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Author: Gardeniers, J.G.E.
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2011

Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) Measurement of reaction heats using a polysilicon-based microcalorimetric sensor. Sensors and actuators A (Physical), 169 (2). pp. 308-316. ISSN 0924-4247 *** ISI Impact 1,933 ***
Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) The development of titanium silicide–boron-doped polysilicon resistive temperature sensors. Journal of micromechanics and microengineering, 21 (10). 105022. ISSN 0960-1317 *** ISI Impact 2,276 ***

2009

Illa, X. and De Malsche, D.M.W. and Bomer, J.G. and Gardeniers, J.G.E. and Eijkel, J.C.T. and Morante, J.R. and Romano-Rodriguez, A. and Desmet, G. (2009) An array of ordered pillars with retentive properties for pressure-driven liquid chromatography fabricated directly from an unmodified cyclo olefin polymer. Lab on a chip, 9 (11). pp. 1511-1516. ISSN 1473-0197 *** ISI Impact 6,260 ***
Li, X. and van der Steen, G. and van Dedem, G.W.K. and van der Wielen, L.A.M. and van Leeuwen, M. and van Gulik, W.M. and Heijnen, J.J. and Ottens, M. and Krommenhoek, E.E. and Gardeniers, J.G.E. and van den Berg, A. (2009) Application of Direct Fluid Flow Oscillations to Improve Mixing in Microbioreactors. AIChE journal: chemical engineering research and development, 55 (10). pp. 2725-2736. ISSN 0001-1541 *** ISI Impact 2,030 ***
Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of applied physics, 105 (3). 033714. ISSN 0021-8979 *** ISI Impact 2,064 ***
Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247 *** ISI Impact 1,933 ***

2008

Agiral, A. and Groenland, A.W. and Kumar Chinthaginjala, J. and Seshan, K. and Lefferts, L. and Gardeniers, J.G.E. (2008) On-chip microplasma reactors using carbon nanofibres and tungsten oxide nanowires as electrodes. Journal of physics D: applied physics, 41 (19). 194009. ISSN 0022-3727 *** ISI Impact 2,105 ***
Basabe-Desmonts, L. and Benito-Lopez, F. and Gardeniers, J.G.E. and Duwel, R. and van den Berg, A. and Reinhoudt, D.N. and Crego-Calama, M. (2008) Fluorescent sensor array in a microfluidic chip. Analytical and bioanalytical chemistry, 390 (1). pp. 307-315. ISSN 1618-2642 *** ISI Impact 3,841 ***
Krommenhoek, E.E. and van Leeuwen, M. and Gardeniers, J.G.E. and van Gulik, W.M. and van den Berg, A. and Li, X.N. and Ottens, M. and van der Wielen, L.A.M. and Heiinen, J.J. (2008) Lab-scale fermentation tests of microchip with integrated electrochemical sensors for pH, temperature, dissolved oxygen and viable biomass concentration. Biotechnology and bioengineering, 99 (4). pp. 884-892. ISSN 0006-3592 *** ISI Impact 3,700 ***
Li, X. and van der Steen, G. and Dedum, G.W.K. and van der Wielen, L.A.M. and van Leeuwen, M. and van Gulik, W.M. and Heijnen, J.J. and Krommenhoek, E.E. and Gardeniers, J.G.E. and van den Berg, A. and Ottens, M. (2008) Improving mixing in microbioreactors. Chemical engineering science, 63 (11). pp. 3036-3046. ISSN 0009-2509 *** ISI Impact 2,379 ***
Nichols, K.P.F. and Eijkel, J.C.T. and Gardeniers, J.G.E. (2008) Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels. Lab on a chip, 8 (1). pp. 173-175. ISSN 1473-0197 *** ISI Impact 6,260 ***
Pirat, C. and Naso, A. and van der Wouden, E.J. and Gardeniers, J.G.E. and Lohse, D. and van den Berg, A. (2008) Quantification of electrical field-induced flow reversal in a microchannel. Lab on a chip, 8 (6). pp. 945-949. ISSN 1473-0197 *** ISI Impact 6,260 ***

