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2010
Sarajlic, E. and Vermeer, R. and Delalande, M.Y. and Siekman, M.H. and Huijink, R. and Fujita, H. and Abelmann, L.
(2010)
Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining.
In: 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systemes, MEMS 2010, 24-28 Jan 2010, Wanchai, Hong Kong.
pp. 328-331.
IEEE Magnetics Society.
ISSN 1084-6999
ISBN 978-1-4244-5761-8
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