EEMCS

Chapuis, Y.-A. and Jalabert, L. and Sarajlic, E. and Vermeer, R. and Collard, D. and Fujita, H. (2011) Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico. pp. 141-144. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4