EEMCS

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) Electrochemical micro actuator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 106-110. IEEE Computer Society. ISBN 0-7803-2503-6

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 41 (1). pp. 4-6. ISSN 0885-3010 *** ISI Impact 1,460 ***

Tilmans, H.A.C. and Bouwstra, S. and IJntema, D.J. and Elwenspoek, M.C. and Klein, C.F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247 *** ISI Impact 1,933 ***

Tilmans, H.A.C. and IJntema, D.J. and Fluitman, J.H.J. (1991) Single element excitation and detection of (micro-)mechanical resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA. pp. 533-537. IEEE Computer Society. ISBN 0-87942-585-7