2007

Krommenhoek, E.E. and Gardeniers, J.G.E. and Bomer, J.G. and Li, X. and Ottens, M. and van Dedem, G.W.K. and van Leeuwen, M. and van Gulik, W.M. and van der Wielen, L.A.M. and Heijnen, J.J. and van den Berg, A. (2007) Integrated electrochemical sensor array for on-line monitoring of yeast fermentations. Analytical chemistry, 79 (15). pp. 5567-5573. ISSN 0003-2700 *** ISI Impact 5,874 ***
Schlautmann, S. and van den Berg, A. and Gardeniers, J.G.E. (2007) Microfluidic device. Patent US20070843124 (Application).
Tiggelaar, R.M. and Benito-Lopez, F. and Hermes, D.C. and Rathgen, H. and Egberink, R.J.M. and Mugele, F.G. and Reinhoudt, D.N. and van den Berg, A. and Verboom, W. and Gardeniers, J.G.E. (2007) Fabrication, mechanical testing and application of high-pressure glass microreactor chips. Chemical engineering journal, 131 (1-3). pp. 163-170. ISSN 1385-8947 *** ISI Impact 3,074 ***
Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of vacuum science and technology B, 25 (4). pp. 1207-1216. ISSN 1071-1023 *** ISI Impact 1,268 ***

