 7-10 Sep 2008, Dresden, Germany. pp. 912-915. Verein Deutscher Ingenieure e.V. (VDI). ISBN 978-3-00-025217-4
Lerou, P.P.P.M. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Rogalla, H. (2008) Micromachined Joule-Thomson coolers. In: AIP Conference Proceedings, 16-20 July 2007, Chattanooga, Tennessee, USA. pp. 614-621. Advances in Cryogenic Engineering, Transactions of the Cryogenic Engineering Conference - CEC 985 (1). American Institute of Physics. ISSN 0094-243X ISBN 978-0-7354-0504-2
Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 17-20. VDI/VDE IT. ISBN 978-3-00-025529-8
Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 45-48. VDI/VDE IT. ISBN 978-3-00-025529-8
Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany. VDI/VDE. ISBN 978-3-00-025529-8
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317 *** ISI Impact 2,276 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C. (2008) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).
Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Zhao, Yiping and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of scientific instruments, 79 (4). 045103. ISSN 0034-6748 *** ISI Impact 1,598 ***
Woldering, L.A. and Tjerkstra, R.W. and Jansen, H.V. and Setija, I. and Vos, W.L. (2008) Periodic arrays of deep nanopores made in silicon with reactive ion etching and deep UV lithography. Nanotechnology, 19 (14). pp. 1-11. ISSN 0957-4484 *** ISI Impact 3,644 ***
Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of micromechanics and microengineering, 18 (18). 064013. ISSN 0960-1317 *** ISI Impact 2,276 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece. 221. Ergo publications. ISBN not assigned

2007

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of applied physics, 101. 094310. ISSN 0021-8979 *** ISI Impact 2,064 ***
Lerou, P.P.P.M. and Venhorst, G.C.F. and Veenstra, T.T. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. (2007) All-Micromachined Joule-Thomson Cold Stage. In: Proceedings of the 14th International Cryocooler Conference, 16-20 July 2007, Annapolis, MD, USA. pp. 437-441. International Cryocooler Conference. ISBN not assigned
Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2007) Modular Micro Propulsion System. In: National MicroNano conference 2007, 15-16 November 2007, Wageningen, Netherlands. 22. MicacNed. ISBN not assigned
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and De Raedt, W. (2007) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent US20070951739 (Application).
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and de Raedt, W. (2007) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent EP1251577 (Assigned).
Tong, D.H. and Jansen, H.V. and Tas, N.R. and Gadgil, V.J. and Carlen, E.T. and van den Berg, A. (2007) Simple technique for direct patterning of nanowires using a nanoslit shadow-mask. In: International Solid-State Sensors, Actuators and Microsystems Conference, 2007 (TRANSDUCERS), 10-14 June 2007, Paris. pp. 191-194. TRANSDUCERS 1. IEEE. ISBN 1-4244-0842-3
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal. pp. 127-130. University of Minho. ISBN 978-972-98603-3-1
Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of micromechanics and microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317 *** ISI Impact 2,276 ***
Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: 18th MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 253-256. Micro Mechanics Europe. ISBN 9789729860331

