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Author: Elwenspoek, M.C.

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2011

Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Tas, N.R. (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan. pp. 940-943. IEEE-NEMS 2011. ISBN 978-1-61284-775-7

Elwenspoek, M.C. (2011) Long-time data storage: relevant time scales. Challenges, 2 (1). pp. 19-36. ISSN 2078-1547

Hoang, Thi Hanh and Segers-Nolten , I.M. and Tas, N.R. and van Honschoten, J.W. and Subramaniam, V. and Elwenspoek, M.C. (2011) Analysis of single quantum-dot mobility inside 1D nanochannel devices. Nanotechnology, 22 (27). 275201. ISSN 0957-4484 *** ISI Impact 3,644 ***

Hoang, Thi Hanh and Tong, H.D. and Segers-Nolten, I.M. and Tas, N.R. and Subramaniam, V. and Elwenspoek, M.C. (2011) Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules. Journal of colloid and interface science, 367 (1). pp. 455-459. ISSN 0021-9797 *** ISI Impact 3,066 ***

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2011) Optical device comprising a cantilever and method of fabrication and use thereof. Patent US7916306 (Assigned).

Nazeer, H. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Pulsed laser deposited Pb(Zr,Ti)O₃ thin films with excellent piezoelectric and mechanical properties In: Proceedings of the the 20th IEEE International Symposium on Applications of Ferroelectrics, International Symposium on Piezoresponse Force Microscopy & Nanoscale Phenomena in Polar Materials , 24-27 Jul 2011, Vancouver, Canada. Organisation Committee ISAF-PFM 2011. ISBN not assigned

Nazeer, H. and Nguyen, Minh Duc and Woldering, L.A. and Abelmann, L. and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2011) Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films. Journal of micromechanics and microengineering, 21 (7). pp. 074008-074014. ISSN 0960-1317 *** ISI Impact 2,276 ***

Nazeer, H. and Nguyen, Minh Duc and Woldering, L.A. and Rijnders, A.J.H.M. and Elwenspoek, M.C. and Abelmann, L. (2011) Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O₃ thin films In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 238-241. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2011) Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films. Microelectronic engineering, 88 (8). pp. 2345-2348. ISSN 0167-9317 *** ISI Impact 1,569 ***

Pjetri, O. and Koelmans, W.W. and Abelmann, L. and Siekman, M.H. and Elwenspoek, M.C. (2011) Using diffraction to detect deflection of the cantilevers in an array. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 278-281. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9

Svetovoy, V. and Moktadir, Z. and Elwenspoek, M.C. and Mizuta, H. (2011) Tailoring the thermal Casimir force with graphene. EPL: A Letters Journal Exploring the Frontiers of Physics, 96 (1). 14006. ISSN 0295-5075 *** ISI Impact 2,753 ***

Svetovoy, V. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M.C. (2011) Combustion of hydrogen-oxygen mixture in electrochemically generated nanobubbles. Physical review E Statistical, nonlinear, and soft matter physics, 84 (3). 035302. ISSN 1539-3755 *** ISI Impact 2,352 ***

Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 Jun 2011, Beijing, China. pp. 434-437. IEEE Electron Devices Society. ISBN 978-1-4577-0157-3

Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Predicted photonic band gaps in diamond-lattice crystals built from silicon truncated tetrahedrons. Journal of applied physics, 110 (4). pp. 043107-043114. ISSN 0021-8979 *** ISI Impact 2,064 ***

2010

Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X

Albrechts, B. and Hautzinger, D.S. and Kruger, M. and Elwenspoek, M.C. and Muller, K.M. and Korvink, J.G. (2010) Adsorption studies of DNA origami on silicon dioxide. In: 21st Micromechanics and Micro Systems Europe workshop (MME 2010), 26-29 Sept 2010, Enschede. pp. 1-4. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716

Elwenspoek, M.C. and Abelmann, L. and Berenschot, J.W. and van Honschoten, J.W. and Jansen, H.V. and Tas, N.R. (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of micromechanics and microengineering, 20 (6). 064001. ISSN 0960-1317 *** ISI Impact 2,276 ***

Engelen, J.B.C. and Abelmann, L. and Elwenspoek, M.C. (2010) Optimized comb drive finger shape for shock-resistant actuation. In: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 , 24-28 Jan 2010 , Wanchai, Hong Kong . pp. 1147-1150. IEEE. ISBN 978-1-4244-5763-2