2006

Agiral, A. and Gardeniers, J.G.E. (2006) Characterization of an atmospheric pressure noneequilibrium surface barrier discharge microplasma with liquid electrode. In: International Workshop on Microplasmas 2006, 9-11 May 2006, Greifswald, Germany. 104. 3rd International Workshop on Microplasmas. Kiebu-Druck GmbH. ISBN 3-00-018723-5
Agiral, A. and Trionfetti, C. and Seshan, K. and Lefferts, L. and Gardeniers, J.G.E. (2006) Propane conversion in a surface-discharge microplasma reactor. In: IMRET 9 - 9th International Conference on Microreaction Technology, 6-8 Sept 2006, Potsdam/Berlin, Germany. pp. 383-384. IMRET 9. Dechema. ISBN not assigned
Benito-Lopez, F. and Tiggelaar, R.M. and Egberink, R.J.M. and Gardeniers, J.G.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2006) Pressure and supercritical CO2 conditions improve the esterification reaction of phtalic anhydride with methanol in glass microreactors In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 564-566. Micro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3
Bula, W.P. and Kristianto, K. and Gardeniers, J.G.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2006) Multichannel quench-flow microreactor for high-troughput reaction kinetics monitoring on a chip. In: IMRET 9 - 9th International Conference on Microreaction Technology, 6-8 Sept 2006, Potsdam/Berlin, Germany. pp. 134-135. IMRET 9. Dechema. ISBN not assigned
De Malsche, D.M.W. and Clicq, D. and Eghbati, H. and Fekete, V. and Gardeniers, J.G.E. and Desmet, G. (2006) An automated injection system for sub-micron sized channels used in shear-driven-chromatography. Lab on a chip, 6 (10). pp. 1322-1327. ISSN 1473-0197 *** ISI Impact 6,260 ***
De Malsche, D.M.W. and Eghbali, H. and de Smet, J. and Gardeniers, J.G.E. and Desmet, G. (2006) An optical injection system used for optimalization studies of high aspect ratio LC pillar array columns. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 564-566. Micro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3
Desmet, G. and De Malsche, D.M.W. and Eghbali, H. and Vangelooven, J. and Clicq, D. and Gardeniers, J.G.E. (2006) Shifting the performance barriers of HPLC using micro-fabricated chromatographic columns. In: NanoTech - The 10th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences, 14-16 Sept 2006, Montreux, Switzerland. Nanotech 10. Scitec. ISBN not assigned
Fekete, V. and Clicq, D. and De Malsche, D.M.W. and Gardeniers, J.G.E. and Desmet, G. (2006) Detection enhancement in nano-channels using micro-machined silicon groove. Journal of chromatography A, 1130 (1). pp. 151-157. ISSN 0021-9673 *** ISI Impact 4,194 ***
Fekete, V. and Clicq, D. and De Malsche, D.M.W. and Gardeniers, J.G.E. and Desmet, G. (2006) Detection enhancement for on-chip nano-channel chromatography. In: 9th International symposium of Hyphenated Techniques in Chromatography and Hyphenated Chromatographic Analyzers & Eight International Symposium on Advances in Extraction Techniques 2006, 8-10 Feb 2006, York, UK. pp. 63-63. HTC. Royal Society of Chemistry. ISBN 90-74870-08-2
Gardeniers, J.G.E. (2006) Microfluidics for chemical processing. In: Proceedings 2006 ASME Joint US-European Fluids Engineering Summer Meeting, 13-17 July 2006, Miami. pp. 1-4. ASME. ISBN 0-7918-3783-1
Hermes, D.C. and Heuser, T. and van der Wouden, E.J. and Gardeniers, J.G.E. and van den Berg, A. (2006) Fabrication of microfluidic networks with integrated electrodes. Microsystem technologies, 12 (5). pp. 436-440. ISSN 0946-7076 *** ISI Impact 1,069 ***
Krommenhoek, E.E. and Gardeniers, J.G.E. and van den Berg, A. and Li, X. and Ottens, M. and van der Wielen, L.A.M. and van Dedem, G.W.K. and van Leeuwen, M. and van Gulik, W.M. and Heijnen, J.J. (2006) Integrated electrochemical sensor array for on-line monitoring of yeast fermentations. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 729-731. Mciro Total Analysis Systems 2006 -1. Japan Academic Association Inc. ISBN 4-9903269-0-3
