EEMCS

Melai, J. and Salm, C. and Smits, S.M. and Blanco Carballo, V.M. and Schmitz, J. and Hageluken, B. (2007) Considerations on using SU-8 as a construction material for high aspect ratio structures. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 529-534. Technology Foundation STW. ISBN 978-90-73461-49-9