Engelen, J.B.C. and Abelmann, L. and Elwenspoek, M.C. (2010) Optimized comb-drive finger shape for shock-resistant actuation. Journal of micromechanics and microengineering, 20 (10). 105003. ISSN 0960-1317 *** ISI Impact 2,276 ***

Engelen, J.B.C. and de Boer, H. and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and de Graaf, D. and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 193-196. University of Twente - TST. ISBN 978-90-81673716

van Honschoten, J.W. and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M.C. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters, 97 (1). 014103/1-014103/3. ISSN 0003-6951 *** ISI Impact 3,820 ***

van Honschoten, J.W. and Tas, N.R. and Elwenspoek, M.C. (2010) The profile of a capillary liquid bridge between solid surfaces. American journal of physics, 78 (3). pp. 277-287. ISSN 0002-9505 *** ISI Impact 0,791 ***

Jansen, H.V. and de Boer, M.J. and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF₆ plasma Journal of micromechanics and microengineering, 20 (7). 075027. ISSN 0960-1317 *** ISI Impact 2,276 ***

Koelmans, W.W. and van Honschoten, J.W. and de Vries, Jeroen and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2010) Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21 (39). pp. 395503-395506. ISSN 0957-4484 *** ISI Impact 3,644 ***

Koelmans, W.W. and Peters, T. and Abelmann, L. and Elwenspoek, M.C. (2010) Fabrication of cantilever arrays with tips for parallel optical readout. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 277-280. University of Twente, Transducers Science and Technology. ISBN 978-90-81673716

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of micromechanics and microengineering, 20 (11). 115011. ISSN 0960-1317 *** ISI Impact 2,276 ***

Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro systems Europe workshop (MME2010), 26-29 Sept 2010, Enschede. pp. 1-4. Universiteit Twente - TST. ISBN 978-90-81673716

Mogulkoc, B. and Knowles, K.M. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820 *** ISI Impact 2,167 ***

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) Determination of young's modulus of PZT-influence of cantilever orientation. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 257-260. University of Twente - TST. ISBN 978-90-81673716

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, Minh Duc and Rijnders, A.J.H.M. and Elwenspoek, M.C. (2010) Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT. In: Proceedings of the 36th International Micro & Nano Engineering Conference (MNE 2010), 19-22 Sept 2010, Genoa, Italy. MNE 2010 Organisation. ISBN not assigned

Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance. Journal of micromechanics and microengineering, 20 (6). 064005. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tas, N.R. and Escalante, M. and van Honschoten, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463 *** ISI Impact 4,268 ***

de Vries, Jeroen and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2010) Tungsten-siliconnitride medium for mega- to gigayear data storage. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 261-264. University of Twente, Transducers Science and Technology. ISBN 978-90-81673716

Yagubizade, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. and Tas, N.R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA. pp. 128-131. IEEE Nanotechnology Council. ISBN 978-1-4244-8896-4

Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Listening to MEMS: An acoustic vibrometer. In: Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on, 24-28 Jan 2010, Hong Kong. pp. 1-4. MEMS 2010. ISSN 1084-6999 ISBN 978-1-4244-5763-2

2009

Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2009) Self assembled three-dimensional nonvolatile memories. Technical Report TR-CTIT-09-29, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625

Alberts, C.J. and de Man, S. and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement science and technology, 20 (3). 034005. ISSN 0957-0233 *** ISI Impact 1,350 ***

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***

van den Broek, D.M. and Elwenspoek, M.C. (2009) Effect of cavity pressure on the performance of the explosive micro-bubble actuator. Microelectronic engineering, 86 (4-6). pp. 1271-1273. ISSN 0167-9317 *** ISI Impact 1,569 ***

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2009) Ambient temperature-gradient compensated low-drift thermopile flow sensor. In: 22nd IEEE International Conference on MEMS, 25-29 January 2009, Sorrento, Italy. pp. 479-482. Institute of Electrical and Electronics Engineers, Inc.. ISSN 1084-6999 ISBN 978-1-4244-2977-6

Engelen, J.B.C. and Lantz, M.A. and Rothuizen, H.E. and Abelmann, L. and Elwenspoek, M.C. (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 June 2009, Denver, Colorado, USA. pp. 1762-1765. IEEE. ISBN 978-1-4244-4190-7

