EEMCS

Engelen, J.B.C. and de Boer, H. and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and de Graaf, D. and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 193-196. University of Twente - TST. ISBN 978-90-81673716