Krommenhoek, E.E. and Gardeniers, J.G.E. and Bomer, J.G. and van den Berg, A. and Li, X. and Ottens, M. and van der Wielen, L.A.M. and van Dedem, G.W.K. and van Leeuwen, M. and van Gulik, W.M. and Heijnen, J.J. (2006) Monitoring of yeast cell concentration using a micromachnined impedance sensor. Sensors and Actuators B: Chemical, 115 (1). pp. 384-389. ISSN 0925-4005 *** ISI Impact 3,368 ***
Marmottant, P. and Raven, J.P. and Gardeniers, J.G.E. and Bomer, J.G. and Hilgenfeldt, S. (2006) Microfluidics with ultrasound-driven bubbles. Journal of fluid mechanics, 568. pp. 109-118. ISSN 0022-1120 *** ISI Impact 2,453 ***
Nichols, K.P.F. and Gardeniers, J.G.E. (2006) Ultrarapid droplet mixer for digital microfluidics utilizing self-propelled water droplets. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 582-584. Mciro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3
Nichols, K.P.F. and Gardeniers, J.G.E. (2006) A digital microfluidic system to facilitate presteady state kinetic studies using MALDI-TOF MS. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 564-566. Micro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3
Oosterbroek, R.E. and Hermes, D.C. and Kakuta, M. and Benito-Lopez, F. and Gardeniers, J.G.E. and Verboom, W. and Reinhoudt, D.N. and van den Berg, A. (2006) Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry. microsystem technologies, 12 (5). pp. 450-454. ISSN 0946-7076 *** ISI Impact 1,069 ***
de Pra, M. and Kok, W.T. and Gardeniers, J.G.E. and Desmet, G. and Eeltink, S. and van Nieuwkasteele, J.W. and Schoenmakers, P.J. (2006) Experimental study on band dispersion in channels structured with micropillars. Analytical chemistry, 78 (18). pp. 6519-6525. ISSN 0003-2700 *** ISI Impact 5,874 ***
Tiggelaar, R.M. and Benito-Lopez, F. and Hermes, D.C. and Egberink, R.J.M. and Gardeniers, J.G.E. and Verboom, W. and Reinhoudt, D.N. and van den Berg, A. (2006) Fabrication and mechanical testing of high-pressure glass microreactor chips. In: IMRET 9 - 9th International Conference on Microreaction Technology, 6-8 Sept 2006, Potsdam/Berlin, Germany. pp. 134-135. IMRET 9. Dechema. ISBN not assigned
Tiggelaar, R.M. and Gardeniers, J.G.E. and van den Berg, A. (2006) Silicon-based microreactors as research tools in chemistry. Chimica Oggi Chemistry Today, 24 (2). pp. 52-54. ISSN 0392-839x *** ISI Impact 0,405 ***
Vankrunkelsven, S. and Clicq, D. and Cabooter, D. and De Malsche, D.M.W. and Gardeniers, J.G.E. and Desmet, G. (2006) Ultra-rapid separation of an angiotensin mixture in nanochannels using shear-driven chromatography. Journal of chromatography A, 1102 (1-2). pp. 96-103. ISSN 0021-9673 *** ISI Impact 4,194 ***
van der Wouden, E.J. and Gardeniers, J.G.E. and van den Berg, A. (2006) Transient charging of the electric double layer in field effect-flow control electro-osmotic flow. In: Proceedings of microTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan. pp. 83-85. Micro Total Analysis Systems 2006-1. Japan Academic Association Inc. ISBN 4-9903269-0-3
van der Wouden, E.J. and Hermes, D.C. and Gardeniers, J.G.E. and van den Berg, A. (2006) Directional flow induced by synchronized longitudinal and zeta-potential controlling AC-electrical fields. Lab on a chip, 6 (10). pp. 1300-1305. ISSN 1473-0197 *** ISI Impact 6,260 ***
van der Wouden, E.J. and Liang, D. and Hermes, D.C. and Gardeniers, J.G.E. and van den Berg, A. (2006) Field-effect control of electro-osmotic flow with synchronized ac-switching of channel and gate potentials. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, 22-26 Jan 2006, Istanbul, Turkey. pp. 510-513. MEMS 2006 - 19th IEEE International Conference on Micro Electro Mechanical Systems (06CH37725). IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5