Hoang, Thi Hanh and Segers-Nolten, I.M. and Berenschot, J.W. and de Boer, M.J. and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of micromechanics and microengineering, 19 (065017). pp. 1-10. ISSN 0960-1317 *** ISI Impact 2,276 ***

van Honschoten, J.W. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M.C. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Formation of liquid menisci in flexible nanochannels. Journal of colloid and interface science, 329 (1). pp. 133-139. ISSN 0021-9797 *** ISI Impact 3,066 ***

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Corrigendum to “Formation of liquid menisci in flexible anochannels". Journal of colloid and interface science, 332 (2). pp. 520-520. ISSN 0021-9797 *** ISI Impact 3,066 ***

Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam . Vietnam National University. ISBN not assigned

Jansen, H.V. and de Boer, M.J. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of micromechanics and microengineering, 19 (3). 033001. ISSN 0960-1317 *** ISI Impact 2,276 ***

Koelmans, W.W. and van Honschoten, J.W. and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2009) Parallel optical readout of a cantilever array in dynamic mode. In: Proceedings of the International Workshop on Nanomechanical cantilever sensors 2009, 20-22 May 2009, Jeju, South Korea. Smart Materials and Sensors Laboratory. ISBN not assigned

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of micromechanics and microengineering, 19 (4). pp. 1-9. ISSN 0960-1317 *** ISI Impact 2,276 ***

Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and ter Brake, H.J.M. and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of micromechanics and microengineering, 19 (085027). pp. 1-10. ISSN 0960-1317 *** ISI Impact 2,276 ***

Nazeer, H. and Abelmann, L. and Tas, N.R. and van Honschoten, J.W. and Siekman, M.H. and Elwenspoek, M.C. (2009) Determination of young's modulus of PZT and CO₈₀Ni₂₀ thin films by means of micromachined cantilevers In: Proceedings of the 20th Micromechanics Europe Workshop, 21-23 Sept 2009, Toulouse, France. pp. 278-281. LAAS-CNRS. ISBN not assigned

Syed Nawazuddin, M.B. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2009) Parallel plate structures for optical modulation and casimir force measurement. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a chip, 9 (13). pp. 1966-1969. ISSN 1473-0197 *** ISI Impact 6,260 ***

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, 25-29 January 2009, Sorrento, Italy. pp. 1-4. Technical Digest. ISSN 1084-6999

Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and van Wolferen, H.A.G.M. and de Boer, M.J. and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (30). pp. 1-6. ISSN 0957-4484 *** ISI Impact 3,644 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317 *** ISI Impact 1,569 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***

2008

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China. pp. 729-732. IEEE Computer Society. ISBN 978-1-4244-1907-4

van den Broek, D.M. and Elwenspoek, M.C. (2008) Explosive micro-bubble actuator. Sensors and actuators A: Physical, 145-146 (1-2). pp. 387-393. ISSN 0924-4247 *** ISI Impact 1,933 ***

van den Broek, D.M. and Elwenspoek, M.C. (2008) Bubble nucleation in an explosive micro-bubble actuator. Journal of micromechanics and microengineering, 18 (6). 064003. ISSN 0960-1317 *** ISI Impact 2,276 ***

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247 *** ISI Impact 1,933 ***

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy. pp. 66-69. IEEE. ISSN 1930-0395 ISBN 978-1-4244-2580-8

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS, 9-11 Apr 2008, Nice. 4. EDA Publisher. ISBN 978-2-35500-006-5

Fazal, I. and Elwenspoek, M.C. (2008) Piezoelectric microvalve for precise control of gas flow at high pressure. In: 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007, 4-7 Sept 2007, Las Vegas, NV, United States. pp. 841-844. American Society of Mechanical Engineers. ISBN 0791848027

Fazal, I. and Elwenspoek, M.C. (2008) Fusion-bonded fluidic interconnects. Journal of micromechanics and microengineering, 18 (5). 055011. ISSN 0960-1317 *** ISI Impact 2,276 ***

Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). 14309. ISSN 0021-8979 *** ISI Impact 2,064 ***