2006

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of micromechanics and microengineering, 16. pp. 1207-1214. ISSN 0960-1317 *** ISI Impact 2,276 ***
Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34. pp. 1032-1037. ISSN 1742-6588
Fernández, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of micromechanics and microengineering, 16. pp. 862-868. ISSN 0960-1317 *** ISI Impact 2,276 ***
Fernández, L.J. and Wiegerink, R.J. and Flokstra, Jaap and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of micromechanics and microengineering, 16. S1099-S1107. ISSN 0960-1317 *** ISI Impact 2,276 ***
Girones, M. and Akbarsyah, I.J. and Nijdam, W. and van Rijn, C.J.M. and Jansen, H.V. and Lammertink, R.G.H. and Wessling, M. (2006) Polymeric microsieves produced by phase separation micromolding. Journal of membrane science, 283 (1-2). pp. 411-424. ISSN 0376-7388 *** ISI Impact 3,673 ***
Haneveld, J. and Berenschot, J.W. and Maury, P.A. and Jansen, H.V. (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of micromechanics and microengineering, 16. S24-S28. ISSN 0960-1317 *** ISI Impact 2,276 ***
Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven. 192. Technische Universiteit Eindhoven. ISBN not assigned
de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 dof sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, 2006, May 2006, Istanbul. pp. 750-753. IEEE Computer Society. ISSN 0018-9219 ISBN 0-7803-9475-5
Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and ter Brake, H.J.M. and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings 823. American Institute of Physics, Maryland, pp. 1-8. ISSN 0094-243X ISBN 9780735403178
Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2006) Design of a cold gas micro thruster. In: Proceeding of NanoNed/MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 180. Eindhoven University Press. ISBN not assigned
Louwerse, M.C. and Sanders, H.M. and Jansen, H.V. (2006) Microsysteemtechnologie verpakt in een buisje. Ruimtevaart. pp. 11-15. ISSN 1382-2446
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and de Raedt, W. (2006) Switchable capacitor and method of making the same. Patent US7002439 (Assigned).
Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. (Invited) In: Meeting abstracts 210th ECS Meeting, 29 Oct - 3 Nov 2006, Cancun, Mexico. pp. 1-1. Electrochemical Society. ISSN 1091-8213
Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of micromechanics and microengineering, 16. pp. 1-6. ISSN 0960-1317 *** ISI Impact 2,276 ***

2005

Fazal, I. and Berenschot, J.W. and de Boer, J.H. and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 5-9 June 2005, Seoul. pp. 936-939. Solid-State Sensors, Actuators and Microsystems 1. IEEE Computer Society. ISBN 0-7803-8994-8
Fernández, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of rf devices. Electronics letters, 41 (3). pp. 1-2. ISSN 0013-5194 *** ISI Impact 1,001 ***
Fernández, L.J. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Radio frequency power sensor based on mems technology with ultra low loss. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 191-194. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Haneveld, J. and Berenschot, J.W. and Pascale, M. and Jansen, H.V. (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 72-75. Chalmers University . ISBN 9163175533
de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: Proceedings of EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain. pp. 1-4. Elsevier. ISBN 84-475-2984-3
de Jong, B.R. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Tailored Etch-Profiles of high aspect ratio trenches to prevent voids after refill with LPCVD sirn. In: 16th MicroMechanics Europe Workshop, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Chalmers University of Technology. ISBN 9163175533
Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bulk micromachining technology for fabrication of two-level mems in standard silicon substrate. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1404-1405. IEEE Computer Society. ISBN 0-7803-8994-8
Tong, D.H. and van den Berg, A. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane. Thin solid films, 479 (1-2). pp. 89-94. ISSN 0040-6090 *** ISI Impact 1,909 ***
Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and de Boer, M.J. and de Boer, J.H. and van Rijn, C.J.M. and Elwenspoek, M.C. (2005) Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation. Journal of microelectromechanical systems, 14 (1). pp. 113-123. ISSN 1057-7157 *** ISI Impact 2,157 ***
Vanapalli, S. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 354-357. Chalmers University of Technology. ISBN 978-0-4445-1037-2
Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2

