EEMCS

Lötters, J.C. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Wiegerink, R.J. (2012) Fully integrated micro coriolis mass flow sensor operating at atmospheric pressure. Technisches Messen, 79 (1). pp. 4-9. ISSN 0171-8096 *** ISI Impact 0,211 ***

Groenesteijn, J. and Lammerink, T.S.J. and Lötters, J.C. and Haneveld, J. and Wiegerink, R.J. (2011) Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In: Proceedings of Micromechanics and Micro systems Europe Workshop, MME2011, 19-22 Jun 2011, Toensberg, Noorwegen. pp. 1-4. Micromechanics and Micro systems Europe . ISBN 978-82-7860-224-9

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of a micro Coriolis mass flow sensor. In: Proceedings Eurosensors XXV, 4-7 sep 2011, Athens, Greece. pp. 783-786. Procedia Engineering 25. Elsevier. ISSN 1877-7058

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of the Lorentz Force Actuation for a micro Coriolis mass flow sensor. In: Netherlands MicroNano Conference 2011, 15-16 Nov 2011, Ede, The Netherlands. pp. 1-1. MicroNano Conference. ISBN not assigned

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Wiegerink, R.J. (2011) Flowmeter. Patent US7895905 (Assigned).

Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. and Groenesteijn, J. and Haneveld, J. (2011) Single chip flow sensing system with a dynamic flow range of more than 4 decades. In: Proceedings of 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China. pp. 890-893. IEEE . ISBN 978-1-4577-0157-3

Lötters, J.C. and Lammerink, T.S.J. and Groenesteijn, J. and Haneveld, J. and Wiegerink, R.J. (2011) Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades. In: Netherlands MicroNano Conference 2011, 15-16 Nov 2011, Ede, The Netherlands. pp. 1-1. MicroNano Conference. ISBN not assigned

Wiegerink, R.J. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Lötters, J.C. (2011) Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 1135-1138. IEEE . ISBN 978-1-4244-9633-4

Brunets, N. and Haneveld, J. and Jansen, H.V. and Tas, N.R. (2010) Viscosity of Water in Nano-Confinement. In: Micro- and nanofluidics for cell biology, 18-22 January 2010, Leiden. 1. Lorentz Center. ISSN not assigned

Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Sanders, R.G.P. and Mehendale, A. and Lötters, J.C. and Dijkstra, M.A. and Wiegerink, R.J. (2010) Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor. Journal of micromechanics and microengineering, 20 (6). 125001. ISSN 0960-1317 *** ISI Impact 2,276 ***

Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Listening to MEMS: An acoustic vibrometer. In: Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on, 24-28 Jan 2010, Hong Kong. pp. 1-4. MEMS 2010. ISSN 1084-6999 ISBN 978-1-4244-5763-2

Haneveld, J. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: IEEE 22nd International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 463-466. Institute of Electrical and Electronics Engineering, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6

Hoang, Thi Hanh and Segers-Nolten, I.M. and Berenschot, J.W. and de Boer, M.J. and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of micromechanics and microengineering, 19 (065017). pp. 1-10. ISSN 0960-1317 *** ISI Impact 2,276 ***

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Lötters, J.C. (2009) Flowmeter with silicon flow tube. Patent NL1034905 (Assigned).

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Brunets, N. and van Honschoten, J.W. (2009) Capillarity effect in silicon based nanochannels. In: Proceedings Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam. pp. 1-1. IWNA 2009 International Conference. ISBN not assigned

Wiegerink, R.J. and Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. (2009) Thermal and Coriolis type micro flow sensors based on surface channel technology. Procedia Chemistry, 1 (1). pp. 1455-1458. ISSN 1876-6196

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and de Boer, M.J. and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States. pp. 920-923. IEEE Computer Society. ISBN 978-1-4244-1793-3

Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). 14309. ISSN 0021-8979 *** ISI Impact 2,064 ***

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Lötters, J.C. (2008) Flowmeter with silicon flow tube. Patent NL20081034905 (Application).

Lammerink, T.S.J. and Dijkstra, M.A. and Haneveld, J. and Wiegerink, R.J. (2008) Flowmeter. Patent US20080335045 (Application).

Haneveld, J. (2006) Nanochannel Fabrication and characterization using bond micromachining. PhD thesis, University of Twente. ISBN 90-365-2312-5

Haneveld, J. and Berenschot, J.W. and Maury, P.A. and Jansen, H.V. (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of micromechanics and microengineering, 16. S24-S28. ISSN 0960-1317 *** ISI Impact 2,276 ***

Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven. 192. Technische Universiteit Eindhoven. ISBN not assigned

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Wiegerink, R.J. (2006) Micro coriolis flow sensor. In: Proceedings of the NanoNed / MicroNed Symposium II, 16-17 Nov 2006, Eindhoven. 174. University of Eindhoven. ISBN not assigned

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. (Invited) In: Meeting abstracts 210th ECS Meeting, 29 Oct - 3 Nov 2006, Cancun, Mexico. pp. 1-1. Electrochemical Society. ISSN 1091-8213

Haneveld, J. and Berenschot, J.W. and Pascale, M. and Jansen, H.V. (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 72-75. Chalmers University . ISBN 9163175533

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2004) Capillary filling speed of water in nanochannels. Applied physics letters, 85 (15). pp. 3274-3276. ISSN 0003-6951 *** ISI Impact 3,820 ***

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2003) Wet anisotropic etching for fluidic 1d nanochannels. Journal of micromechanics and microengineering, 13 (4). S62-S66. ISSN 0960-1317 *** ISI Impact 2,276 ***

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.