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) Erratum:"Elastocapillary filling of deformable nanochannels" [J. Appl. Phys. 101, 094310 (2007)]. Journal of applied physics, 103 (2). pp. 1-1. ISSN 0021-8979 *** ISI Impact 2,064 ***

van Honschoten, J.W. and Koelmans, W.W. and Konings, S.M. and Abelmann, L. and Elwenspoek, M.C. (2008) Nanotesla torque magnetometry using a microcantilever. In: Eurosensors XXII, 7 - 10 Sept 2008, Dresden, Germany. pp. 597-600. Eurosensors Committee. ISBN 978-3-00-025217-4

van Honschoten, J.W. and Tas, N.R. and Svetovoy, V. and Escalante, M. and Elwenspoek, M.C. (2008) Formation of liquid menisci in flexible nanochannels. In: Proceedings of MicroTas 2008, Oct 2008, San Diego. pp. 1504-1506. University of San Diego. ISBN 978-0-9798064-1-4

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor. In: MME 2008, 28-30 Sept 2008, Aachen. RWTH Aachen University. ISBN 978-3-00-025529-8

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Analysis of the angular sensitivity of an innovative particle velocity sensor. In: Proceedings of IEEE Sensors 2008, Oct 2008, Lecce, Italy. 4. Lecce University. ISBN 9781424425815

Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia. 700403. Proceedings SPIE 7004. SPIE. ISSN 0277-786X

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2008) Optical device comprising a cantilever and method of fabrication and use thereof. Patent US20080094352 (Application).

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 17-20. VDI/VDE IT. ISBN 978-3-00-025529-8

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany. pp. 45-48. VDI/VDE IT. ISBN 978-3-00-025529-8

Mogulkoc, B. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany. VDI/VDE. ISBN 978-3-00-025529-8

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317 *** ISI Impact 2,276 ***

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C. (2008) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).

Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Zhao, Yiping and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of scientific instruments, 79 (4). 045103. ISSN 0034-6748 *** ISI Impact 1,598 ***

Yntema, D.R. and van Honschoten, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. Journal of micromechanics and microengineering, 18 (11). pp. 1-9. ISSN 0960-1317 *** ISI Impact 2,276 ***

Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of micromechanics and microengineering, 18 (18). 064013. ISSN 0960-1317 *** ISI Impact 2,276 ***

Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece. 221. Ergo publications. ISBN not assigned

2007

van den Broek, D.M. and Elwenspoek, M.C. (2007) Explosive micro-bubble actuator. In: Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, 10-14 Juni, Lyon - Frankrijk. pp. 2441-2444. IEEE Computer Society. ISBN 1-4244-0842-3

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) A versatile surface channel concept for microfluidic applications. Journal of micromechanics and microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317 *** ISI Impact 2,276 ***

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 123-126. IEEE Computer Society. ISBN 1-4244-0951-9

Fazal, I. and Elwenspoek, M.C. (2007) Design and analysis of a high pressure piezoelectric actuated microvalve. Journal of micromechanics and microengineering, 17 (11). pp. 2366-2379. ISSN 0960-1317 *** ISI Impact 2,276 ***

Fazal, I. and Elwenspoek, M.C. (2007) Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 219-222. University of Minho. ISBN 978-972-98603-3-1

Hoang, Thi Hanh and Segers-Nolten, I.M. and Tas, N.R. and de Boer, M.J. and Subramaniam, V. and Elwenspoek, M.C. (2007) Fabrication of 1d nanochannels with thin glass wafers for single molecule studies. In: Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, 20-24 May 2007, Santa Clara, California, USA. pp. 260-263. NSTI. ISBN 1-4200-6184-4

van Honschoten, J.W. and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of applied physics, 101. 094310. ISSN 0021-8979 *** ISI Impact 2,064 ***

van Honschoten, J.W. and Yntema, D.R. and Svetovoy, V. and Dijkstra, M.A. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Analysis of the performance of a particle velocity sensor between two cylindrical obstructions. Journal of the Acoustical Society of America, 121 (5). pp. 2711-2722. ISSN 0001-4966

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of micromechanics and microengineering, 17. S137-S146. ISSN 0960-1317 *** ISI Impact 2,276 ***

Iannuzzi, D. and Deladi, S. and Slaman, M. and Rector, J.H. and Schreuders, H. and Elwenspoek, M.C. (2007) A fiber-top cantilever for hydrogen detection. Sensors and actuators B: Chemical, 121 (2). pp. 706-708. ISSN 0925-4005 *** ISI Impact 3,368 ***

