EEMCS EPrints Service
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2011
Krijnen, B. and Hogervorst, R.P. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R.
(2011)
A single-mask thermal displacement sensor in MEMS.
Journal of micromechanics and microengineering, 21 (7).
pp. 074007-074019.
ISSN 0960-1317
*** ISI Impact 2,276 ***
2010
Hogervorst, R.P. and Krijnen, B. and Brouwer, D.M. and Engelen, J.B.C. and Staufer, U.
(2010)
A single-mask thermal displacement sensor in MEMS.
In: Proceedings of the Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, 31 May - June 4 2010, Delft, The Netherlands.
pp. 462-465.
Delft University.
ISBN 978-0-9553082-8-4
Krijnen, B. and Hogervorst, R.P. and Engelen, J.B.C. and van Dijk, J.W. and Brouwer, D.M. and Abelmann, L.
(2010)
Single-mask thermal displacement sensor in MEMS.
In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands.
pp. 52-55.
University of Twente - TST.
ISBN 978-90-81673716
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