2005

Benito-Lopez, F. and Verboom, W. and Kakuta, M. and Gardeniers, J.G.E. and Egberink, R.J.M. and Oosterbroek, R.E. and van den Berg, A. and Reinhoudt, D.N. (2005) Optical fiber-based-on-line UV/Vis spectroscopic monitoring of chemical reaction kinetics under high pressure in a capillary microreactor. Chemical communications, 22. pp. 2857-2859. ISSN 1359-7345 *** ISI Impact 5,787 ***
Brivio, M. and Tas, N.R. and Goedbloed, M.H. and Gardeniers, J.G.E. and Verboom, W. and van den Berg, A. and Reinhoudt, D.N. (2005) A maldi-chip integrated system with a monitoring window. Lab on a chip, 5 (4). pp. 378-381. ISSN 1473-0197 *** ISI Impact 6,260 ***
De Malsche, D.M.W. and Clicq, D. and Eghbali, H.J. and Vervoort, N. and Gardeniers, J.G.E. and van den Berg, A. and Desmet, G. (2005) Extending the functionalities of shear-driven chromatography nano-channels using high aspect ratio etching. In: MicroTAS 2005 - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 October 2005, Boston, MA, USA. pp. 106-108. Transducer Research Foundation, Inc.. ISBN 9780444511003
Emmelkamp, J. and Gardeniers, J.G.E. and Anderson, S.M.H. and van den Berg, A. (2005) Planar Nanoneedles on-chip for intracellular measurements. In: MicroTAS 2005 Conference -9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 October 2005, Boston, MA, USA. pp. 400-402. Micro total analysis systems 2005. Transducer Research Foundation. ISBN 9780444511003
Gardeniers, J.G.E. and van den Berg, A. (2005) Microfabrication and integration - Separation methods in microanalytical systems. In: Separation Methods in Microanalytical Systems. Microfabrication and Integration. Taylor & Francis, Oxford, pp. 55-106. ISBN 9780824725303
Hilgenfeldt, S. and Marmottant, P. and Gardeniers, J.G.E. (2005) Microfluid apparatus for e.g. MEMS applications, comprises gas bubble holder, ultrasound transducer and passive flow element inside liquid vessel. Patent NL1026321 (Application).
Krommenhoek, E.E. and Gardeniers, J.G.E. and Bomer, J.G. and van den Berg, A. and Li, X. and Ottens, M. and van der Wielen, L.A.M. and van Dedem, G.W.K. and Leeuwen, M. and van Guik, W.M. and Heijnen, J.J. (2005) Monitoring of yeast cell concentration using a micromachined impedance sensor. In: The 13th International Conference on Solid-StateSensors, Actuators and Microsystems, (Transducers 2005), 5-9 June 2005, Seoul, Korea. pp. 283-286. IEEE. ISBN 0-7803-8994-8
de Pra, M. and Kok, W.Th. and Gardeniers, J.G.E. and Desmet, G. and Schoenmakers, P.J. (2005) Improving liquid chromatography efficiency: channels structured with micro-pillars. In: MicroTAS 2005 Conference - 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 Oct 2005, Boston, MA, USA. pp. 838-840. Micro total analysis systems 2005. Transducer Research Foundation. ISBN 9780974361116
Tiggelaar, R.M. and Berenschot, J.W. and de Boer, J.H. and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. Lab on a chip, 5. pp. 326-336. ISSN 1473-0197 *** ISI Impact 6,260 ***
Tiggelaar, R.M. and Berenschot, J.W. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and actuators A: Physical, 119 (1). pp. 196-205. ISSN 0924-4247 *** ISI Impact 1,933 ***
Tong, D.H. and van den Berg, A. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane. Thin solid films, 479 (1-2). pp. 89-94. ISSN 0040-6090 *** ISI Impact 1,909 ***
Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and de Boer, M.J. and de Boer, J.H. and van Rijn, C.J.M. and Elwenspoek, M.C. (2005) Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation. Journal of microelectromechanical systems, 14 (1). pp. 113-123. ISSN 1057-7157 *** ISI Impact 2,157 ***
Wensink, H. and Benito-Lopez, F. and Hermes, D.C. and Verboom, W. and Gardeniers, J.G.E. and Reinhoudt, D.N. and van den Berg, A. (2005) Measuring reaction kinetics in a lab-on-a-Chip by microcoil NMR. Lab on a chip, 5 (3). pp. 280-284. ISSN 1473-0197 *** ISI Impact 6,260 ***
van der Wouden, E.J. and Heuser, T. and Hermes, D.C. and Oosterbroek, R.E. and Gardeniers, J.G.E. and van den Berg, A. (2005) Field-effect control of electro-osmotic flow in microfluidic networks. Colloids and surfaces A Physicochemical and engineering aspects, 267 (1-3). pp. 110-116. ISSN 0927-7757 *** ISI Impact 2,130 ***

2004

Hilgenfeldt, S. and Marmottant, P. and Gardeniers, J.G.E. (2004) Microfluid apparatus for e.g. MEMS applications, comprises gas bubble holder, ultrasound transducer and passive flow element inside liquid vessel. Patent NL20041026321 (Application).
Tiggelaar, R.M. and Loeters, P.W.H. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and Elwenspoek, M.C. and van den Berg, A. (2004) Thermal and mechanical analysis of a microreactor for high temperature catalytic gas phase reactions. Sensors and actuators A: Physical, 112 (2-3). pp. 267-277. ISSN 0924-4247 *** ISI Impact 1,933 ***
Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and van Rijn, C.J.M. and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and engineering chemistry research, 43 (15). pp. 4182-4187. ISSN 0888-5885 *** ISI Impact 2,071 ***

2003

van der Heyden, F.H.J. and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005 *** ISI Impact 3,368 ***
Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Prak, A. and Mateman, R. and Wissink, J.M. and van den Berg, A. (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005 *** ISI Impact 3,368 ***
Tong, D.H. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Wensink, H. and Jansen, H.V. and Nijdam, A.J. and Elwenspoek, M.C. and Gielens, F.C. and van Rijn, C.J.M. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of microelectromechanical systems, 12 (5). pp. 622-629. ISSN 1057-7157 *** ISI Impact 2,157 ***
Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, USA. pp. 1742-1745. IEEE Electron Devices Society. ISBN 0-7803-7731-1
Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. In: SESENS 2002, 29 Nov 2002, Veldhoven, the Netherlands. pp. 688-691. Technology Foundation STW. ISBN not assigned