Iannuzzi, D. and Heeck, K. and Slaman, M. and de Man, S. and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement science and technology, 18 (10). pp. 3247-3252. ISSN 0957-0233 *** ISI Impact 1,350 ***

Luttge, R. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Vrouwe, E.X. and van den Berg, A. and Elwenspoek, M.C. (2007) Integrated lithographic molding for microneedle-based devices. Journal of microelectromechanical systems, 16 (4). pp. 872-884. ISSN 1057-7157 *** ISI Impact 2,157 ***

Moktadir, Z. and van Honschoten, J.W. and Elwenspoek, M.C. (2007) Long range diffusion noise in platinum microwires with metallic adhesion layers. Applied physics letters, 90 (23). 233506. ISSN 0003-6951 *** ISI Impact 3,820 ***

Nguyen, Quoc Duy and Elwenspoek, M.C. (2007) Influence of applied potentials on anisotropic etching of silicon described using kinematic wave etch model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651 *** ISI Impact 2,420 ***

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of vacuum science and technology B, 25 (4). pp. 1207-1216. ISSN 1071-1023 *** ISI Impact 1,268 ***

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal. pp. 127-130. University of Minho. ISBN 978-972-98603-3-1

Vanapalli, S. and ter Brake, H.J.M. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of micromechanics and microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317 *** ISI Impact 2,276 ***

Yntema, D.R. and Wiegerink, R.J. and van Honschoten, J.W. and Elwenspoek, M.C. (2007) Fully integrated three dimensional sound intensity sensor. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 51-54. IEEE Computer Society. ISBN 978-1-4244-0950-1

Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: 18th MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 253-256. Micro Mechanics Europe. ISBN 9789729860331

2006

Deladi, S. and Iannuzzi, D. and Gadgil, V.J. and Schreuders, H. and Elwenspoek, M.C. (2006) Carving fiber-top optomechanical transducers from an optical fiber. Journal of micromechanics and microengineering, 16. pp. 886-889. ISSN 0960-1317 *** ISI Impact 2,276 ***

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Versatile surface channel concept for microfluidic applications. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton - England. pp. 37-40. Southampton University Press. ISBN 08543-2848-3

Dijkstra, M.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Nano-flow thermal sensor applying dymamic w-2w sensing method. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton - England. pp. 1-4. Southampton University Press. ISBN 085432 848 3

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of micromechanics and microengineering, 16. pp. 1207-1214. ISSN 0960-1317 *** ISI Impact 2,276 ***

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34. pp. 1032-1037. ISSN 1742-6588

Fernández, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of micromechanics and microengineering, 16. pp. 862-868. ISSN 0960-1317 *** ISI Impact 2,276 ***

Fernández, L.J. and Wiegerink, R.J. and Flokstra, Jaap and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of micromechanics and microengineering, 16. S1099-S1107. ISSN 0960-1317 *** ISI Impact 2,276 ***

Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven. 192. Technische Universiteit Eindhoven. ISBN not assigned

van Honschoten, J.W. and Yntema, D.R. and Dijkstra, M.A. and Svetovoy, V. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Analysis of packaging effects on the performance of the microflown. In: Proceedings of DTIP of MEMS & MOEMS 2206, 26-28 April 2006, Stresa Italy. pp. 1-6. TIMA Editions/DTIP. ISBN 2-916187-03-0

van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Directional sensitivity of a three dimensional particle velocity sensor. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton. pp. 201-204. Southampton University Press. ISBN 085432-848-3

Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and De Man, S. and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of scientific instruments, 77. 106105-1-106105-3. ISSN 0034-6748 *** ISI Impact 1,598 ***

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2006) Fiber-top cantilevers: a new sensor on the tip of a fiber. Optics and Photonics News, 17 (12). pp. 39-39. ISSN 1047-6938

Iannuzzi, D. and Deladi, S. and Gadgil, V.J. and Sanders, R.G.P. and Schreuders, H. and Elwenspoek, M.C. (2006) Monolithic fiber-top sensor for critical environments and standard applications. Applied physics letters, 88 (053501). pp. 1-3. ISSN 0003-6951 *** ISI Impact 3,820 ***