2004

Fernández, L.J. and Sesé, J. and Jansen, H.V. and Wiegerink, R.J. and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: 15th MicroMechanics Europe Workshop, MME 2004, 5-7 Sept 2004, Leuven. pp. 257-260. MicroMechanics Europe. ISBN 9056825356
Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Jansen, H.V. and Flokstra, Jaap and Elwenspoek, M.C. (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements 2004, 27 Jun - 2 Jul 2004, London. pp. 117-118. IEEE Electromagnetic Compatibility Society. ISBN 0-7803-8494-6
Hoang, Thi Hanh and Tong, D.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 58 (3-4). pp. 525-528. ISSN 0167-577X *** ISI Impact 2,117 ***
Lerou, P.P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and ter Brake, H.J.M. and Elwenspoek, M.C. and Rogalla, H. (2004) Progress in Micro Joule-Thomson Cooling at Twente University. In: Proceedings of the 13th International Cryocooler Conference, 29 March - 1 April 2004, New Orleans. pp. 489-496. Springer Science + Business. ISSN 1570-2235 ISBN 0-387-23901-4
Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2004) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. Microsystem technologies, 10 (5). pp. 364-371. ISSN 0946-7076 *** ISI Impact 1,069 ***
Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of micromechanics and microengineering, 14. S70-S75. ISSN 0960-1317 *** ISI Impact 2,276 ***
Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2004) Capillary filling speed of water in nanochannels. Applied physics letters, 85 (15). pp. 3274-3276. ISSN 0003-6951 *** ISI Impact 3,820 ***
Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and van Rijn, C.J.M. and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and engineering chemistry research, 43 (15). pp. 4182-4187. ISSN 0888-5885 *** ISI Impact 2,071 ***
Tong, D.H. and Jansen, H.V. and Gadgil, V.J. and Bostan, C.G. and Berenschot, J.W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984 *** ISI Impact 12,186 ***

2003

Fernández, L.J. and Visser, E. and Sesé, J. and Jansen, H.V. and Wiegerink, R.J. and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 41-44. MicroMechanics Europe. ISBN 9080826618
Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jan and Jansen, H.V. and Elwenspoek, M.C. (2003) Radio frequency power sensor based on MEMS technology. In: Sensors, 2003. Proceedings of IEEE, 22-24 Oct., Toronto, Canada. pp. 549-552. IEEE Computer Society. ISBN 0-7803-8133-5
Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2003) Wet anisotropic etching for fluidic 1d nanochannels. Journal of micromechanics and microengineering, 13 (4). S62-S66. ISSN 0960-1317 *** ISI Impact 2,276 ***
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and De Raedt, W. (2003) Switchable capacitor. Patent EP20030020159 (Application).
Rottenberg, X. and Jansen, H.V. and Tilmans, H.A.C. and de Raedt, W. (2003) Switchable capacitor and method of making the same. Patent US20030663340 (Application).
Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France. pp. 245-250. IEEE Computer Society. ISBN 0-7803-7066-X
Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 123-126. Eburon. ISBN 9080826618
Tong, D.H. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Wensink, H. and Jansen, H.V. and Nijdam, A.J. and Elwenspoek, M.C. and Gielens, F.C. and van Rijn, C.J.M. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of microelectromechanical systems, 12 (5). pp. 622-629. ISSN 1057-7157 *** ISI Impact 2,157 ***
Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, USA. pp. 1742-1745. IEEE Electron Devices Society. ISBN 0-7803-7731-1
Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. In: SESENS 2002, 29 Nov 2002, Veldhoven, the Netherlands. pp. 688-691. Technology Foundation STW. ISBN not assigned
Tong, D.H. and Hoang, Thi Hanh and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 1-4. Micro Mechanics Europe. ISBN 9080826618

2002

Bartic, C. and Jansen, H.V. and Campitelli, A. and Borghs, S. (2002) Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors Organic Electronics, 3 (2). pp. 65-72. ISSN 1566-1199 *** ISI Impact 3,998 ***
de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Smulders, E.J.T. and Gilde, M.-J. and Roelofs, G.H.M. and Sasserath, J.N. and Elwenspoek, M.C. (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of microelectromechanical systems, 11 (4). pp. 385-401. ISSN 1057-7157 *** ISI Impact 2,157 ***
Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.
Rottenberg, X. and Jansen, H.V. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy. pp. 1-4. IEEE. ISBN not assigned
Tas, N.R. and Berenschot, J.W. and Mela, P. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2002) 2D-Confined Nanochannels Fabricated by Conventional Micromachining. Nano letters, 2 (9). pp. 1031-1032. ISSN 1530-6984 *** ISI Impact 12,186 ***
Tilmans, H.A.C. and Beyne, E. and Jansen, H.V. and de Raedt, W. (2002) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent EP20020076528 (Application).

