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Author: Fluitman, J.H.J.
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1998

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of microelectromechanical systems, 7 (1). pp. 122-127. ISSN 1057-7157 *** ISI Impact 2,157 ***

1997

Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1997) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. JSME International Journal, Series C, 40 (1). pp. 33-41. ISSN 0914-8825
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of microelectromechanical systems, 6 (3). pp. 234-241. ISSN 1057-7157 *** ISI Impact 2,157 ***

1996

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247 *** ISI Impact 1,933 ***
Burger, J.F. and Burger, G.J. and Lammerink, T.S.J. and Imai, S. and Fluitman, J.H.J. (1996) Miniaturised friction force measuring system for tribological research on magnetic storage devices. In: Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 99-104. IEEE Computer Society. ISBN 0-7803-2985-6
Fluitman, J.H.J. (1996) Microsystems technology: Objectives. Sensors and actuators A: Physical, 56 (1-2). pp. 151-166. ISSN 0924-4247 *** ISI Impact 1,933 ***
Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1996) Fundamental study on a thin-film ae sensor for measurement of behavior of a multi-pad contact slider. In: Proceedings of the 1996 IEEE International Magnetics Conference (INTERMAG'96). Part 1 (of 3), 9-12 April 1996, Seattle, WA, USA. pp. 3675-3677. IEEE Computer Society. ISSN 0018-9464
Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1996) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 62 (595). pp. 928-938. ISSN 0387-5024
Jansen, H.V. and Gardeniers, J.G.E. and de Boer, M.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of micromechanics and microengineering, 6 (1). pp. 14-28. ISSN 0960-1317 *** ISI Impact 2,276 ***
Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M.C. and Fluitman, J.H.J. and van den Berg, A. (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 389-394. IEEE Computer Society. ISBN 0-7803-2985-6
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 204-209. IEEE Computer Society. ISBN 0-7803-2985-6
Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. and van den Berg, A. (1996) Micro analysis systems for fluids [Sistemi di microanalisi per fluidi]. Oleodinamica pneumatica Lubrificazione, 1. pp. 76-83. ISSN 1122-5017
Spiering, V.L. and Lammerink, T.S.J. and Jansen, H.V. and Fluitman, J.H.J. and van den Berg, A. (1996) Technologies and microstructures for separation techniques in chemical analysis. In: Proceedings of SPIE - The International Society for Optical Engineering - Micromachined Devices and Components II, 14-15 Oct 1996, Austin, TX, USA. pp. 91-100. SPIE, The International Society for Optical Engineering. ISSN 0277-786X

1995

Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. and Tokuyama, M. and Hirose, S. (1995) Piezoelectric impact force sensor array for tribological research on rigid disk storage media. In: Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 294-299. IEEE Computer Society. ISBN 0-7803-2503-6
Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. In: Transducers '95 - Eurosensors XI Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 573-576. IEEE Computer Society. ISBN 91-630-3473-5
Gui, C. and Legtenberg, R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 5 (2). pp. 183-185. ISSN 0960-1317 *** ISI Impact 2,276 ***
Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 157-162. IEEE Computer Society. ISBN 0-7803-2503-6
Imai, S. and Tokuyama, M. and Hirose, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. IEEE transactions on magnetics, 31 (6). pp. 3009-3011. ISSN 0018-9464 *** ISI Impact 1,052 ***
Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elders, J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Process for producing micromechanical structures by means of reactieve ion etching. Patent WO1995NL00221 (Application).
Jansen, H.V. and Gardeniers, J.G.E. and Fluitman, J.H.J. (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Sixth Workshop on Micromachining Micromechanics and Microsystems, MME 1995, 3-5 Sept 1995, Copenhagen. pp. 1-13. MicroMechanics Europe. ISBN 8789935004
van Kuijk, J.C.C. and Lammerink, T.S.J. and de Bree, H.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Multi-parameter detection in fluid flows. Sensors and actuators A: Physical, 47 (1-3 pt 4). pp. 369-372. ISSN 0924-4247 *** ISI Impact 1,933 ***
Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 13-18. IEEE Computer Society. ISBN 0-7803-2503-6
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators. In: : Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 37-42. IEEE Computer Society. ISBN 0-7803-2503-6
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of microelectromechanical systems, 4 (3). pp. 151-157. ISSN 1057-7157 *** ISI Impact 2,157 ***

