EEMCS

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE transactions on semiconductor manufacturing, 25 (2). pp. 178-184. ISSN 0894-6507 *** ISI Impact 0,748 ***

Groenland, A.W. (2011) Nanolink-based thermal devices: integration of ALD TiN thin films. PhD thesis, University of Twente. ISBN 978-90-365-3213-6

Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of nanoscience and nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880 *** ISI Impact 1,351 ***

Van Hao, B. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 (3). pp. 214-220. ISSN 0013-4651 *** ISI Impact 2,420 ***

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: Proceedings of STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands. pp. 89-92. Technology Foundation STW. ISBN 978-90-73461-67-3

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: Proceedings of the 2009 IEEE International Conference on Microelectronic Test Structures, 30 Mar - 2 Apr 2009, Oxnard, CA, USA. pp. 191-195. IEEE Computer Society. ISBN 978-1-4244-4259-1

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands. pp. 150-152. Technology Foundation STW. ISBN 978-90-73461-62-8

Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,064 ***

Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247 *** ISI Impact 1,933 ***

Agiral, A. and Groenland, A.W. and Kumar Chinthaginjala, J. and Seshan, K. and Lefferts, L. and Gardeniers, J.G.E. (2008) On-chip microplasma reactors using carbon nanofibres and tungsten oxide nanowires as electrodes. Journal of physics D: applied physics, 41 (19). 194009. ISSN 0022-3727 *** ISI Impact 2,105 ***

Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: Proceedings of the 18th International Conference on Atomical Layer Deposition ALD 2008, 29 Jun - 2 Jul 2008, Bruges, Belgium. P-54. TUe Eindhoven. ISBN not assigned

Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands. pp. 468-471. Technology Foundation STW. ISBN 978-90-73461-56-7

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands. pp. 581-583. Technology Foundation STW. ISBN 978-90-73461-49-9

Hurley, P.K. and Cherkaoui, K. and McDonnell, S. and Hughes, G. and Groenland, A.W. (2007) Characterisation and passivation of interface defects in (1 0 0)/Si/SiO₂/HfO₂/TiN gate stacks Microelectronics reliability, 47 (2007) (8). pp. 1195-1201. ISSN 0026-2714 *** ISI Impact 1,066 ***

Groenland, A.W. (2006) Hot tips for chemistry: development of a carbon nanotube based field emitter array for plasma chemistry on chip. Master's thesis, University of Twente.

Hurley, P.K. and Cherkaoui, K. and Groenland, A.W. (2006) Electrically active interface defects in the (100)Si/SiO_x/HfO₂/TiN system: Origin, instabilities and passivation (Invited) In: 210th Meeting of The Electrochemical Society (ECS), October 29-November 3, 2006, Cancun, Mexico. pp. 97-110. ECS Transactions 3. The Electrochemical Society. ISSN 1938-5862