2001

Jansen, H.V. and de Boer, M.J. and Wensink, H. and Kloeck, B. and Elwenspoek, M.C. (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source Microelectronics journal, 32 (9). pp. 769-777. ISSN 0026-2692 *** ISI Impact 0,787 ***
Rusu, C.R. and Oever, R.V. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and de Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and Brugger, J. and van den Berg, A. (2001) Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers. Journal of microelectromechanical systems, 10 (2). pp. 238-246. ISSN 1057-7157 *** ISI Impact 2,157 ***
Tilmans, H.A.C. and Ziad, H. and Jansen, H.V. and Di Monaco, O. and Jourdain, A. and de Raedt, W. and Rottenberg, X. and de Backer, E. and Decaussernaeker, A. and Baert, K. (2001) Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab. In: International Electron Devices Meeting, 2-5 Dec 2001, Washington. IEEE Electron Devices Society. ISBN 0-7803-7050-3

2000

de Boer, M.J. and Tjerkstra, R.W. and Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2000) Micromachining of buried micro channels in silicon. Journal of microelectromechanical systems, 9 (1). pp. 94-103. ISSN 1057-7157 *** ISI Impact 2,157 ***
Neagu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The electrolysis of water: An actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4-5). pp. 571-581. ISSN 0957-4158 *** ISI Impact 0,944 ***
Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and van den Berg, A. and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of microelectromechanical systems, 9 (3). pp. 390-398. ISSN 1057-7157 *** ISI Impact 2,157 ***
Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and van den Berg, A. and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 Jan - 27 Jan 2000, Miyazaki, Jpn. pp. 429-434. IEEE Computer Society. ISBN 0-7803-5273-4
Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Greve, J. and Brugger, J. and van den Berg, A. (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3912, 26-27 Jan 2000, San Jose, CA, USA. pp. 41-49. Society of Photo-Optical Instrumentation Engineers. ISBN 0-8194-3528-7
Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2000) High resolution powder blast micromachining. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 -27 Jan 2000, Miyazaki, Japa;n. pp. 769-774. IEEE Computer Society. ISBN 0-7803-5273-4
Wensink, H. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2000) Mask materials for powder blasting. Journal of micromechanics and microengineering, 10 (2). pp. 175-180. ISSN 0960-1317 *** ISI Impact 2,276 ***

1999

de Bree, H.E. and Jansen, H.V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of micromechanics and microengineering, 9 (2). pp. 186-189. ISSN 0960-1317 *** ISI Impact 2,276 ***
Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 Sept 1999, Gif-Sur-Yvette, France. pp. 199-202. Université Paris-sud, Institut d'Électronique Fondamentale.

1998

den Braber, E.T. and Jansen, H.V. and de Boer, M.J. and Croes, H.J.E. and Elwenspoek, M.C. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of biomedical materials research, 40 (3). pp. 425-433. ISSN 0021-9304
de Bree, H.E. and Jansen, H.V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (1998) Bi-directional fast flow sensor with a large dynamic range. In: Proceedings of the Micromechanics Europe, MME 1998, 3-5 June 1998, Ulvik. pp. 194-197. Micro Mechanics Europe.
Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 1,933 ***

1997

Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4
Jansen, H.V. and de Boer, M.J. and Wensink, H. and Kloeck, B. and Elwenspoek, M.C. (1997) The black silicon method. VIII. A study of the performance of etching silicon using SF6O2-based chemistry with cryogenical wafer cooling and a high density ICP source In: Micro- and Nano-Engineering 1997, 15 Sept 1997, Athens, Greece. pp. 1-4. Elsevier.
Jansen, H.V. and de Boer, M.J. and Wiegerink, R.J. and Tas, N.R. and Smulders, E.J.T. and Neagu, C.R. and Elwenspoek, M.C. (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317 *** ISI Impact 1,569 ***
Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and actuators A: Physical, 62 (1-3 pt 3). pp. 599-611. ISSN 0924-4247 *** ISI Impact 1,933 ***

