EEMCS

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2004) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. Microsystem technologies, 10 (5). pp. 364-371. ISSN 0946-7076 *** ISI Impact 1,069 ***

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France. pp. 245-250. IEEE Computer Society. ISBN 0-7803-7066-X