EEMCS EPrints Service
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2008
Herfst, R.W. and Steeneken, P.G. and Huizing, H.G.A. and Schmitz, J.
(2008)
Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches.
IEEE Transactions on Semiconductor Manufacturing, 21 (2).
pp. 148-153.
ISSN 0894-6507
*** ISI Impact 0,748 ***
2006
Herfst, R.W. and Huizing, H.G.A. and Steeneken, P.G. and Schmitz, J.
(2006)
Characterization of dielectric charging in RF MEMS capacitive switches.
In: Proceedings of the 2006 International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, TX, USA.
pp. 133-136.
IEEE.
ISBN 1-4244-0167-4
2005
Herfst, R.W. and Huizing, H.G.A. and Steeneken, P.G. and Schmitz, J.
(2005)
Characterization of dielectric charging in RF MEMS.
In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands.
pp. 11-14.
Technology Foundation STW.
ISBN 90-73461-50-2
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