2002

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2002) Design and fabrication of a hydrodynamic chromatography chip. Sensors and Actuators B: Chemical, 82 (1). pp. 111-116. ISSN 0925-4005 *** ISI Impact 3,368 ***
de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Smulders, E.J.T. and Gilde, M.-J. and Roelofs, G.H.M. and Sasserath, J.N. and Elwenspoek, M.C. (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of microelectromechanical systems, 11 (4). pp. 385-401. ISSN 1057-7157 *** ISI Impact 2,157 ***
Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140 *** ISI Impact 3,722 ***
Tong, D.H. and Gielens, F.C. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 Jan 2002, Las Vegas, NV. pp. 268-271. IEEE Computer Society. ISBN 0-7803-7185-2
Veenstra, T.T. and Sharma, N.R. and Forster, F.K. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) The design of an in-plane compliance structure for microfluidical systems. Sensors and actuators B (Chemical), 81 (2-3). pp. 377-383. ISSN 0925-4005 *** ISI Impact 3,368 ***

2001

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of micromechanics and microengineering, 11 (4). pp. 382-385. ISSN 0960-1317 *** ISI Impact 2,276 ***
Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Failure mechanisms of pressurized microchannels, model, and experiments. Journal of microelectromechanical systems, 10 (1). pp. 158-164. ISSN 1057-7157 *** ISI Impact 2,157 ***
Burger, G.J. and Holland, H.J. and Berenschot, J.W. and Seppenwodde, J.H. and ter Brake, H.J.M. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2001) 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan 2001, interlaken. pp. 418-421. IEEE Computer Society. ISBN 0-7803-5998-4
Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Van Veenendaal, E. and Van Suchtelen, J. and Elwenspoek, M.C. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of micromechanics and microengineering, 11 (5). pp. 499-503. ISSN 0960-1317 *** ISI Impact 2,276 ***
Nijdam, A.J. and Van Veenendaal, E. and Cuppen, H.M. and Van Suchtelen, J. and Reed, M.L. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Vlieg, E. and Elwenspoek, M.C. (2001) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: Experiments and Monte Carlo simulation. Journal of applied physics, 89 (7). pp. 4113-4123. ISSN 0021-8979 *** ISI Impact 2,064 ***
Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Use of Selective Anodic Bonding to Create Micropump Chambers with Virtually No Dead Volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651 *** ISI Impact 2,420 ***

2000

Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2000) Failure mechanisms of pressurized microchannels, model and experiments. In: Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, 23-27 Jan 2000, Miyazaki, Japan. pp. 199-204. IEEE Computer Society. ISBN 0-7803-5273-4
de Boer, M.J. and Tjerkstra, R.W. and Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2000) Micromachining of buried micro channels in silicon. Journal of microelectromechanical systems, 9 (1). pp. 94-103. ISSN 1057-7157 *** ISI Impact 2,157 ***
Neagu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The electrolysis of water: An actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4-5). pp. 571-581. ISSN 0957-4158 *** ISI Impact 0,944 ***
Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M.C. (2000) Etching pits and dislocations in Si{111}. Sensors and actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247 *** ISI Impact 1,933 ***
Nijdam, A.J. and van Veenendaal, E. and Gardeniers, J.G.E. and Kentgens, A.P.M. and Nachtegaal, G.H. and Elwenspoek, M.C. (2000) 29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147 (6). pp. 2195-2198. ISSN 0013-4651 *** ISI Impact 2,420 ***
Tjerkstra, R.W. and Gardeniers, J.G.E. and Kelly, J.J. and van den Berg, A. (2000) Multi-walled microchannels: free-standing porous silicon membranes for use in $\mu$TAS. Journal of microelectromechanical systems, 9 (4). pp. 495-501. ISSN 1057-7157 *** ISI Impact 2,157 ***
Van Veenendaal, E. and Nijdam, A.J. and Van Suchtelen, J. and Sato, K. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Elwenspoek, M.C. (2000) Simulation of anisotropic wet chemical etching using a physical model. Sensors and actuators A: Physical, 84 (3). pp. 324-329. ISSN 0924-4247 *** ISI Impact 1,933 ***
van Veenendaal, E. and van Suchtelen, J. and van Enckevort, W.J.P. and Sato, K. and Nijdam, A.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide. Journal of applied physics, 87 (12). pp. 8732-8740. ISSN 0021-8979 *** ISI Impact 2,064 ***