1994

van den Berg, A. and Bergveld, P. and Reinhoudt, D.N. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2-4 October 1994, Nagoya, Jpn. pp. 181-184. IEEE Computer Society. ISBN 0-7803-2095-6
Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Towards integrated microliquid handling systems. Journal of micromechanics and microengineering, 4 (4). pp. 227-245. ISSN 0960-1317 *** ISI Impact 2,276 ***
Fluitman, J.H.J. (1994) Micro systems technology. In: Proceedings of the IEEE 1994 Custom Integrated Circuits Conference, 1-4 May 1994, San Diego, CA, USA. pp. 471-478. IEEE Computer Society. ISBN 0-7803-1886-2
Fluitman, J.H.J. and van den Berg, A. and Lammerink, T.S.J. (1994) Micromechanical components for μTAS. (Invited) In: Proceedings of the μTAS ’94 conference, 21-22 November 1994, Enschede. pp. 73-83. Kluwer Academic Publishers. ISBN 0-7923-3217-2
Prak, A. and Fluitman, J.H.J. (1994) Applications of a model for silicon resonant sensors. Sensors and actuators A: Physical, 41 (1-3 pt 3). pp. 251-255. ISSN 0924-4247 *** ISI Impact 1,933 ***
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 69-74. IEEE Computer Society. ISBN 0-7803-1833-1
Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 41 (1). pp. 4-6. ISSN 0885-3010 *** ISI Impact 1,460 ***

1993

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Intergrated micro-liquid dosing system. In: Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS, 7-10 Feb 1993, Fort Lauderdale, FL, USA. pp. 254-259. IEEE Computer Society. ISBN 0-7803-0958-8
Lammerink, T.S.J. and Tas, N.R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Micro-liquid flow sensor. Sensors and actuators A: Physical, 37-38. pp. 45-50. ISSN 0924-4247 *** ISI Impact 1,933 ***
Miyake, R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Micro mixer with fast diffusion. In: Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS, 7-10 Feb 1993, Fort Lauderdale, FL, USA. pp. 248-253. IEEE Computer Society. ISBN 0-7803-0958-8
de Ridder, R.M. and Sander, A.F.M. and Driessen, A. and Fluitman, J.H.J. (1993) An integrated optic adiabatic TE/TM mode splitter on silicon. Journal of lightwave technology, 11 (11). pp. 1806-1811. ISSN 0733-8724 *** ISI Impact 2,255 ***
Spiering, V.L. and Bouwstra, S. and Fluitman, J.H.J. (1993) Realization of mechanical decoupling zones for package-stress reduction. Sensors and actuators A: Physical, 37-38. pp. 800-804. ISSN 0924-4247 *** ISI Impact 1,933 ***

1992

Groenland, J.P.J. and Eijkel, C.J.M. and Fluitman, J.H.J. and de Ridder, R.M. (1992) Permalloy Thin-film Magnetic Sensors. Sensors and actuators A: Physical, 30. pp. 89-100. ISSN 0924-4247 *** ISI Impact 1,933 ***
van Mullem, C.J. and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor. Sensors and actuators A: Physical, 31 (1-3 pt 3). pp. 168-173. ISSN 0924-4247 *** ISI Impact 1,933 ***
Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Selective mode excitation and detection of micromachined resonators. Journal of microelectromechanical systems, 1 (4). pp. 179-186. ISSN 1057-7157 *** ISI Impact 2,157 ***
Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Selective mode excitation and detection of micromachined resonators. In: Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, 4-7 Feb 1992, Travemuende, Germany. pp. 220-225. IEEE Computer Society. ISBN 0-7803-0497-7
Tilmans, H.A.C. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Micro resonant force gauges. Sensors and actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247 *** ISI Impact 1,933 ***

1991

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247 *** ISI Impact 1,933 ***
Legtenberg, R. and Bouwstra, S. and Fluitman, J.H.J. (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247 *** ISI Impact 1,933 ***
van Mullem, C.J. and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M.C. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247 *** ISI Impact 1,933 ***
Tilmans, H.A.C. and IJntema, D.J. and Fluitman, J.H.J. (1991) Single element excitation and detection of (micro-)mechanical resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA. pp. 533-537. IEEE Computer Society. ISBN 0-87942-585-7

