EEMCS

Lee, Kyong-Tae and Schmitz, J. and Brown, G.A. and Heh, Dawei and Choi, Rino and Harris, R. and Song, Seung-Chul and Lee, Byoung Hun and Han, In-Shik and Lee, Hi-Deok and Jeong, Yoon-Ha (2007) Test structures for accurate UHF C-V measurements of nano-scale CMOSFETs with HfSiON and TiN metal gate. In: Proceedings of the 2007 IEEE International Conference on Microelectronic Test Structures, 19-22 March 2007, Tokyo, Japan.. pp. 124-127. IEEE Computer Society. ISBN 1-4244-0781-8