1999

Burger, J.F. and Van der Wekken, M.C. and Berenschot, J.W. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) High pressure check valve for application in a miniature cryogenic sorption cooler. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 183-188. IEEE Computer Society. ISBN 0-7803-5194-0
Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of applied physics, 85 (10). pp. 7448-7454. ISSN 0021-8979 *** ISI Impact 2,064 ***
Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The Surface adhesion parameter: A measure for wafer bondability. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 290-295. IEEE Computer Society. ISBN 0-7803-5194-0
Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem technologies, 5 (3). pp. 138-143. ISSN 0946-7076 *** ISI Impact 1,069 ***
Nijdam, A.J. and Berenschot, J.W. and Van Suchtelen, J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. Journal of micromechanics and microengineering, 9 (2). pp. 135-138. ISSN 0960-1317 *** ISI Impact 2,276 ***
Nijdam, A.J. and Van Suchtelen, J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: A critical look at the {111} minimum. Journal of crystal growth, 198-199 (pt 1). pp. 430-434. ISSN 0022-0248 *** ISI Impact 1,737 ***
Van Suchtelen, J. and Sato, K. and Van Veenendaal, E. and Nijdam, A.J. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Elwenspoek, M.C. (1999) Simulation of anisotropic wet-chemical etching using a physical model. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17 - 21 Jan 1999, Orlando, FL, USA. pp. 332-337. IEEE Computer Society. ISBN 0-7803-5194-0

1998

Gardeniers, J.G.E. and Verholen, A.G.B.J. and Tas, N.R. and Elwenspoek, M.C. (1998) Direct measurement of piezoelectric properties of Sol-Gel PZT films. Journal of the Korean Physical Society, 32 (4). S1573-S1577. ISSN 0374-4884 *** ISI Impact 0,476 ***
Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 1,933 ***
Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of chemical mechanical polishing in wafer bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651 *** ISI Impact 2,420 ***
Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings, 25-29 Jan 1998, Heidelberg. pp. 482-487. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-4412-X
Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592 *** ISI Impact 3,316 ***

1997

Ducso, C. and Vazsonyi, E. and Adam, M. and Szabo, I. and Barsony, I. and Gardeniers, J.G.E. and van den Berg, A. (1997) Porous silicon bulk micromachining for thermally isolated membrane formation. Sensors and actuators A: Physical, 60 (1-3 pt 1). pp. 235-239. ISSN 0924-4247 *** ISI Impact 1,933 ***
Dumitrescu, M. and Cobianu, C. and Lungu, D. and Dascalu, D.C. and Pascu, A. and van den Berg, A. and Gardeniers, J.G.E. and Kolev, S. and Ducso, C. and Barsony, I. (1997) Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation. In: Proceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2),, 7-11 October 1997, Sinaia, Romania. pp. 145-148. IEEE Computer Society. ISBN 0-7803-3804-9
Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromachining. Microsystem technologies, 3 (3). pp. 122-128. ISSN 0946-7076 *** ISI Impact 1,069 ***
Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4
Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1997) An electrochemical active valve. Electrochimica acta, 42 (20-22). pp. 3367-3373. ISSN 0013-4686 *** ISI Impact 3,642 ***
Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and actuators A: Physical, 62 (1-3 pt 3). pp. 599-611. ISSN 0924-4247 *** ISI Impact 1,933 ***
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686 *** ISI Impact 3,642 ***
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for microchannels. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 147-152. IEEE Computer Society. ISBN 0-7803-3744-1
Van Toor, M.W. and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Monsma, D.J. (1997) A novel micromechanical flow controller. Journal of micromechanics and microengineering, 7 (3). pp. 165-169. ISSN 0960-1317 *** ISI Impact 2,276 ***

