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OrganisationEEMCS EPrints Service
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2011
Krijnen, B. and Hogervorst, R. and van Dijk, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R.
(2011)
A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation].
Mikroniek, 51 (4).
pp. 5-11.
ISSN 0026-3699
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