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 2. experimental assessment. Journal of micromechanics and microengineering, 16 (6). S125-S134. ISSN 0960-1317 *** ISI Impact 2,276 ***

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 1. Analysis and simulations. Journal of micromechanics and microengineering, 16. S116-S124. ISSN 0960-1317 *** ISI Impact 2,276 ***

Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and ter Brake, H.J.M. and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings 823. American Institute of Physics, Maryland, pp. 1-8. ISSN 0094-243X ISBN 9780735403178

Nguyen, Quoc Duy and Elwenspoek, M.C. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of physics: conference series, 34 (1). pp. 1038-1043. ISSN 1742-6588

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on MEMS 2006, 22-26 Jan. 2006, Istanbul - Turkey. pp. 814-817. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and actuators A: Physical, 130-131. pp. 340-345. ISSN 0924-4247 *** ISI Impact 1,933 ***

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise test of the diffusion-controlled wet isotropic etching of silicon via circular mask openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651 *** ISI Impact 2,420 ***

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany. University of Saarbrücken. ISBN not assigned

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. (Invited) In: Meeting abstracts 210th ECS Meeting, 29 Oct - 3 Nov 2006, Cancun, Mexico. pp. 1-1. Electrochemical Society. ISSN 1091-8213

Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of micromechanics and microengineering, 16. pp. 1-6. ISSN 0960-1317 *** ISI Impact 2,276 ***

Yntema, D.R. and Druyvesteyn, W.F. and Elwenspoek, M.C. (2006) A four particle velocity sensor device. Journal of the Acoustical Society of America, 119. pp. 943-951. ISSN 0001-4966

Yntema, D.R. and van Honschoten, J.W. and de Bree, H.E. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) A three dimensional microflown. In: Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, 22-26 Jan. 2006, Instanbul - Turkey. pp. 654-657. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5

2005

Blom, M.T. and Chmela, E. and van der Heyden, F.H.J. and Oosterbroek, R.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2005) A differential viscosity detector for use in miniaturized chemical separation systems. Journal of microelectromechanical systems, 14 (1). pp. 70-80. ISSN 1057-7157 *** ISI Impact 2,157 ***

Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of scientific instruments, 76. pp. 016102-016104. ISSN 0034-6748 *** ISI Impact 1,598 ***

Deladi, S. and Berenschot, J.W. and Tas, N.R. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification. Journal of micromechanics and microengineering, 15. pp. 528-534. ISSN 0960-1317 *** ISI Impact 2,276 ***

Deladi, S. and Sarajlic, E. and Kuijpers, A.A. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Applications of the microelectromechanical systems in nanoscience. In: Proceedings of the II Eccomas Conference on Smart Structures and Materials, 18-21 July 2005, Lissabon, Portugal. pp. 1-15. Instituto de Engenharia Mecânica. ISBN 972-8688-42-3

Deladi, S. and Tas, N.R. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005, 30-01 / 03-02-2005, Miami. pp. 564-567. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Deladi, S. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Multifunctional tool for expanding afm-based applications. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 5-9 June 2005, Seoul. pp. 159-162. Digest of Technical Papers. TRANSDUCERS '05 1. IEEE Computer Society. ISBN 0-7803-8994-8

Fazal, I. and Berenschot, J.W. and de Boer, J.H. and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 5-9 June 2005, Seoul. pp. 936-939. Solid-State Sensors, Actuators and Microsystems 1. IEEE Computer Society. ISBN 0-7803-8994-8

Fernández, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of rf devices. Electronics letters, 41 (3). pp. 1-2. ISSN 0013-5194 *** ISI Impact 1,001 ***

Fernández, L.J. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Radio frequency power sensor based on mems technology with ultra low loss. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 191-194. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

van Honschoten, J.W. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Optimization of a thermal flow sensor for acoustic particle velocity measurements. Journal of micromechanics and microengineering, 14 (3). pp. 436-443. ISSN 0960-1317 *** ISI Impact 2,276 ***

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2005) Analysis Of Micromachined Capacitive Incremental Position Sensor. In: 16th MicroMechanics European Workshop, 4-6 Sep 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2

Nguyen, Quoc Duy and Elwenspoek, M.C. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 45-48. Chalmers University of Technology. ISBN 978-0-4445-1037-2