1996

Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 277-284. IEEE Computer Society. ISBN 0-7803-2985-6
Bressers, P.M.M.C. and Kelly, J.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Surface morphology of p-type (100) silicon etched in aqueous alkaline solution. Journal of the Electrochemical Society, 143 (5). pp. 1744-1750. ISSN 0013-4651 *** ISI Impact 2,420 ***
Gardeniers, J.G.E. and Tilmans, H.A.C. and Visser, C.C.G. (1996) LPCVD silicon-rich silicon nitride films for applications in micromechanics, studied with statistical experimental design. Journal of vacuum science and technology A: vacuum, surfaces, and films, 14 (5). pp. 2879-2892. ISSN 0734-2101 *** ISI Impact 1,286 ***
Jansen, H.V. and Gardeniers, J.G.E. and de Boer, M.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of micromechanics and microengineering, 6 (1). pp. 14-28. ISSN 0960-1317 *** ISI Impact 2,276 ***
King, S.L. and Coccia, L.G. and Gardeniers, J.G.E. and Boyd, I.W. (1996) Microstructure of pulsed-laser deposited PZT on polished and annealed MGO substrates. In: Proceedings of the 1996 MRS Spring Symposium, 7-12 April 1996, San Francisco, CA, USA. pp. 157-162. Materials Research Society (MRS). ISSN 0272-9172
King, S.L. and Gardeniers, J.G.E. and Boyd, I.W. (1996) Pulsed-laser deposited ZnO for device applications. In: Proceedings of the 1995 E-MRS Spring Conference, 2 April 1996, Strasbourg, France. pp. 811-818. Elsevier. ISSN 0169-4332
Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1996) An electrochemical microactuator: Principle and first results. Journal of microelectromechanical systems, 5 (1). pp. 2-9. ISSN 1057-7157 *** ISI Impact 2,157 ***

1995

Craciun, V. and Amirhaghi, S. and Craciun, D. and Elders, J. and Gardeniers, J.G.E. and Boyd, I.W. (1995) Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition. Applied surface science, 86 (1). pp. 99-106. ISSN 0169-4332 *** ISI Impact 1,793 ***
Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Geretovsky, J. and Boyd, I.W. (1995) Growth of ZnO thin films on GaAs by pulsed laser deposition. Thin solid films, 259 (1). pp. 1-4. ISSN 0040-6090 *** ISI Impact 1,909 ***
Gardeniers, J.G.E. and Smith, A. and Cobianu, C. (1995) Characterisation of sol-gel PZT films on Pt-coated substrates. Journal of micromechanics and microengineering, 5 (2). pp. 153-155. ISSN 0960-1317 *** ISI Impact 2,276 ***
Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) Electrochemical micro actuator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 106-110. IEEE Computer Society. ISBN 0-7803-2503-6
Heideman, R.G. and Lambeck, P.V. and Gardeniers, J.G.E. (1995) High quality ZnO layers with adjustable refractive indices for integrated optics applications. Optical materials, 4 (6). pp. 741-755. ISSN 0925-3467 *** ISI Impact 1,678 ***
Jansen, H.V. and Gardeniers, J.G.E. and Fluitman, J.H.J. (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995, 3-5 Sept 1995, Copenhagen. pp. 1-13. MicroMechanics Europe. ISBN 8789935004

1994

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and actuators A: Physical, 41 ( 1-3 pt 3). pp. 338-343. ISSN 0924-4247 *** ISI Impact 1,933 ***
Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Boyd, I.W. (1994) Characteristics of high quality ZnO thin films deposited by pulsed laser deposition. Applied physics letters, 65 (23). pp. 2963-2965. ISSN 0003-6951 *** ISI Impact 3,820 ***
Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived PZT films on substrates with platinum metallization. In: Proceedings of the 1994 MRS Spring Meeting, 4-8 April 1994, San Francisco, CA, USA. pp. 451-456. Materials Research Society. ISSN 0272-9172
Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247 *** ISI Impact 1,933 ***