EEMCS EPrints Service
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2006
Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J.
(2006)
Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane.
In: Microfabricated systems and MEMS VII: Proceedings of the 206th ECS Meeting, 2004, Honolulu, Hawaii.
pp. 173-183.
Electrochemical Society.
ISBN 1-56677-422-5
Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J.
(2006)
Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane.
Journal of the Electrochemical Society, 153 (9).
H181-H188.
ISSN 0013-4651
*** ISI Impact 2,420 ***
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