1996

Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 277-284. IEEE Computer Society. ISBN 0-7803-2985-6
de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Jansen, H.V. and Lammerink, T.S.J. and Elwenspoek, M.C. (1996) The μ-flown: A novel device for measuring acoustic flows. Sensors and actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247 *** ISI Impact 1,933 ***
Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1996) The black silicon method VI: high aspect ratio trench etching for MEMS applications. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems 1996, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 250-257. IEEE Computer Society. ISBN 0-7803-2985-6
Jansen, H.V. and Gardeniers, J.G.E. and de Boer, M.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of micromechanics and microengineering, 6 (1). pp. 14-28. ISSN 0960-1317 *** ISI Impact 2,276 ***
Spiering, V.L. and Lammerink, T.S.J. and Jansen, H.V. and Fluitman, J.H.J. and van den Berg, A. (1996) Technologies and microstructures for separation techniques in chemical analysis. In: Proceedings of SPIE - The International Society for Optical Engineering - Micromachined Devices and Components II, 14-15 Oct 1996, Austin, TX, USA. pp. 91-100. SPIE, The International Society for Optical Engineering. ISSN 0277-786X
Tas, N.R. and Sonnenberg, A.H. and Jansen, H.V. and Legtenberg, R. and Elwenspoek, M.C. (1996) Stiction in surface micromachining. Journal of micromechanics and microengineering, 6 (4). pp. 385-397. ISSN 0960-1317 *** ISI Impact 2,276 ***

1995

de Boer, M.J. and Jansen, H.V. and Elwenspoek, M.C. (1995) The black silicon method V: a study of the fabricating of movable structures for micro electromechanical systems. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 565-568. IEEE Computer Society. ISBN 91-630-3473-5
de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Backlund, Y. and Jansen, H.V. (1995) The Wheatstone Gadget : a simple ciruit for the measuring differential resistance variations. In: Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995, 3-5 Sept 1995, Copenhagen. pp. 1-4. MicroMechanics Europe. ISBN 8789935004
de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Jansen, H.V. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) The μ-flown: Novel device measuring acoustical flows. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 536-539. IEEE Computer Society. ISBN 91-630-3473-5
Elders, J. and Jansen, H.V. and Elwenspoek, M.C. and Ehrfeld, W. (1995) DEEMO: a new technology for the fabrication of microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 238-243. IEEE Computer Society. ISBN 0-7803-2503-6
Jansen, H.V. and de Boer, M.J. and Burger, J.F. and Legtenberg, R. and Elwenspoek, M.C. (1995) Black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317 *** ISI Impact 1,569 ***
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elders, J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Process for producing micromechanical structures by means of reactieve ion etching. Patent WO1995NL00221 (Application).
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1995) The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of micromechanics and microengineering, 5 (2). pp. 115-120. ISSN 0960-1317 *** ISI Impact 2,276 ***
Jansen, H.V. and de Boer, M.J. and Otter, B. and Elwenspoek, M.C. (1995) The black silicon method IV: the fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 88-93. IEEE Computer Society. ISBN 0-7803-2503-6
Jansen, H.V. and Gardeniers, J.G.E. and Fluitman, J.H.J. (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995, 3-5 Sept 1995, Copenhagen. pp. 1-13. MicroMechanics Europe. ISBN 8789935004
Legtenberg, R. and Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1995) Anisotropic reactive ion etching of silicon using SF6/O2/CHF3 gas mixtures Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651 *** ISI Impact 2,420 ***

1994

Elders, J. and Jansen, H.V. and Elwenspoek, M.C. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 170-175. IEEE Computer Society. ISBN 0-7803-1833-1
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe 1994, 5-6 Sept 1994, Pisa, Italy. pp. 1-5. MicroMechanics Europe.
Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247 *** ISI Impact 1,933 ***
Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparths, 14 Nov 1994, Vienna, Austria. pp. 1-10. Unknown. ISBN Not assigned

1978

Jansen, H.V. and Fluitman, J.H.J. and Wesseling, P. (1978) Some problems concerning the accuracy and efficiency of self- consistent iterative calculations in magnetic recording. IEEE Transactions on Magnetics, MAG-14. pp. 1141-1148. ISSN 0018-9464 *** ISI Impact 1,052 ***