Sarajlic, E. and Berenschot, J.W. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 391-394. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of 3d nanowire frames by conventional micromachining technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 27-30. IEEE Computer Society. ISBN 0-7803-8994-8

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, 5-9 June 2005, Seoul. pp. 53-56. IEEE Computer Society. ISBN 0-7803-8994-8

Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bulk micromachining technology for fabrication of two-level mems in standard silicon substrate. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1404-1405. IEEE Computer Society. ISBN 0-7803-8994-8

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications. In: Proceedings of the 13th International Conferences on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1362-1365. IEEE Computer Society. ISBN 0-7803-8994-8

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland. DTIP of MEMS & MOEMS. ISBN 2-84813-057-1

Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MME MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 320-323. Chalmers University. ISBN 91-631-7553-3

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics 107. Springer, pp. 75-78. ISSN 0930-8989 ISBN 978-3-540-31914-6

Tiggelaar, R.M. and Berenschot, J.W. and de Boer, J.H. and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. Lab on a chip, 5. pp. 326-336. ISSN 1473-0197 *** ISI Impact 6,260 ***

Tiggelaar, R.M. and Berenschot, J.W. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and actuators A: Physical, 119 (1). pp. 196-205. ISSN 0924-4247 *** ISI Impact 1,933 ***

Tong, D.H. and van den Berg, A. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane. Thin solid films, 479 (1-2). pp. 89-94. ISSN 0040-6090 *** ISI Impact 1,909 ***

Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and de Boer, M.J. and de Boer, J.H. and van Rijn, C.J.M. and Elwenspoek, M.C. (2005) Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation. Journal of microelectromechanical systems, 14 (1). pp. 113-123. ISSN 1057-7157 *** ISI Impact 2,157 ***

Vanapalli, S. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and ter Brake, H.J.M. and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 354-357. Chalmers University of Technology. ISBN 978-0-4445-1037-2

Vargas, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 1-4. Elsevier. ISBN 978-0-4445-1037-2

2004

Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), 25-29 Jan 2004, Maastricht. pp. 181-184. IEEE Computer Society. ISBN 9780780382657

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators. Journal of micromechanics and microengineering, 14. S31-S36. ISSN 0960-1317 *** ISI Impact 2,276 ***

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Parallel-beams/lever electrothermal out-of-plane actuator. Microsystem technologies, 10 (5). pp. 393-399. ISSN 0946-7076 *** ISI Impact 1,069 ***

Deladi, S. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash release - an alternative for releasing complex mems devices. Journal of micromechanics and microengineering, 14 (12). pp. 1659-1664. ISSN 0960-1317 *** ISI Impact 2,276 ***

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and de Boer, M.J. and de Boer, J.H. and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope-based nanopatterning. Applied physics letters, 85 (22). pp. 5361-5363. ISSN 0003-6951 *** ISI Impact 3,820 ***

Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Jansen, H.V. and Flokstra, Jaap and Elwenspoek, M.C. (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements 2004, 27 Jun - 2 Jul 2004, London. pp. 117-118. IEEE Electromagnetic Compatibility Society. ISBN 0-7803-8494-6

Hoang, Thi Hanh and Tong, D.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 58 (3-4). pp. 525-528. ISSN 0167-577X *** ISI Impact 2,117 ***

van Honschoten, J.W. and Krijnen, G.J.M. and Svetovoy, V. and de Bree, H.E. and Elwenspoek, M.C. (2004) Analytic model of a two-wire thermal sensor for flow and sound measurements. Journal of micromechanics and microengineering, 14 (11). pp. 1468-1477. ISSN 0960-1317 *** ISI Impact 2,276 ***

van Honschoten, J.W. and Svetovoy, V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Determination of the sensitivity behavior of an acoustic, thermal flow sensor by electronic characterization. Sensors and actuators A: Physical, 112 (1). pp. 1-9. ISSN 0924-4247 *** ISI Impact 1,933 ***

Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2004) Capacitive long-range position sensor for microactuators. In: Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS), 25-29 January, Maastricht. pp. 544-547. Micro Electro Mechanical Systems. IEEE Computer Society. ISBN 0-7803-8265-x