1990

Blom, F.R. and Yntema, D.J. and van de Pol, F.C.M. and Elwenspoek, M.C. and Fluitman, J.H.J. and Popma, T.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247 *** ISI Impact 1,933 ***
Eijkel, C.J.M. and Fluitman, J.H.J. (1990) Optimization of the response of magnetoresistive elements. IEEE transactions on magnetics, 26 (1). pp. 311-321. ISSN 0018-9464 *** ISI Impact 1,052 ***
Lammerink, T.S.J. and Elwenspoek, M.C. and Van Ouwerkerk, R.H. and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247 *** ISI Impact 1,933 ***
van de Pol, F.C.M. and Van Lintel, H.T.G. and Elwenspoek, M.C. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247 *** ISI Impact 1,933 ***
de Ridder, R.M. and Fluitman, J.H.J. (1990) Hysteresis model for an orthogonal thin-film magnetometer. IEEE transactions on magnetics, 26 (4). pp. 1237-1245. ISSN 0018-9464 *** ISI Impact 1,052 ***
Tilmans, H.A.C. and Bouwstra, S. and Fluitman, J.H.J. and Spence, S.L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247 *** ISI Impact 1,933 ***

1983

Wielinga, T. and Fluitman, J.H.J. and Lodder, J.C. (1983) Perpendicular stand-still recording in Co-Cr films. IEEE Transactions on Magnetics, MAG-19. pp. 94-104. ISSN 0018-9464 *** ISI Impact 1,052 ***

1981

Druyvesteyn, W.F. and Raemaekers, E.L.M. and Verhaar, R.D.J. and de Wilde, J. and Fluitman, J.H.J. and Groenland, J.P.J. (1981) Magnetic behaviour of narrow track thin-film heads. Journal of applied physics, 52. pp. 2462-2464. ISSN 0021-8979 *** ISI Impact 2,064 ***
Fluitman, J.H.J. (1981) Applicability of the planar Hall effect. Journal of applied physics, 52. pp. 2468-2470. ISSN 0021-8979 *** ISI Impact 2,064 ***
Fluitman, J.H.J. and Groenland, J.P.J. (1981) Comparison of a shielded "one-sided" planar Hall-transducer with a MR-head. IEEE Transactions on Magnetics, MAG-17. pp. 2893-2895. ISSN 0018-9464 *** ISI Impact 1,052 ***
Groenland, J.P.J. and Fluitman, J.H.J. (1981) Measurement system for two-dimensional magnetic field distributions, applied to the investigation of recording head fields. Journal of physics E: scientific instruments, 14. pp. 503-508.

1980

Fluitman, J.H.J. (1980) Energy considerations concerning current loops and magnetic objects. American journal of physics, 48. pp. 558-562. ISSN 0002-9505 *** ISI Impact 0,791 ***
Fluitman, J.H.J. (1980) Hall-effect device with both voltage leads on one side of the conductor. Journal of physics E: Scientific instruments, 13. pp. 783-785.

1979

Fluitman, J.H.J. and Groenland, J.P.J. (1979) Investigation of the structure of recording head fields. IEEE Transactions on Magnetics, MAG-15. pp. 1634-1636. ISSN 0018-9464 *** ISI Impact 1,052 ***

1978

Fluitman, J.H.J. (1978) Recording head field measurement with a magnetoresistive transducer. IEEE Transactions on Magnetics, MAG-14. pp. 433-435. ISSN 0018-9464 *** ISI Impact 1,052 ***
Jansen, H.V. and Fluitman, J.H.J. and Wesseling, P. (1978) Some problems concerning the accuracy and efficiency of self- consistent iterative calculations in magnetic recording. IEEE Transactions on Magnetics, MAG-14. pp. 1141-1148. ISSN 0018-9464 *** ISI Impact 1,052 ***

1977

Fluitman, J.H.J. and Uilhoorn, F.W. (1977) A mathematical model for simulating the hysteretic behaviour of magnetic materials. Journal of applied science and engineering, 2. pp. 107-122.

1973

Fluitman, J.H.J. (1973) The influence of sample geometry on the magnetoresistance of Ni- Fe films. Thin solid films, 16. pp. 269-276. ISSN 0040-6090 *** ISI Impact 1,909 ***

1972

Fluitman, J.H.J. and Krabbe, H.W. (1972) Miniature sensor for two-dimensional magnetic field distributions. Journal of physics E: scientific instruments, 5. pp. 963-964.