EEMCS

Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2003) Static friction in elastic adhesion contacts in MEMS. Journal of Adhesion Science and Technology, 17 (4). 547-561. ISSN 0169-4243 *** ISI Impact 0,980 ***

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and van den Berg, A. and Elwenspoek, M.C. (2001) Selective Wafer Bonding by Surface Roughness Control. Journal of the Electrochemical Society, 148 (4). g225-g228. ISSN 0013-4651 *** ISI Impact 2,420 ***

Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M.C. (2000) Etching pits and dislocations in Si. Sensors and actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247 *** ISI Impact 1,933 ***

Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2000) Static friction in elastic adhesive MEMS contacts, models and experiment. In: Proceedings of the IEEE Micro Electro Mechanical Systems, 23 - 27 Jan 2000, Miyazaki, Japan. pp. 193-198. IEEE Computer Society. ISBN 0-7803-5273-4

Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of applied physics, 85 (10). pp. 7448-7454. ISSN 0021-8979 *** ISI Impact 2,064 ***

Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The Surface adhesion parameter: A measure for wafer bondability. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 290-295. IEEE Computer Society. ISBN 0-7803-5194-0

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem technologies, 5 (3). pp. 138-143. ISSN 0946-7076 *** ISI Impact 1,069 ***

Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 1,933 ***

Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of chemical mechanical polishing in wafer bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651 *** ISI Impact 2,420 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of microelectromechanical systems, 7 (1). pp. 122-127. ISSN 1057-7157 *** ISI Impact 2,157 ***

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings, 25-29 Jan 1998, Heidelberg. pp. 482-487. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-4412-X

Sánchez, S. and Elwenspoek, M.C. and Gui, C. and De Nivelle, M.J.M.E. and De Vries, R. and De Korte, P.A.J. and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1998) A high-TC superconductor bolometer on a silicon nitride membrane. Journal of microelectromechanical systems, 7 (1). pp. 62-68. ISSN 1057-7157 *** ISI Impact 2,157 ***

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592 *** ISI Impact 3,316 ***

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromachining. Microsystem technologies, 3 (3). pp. 122-128. ISSN 0946-7076 *** ISI Impact 1,069 ***

Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4

Sánchez, S. and Elwenspoek, M.C. and Gui, C. and De Nivelle, M.J.M.E. and de Vries, R. and De Korte, P.A.J. and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitride membrane. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 506-571. IEEE Computer Society. ISBN 0-7803-3744-1

Sánchez, S. and Gui, C. and Elwenspoek, M.C. (1997) Spontaneous direct bonding of thick silicon nitride. Journal of micromechanics and microengineering, 7 (3). pp. 111-113. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gui, C. and Legtenberg, R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 5 (2). pp. 183-185. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 157-162. IEEE Computer Society. ISBN 0-7803-2503-6