Lerou, P.P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and ter Brake, H.J.M. and Elwenspoek, M.C. and Rogalla, H. (2004) Progress in Micro Joule-Thomson Cooling at Twente University. In: Proceedings of the 13th International Cryocooler Conference, 29 March - 1 April 2004, New Orleans. pp. 489-496. Springer Science + Business. ISSN 1570-2235 ISBN 0-387-23901-4

Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of micromechanics and microengineering, 14. S70-S75. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2004) Capillary filling speed of water in nanochannels. Applied physics letters, 85 (15). pp. 3274-3276. ISSN 0003-6951 *** ISI Impact 3,820 ***

Tiggelaar, R.M. and Loeters, P.W.H. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and Elwenspoek, M.C. and van den Berg, A. (2004) Thermal and mechanical analysis of a microreactor for high temperature catalytic gas phase reactions. Sensors and actuators A: Physical, 112 (2-3). pp. 267-277. ISSN 0924-4247 *** ISI Impact 1,933 ***

Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and van Rijn, C.J.M. and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and engineering chemistry research, 43 (15). pp. 4182-4187. ISSN 0888-5885 *** ISI Impact 2,071 ***

Tong, D.H. and Jansen, H.V. and Gadgil, V.J. and Bostan, C.G. and Berenschot, J.W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984 *** ISI Impact 12,186 ***

2003

van Baar, J.J.J. and Verwey, W.A. and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Micromachined two dimensional resistor arrays for determination of gas parameters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1606-1609. IEEE Computer Society. ISBN 0-7803-7731-1

Bruijn, M.P. and Bergmann Tiest, W.M. and Hoevers, H.F.C. and Krouwer, E. and van der Kuur, J. and Ridder, M.L. and Moktadir, Z. and Wiegerink, R.J. and van Gelder, D. and Elwenspoek, M.C. (2003) Development of arrays of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 513 (1-2 spec iss). pp. 143-146. ISSN 0168-9002 *** ISI Impact 1,142 ***

Damean, N. and Regtien, P.P.L. and Elwenspoek, M.C. (2003) Heat transfer in a mems for microfluidics. Sensors and actuators A: Physical, 105 (2). pp. 137-149. ISSN 0924-4247 *** ISI Impact 1,933 ***

Deladi, S. and de Boer, M.J. and Krijnen, G.J.M. and Rosén, D. and Elwenspoek, M.C. (2003) Innovative process development for a new micro-tribosensor using surface micromachining. Journal of micromechanics and microengineering, 13. S17-S22. ISSN 0960-1317 *** ISI Impact 2,276 ***

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Parallel-beams/lever electrothermal out-of-plane actuator. In: Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on, 5-7 May, Mandelieu-la Napoule, France. pp. 103-107. IEEE Computer Society. ISBN 0-7803-7066-X

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) FEM assisted design and simulation of novel electrothermal actuators. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23-27 Feb 2003, San Francisco, United States. pp. 400-403. Computational Publications. ISBN 0972842209

Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic engineering, 67-68. pp. 422-429. ISSN 0167-9317 *** ISI Impact 1,569 ***

Fernández, L.J. and Visser, E. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jan and Jansen, H.V. and Elwenspoek, M.C. (2003) Radio frequency power sensor based on MEMS technology. In: Sensors, 2003. Proceedings of IEEE, 22-24 Oct., Toronto, Canada. pp. 549-552. IEEE Computer Society. ISBN 0-7803-8133-5

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2003) Wet anisotropic etching for fluidic 1d nanochannels. Journal of micromechanics and microengineering, 13 (4). S62-S66. ISSN 0960-1317 *** ISI Impact 2,276 ***

van der Heyden, F.H.J. and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005 *** ISI Impact 3,368 ***

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) 2d-finite-element simulations for long-range capacitive position sensor. Journal of micromechanics and microengineering, 13 (4). S183-S189. ISSN 0960-1317 *** ISI Impact 2,276 ***

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic engineering, 67-68 (1). pp. 430-437. ISSN 0167-9317 *** ISI Impact 1,569 ***

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23 - 27 Feb 2003, San Francisco, United States. pp. 392-395. Computational Publications. ISBN 0-9728422-0-9

Sarajlic, E. and de Boer, M.J. and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 123-126. Eburon. ISBN 9080826618

Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2003) Static friction in elastic adhesion contacts in MEMS. Journal of Adhesion Science and Technology, 17 (4). 547-561. ISSN 0169-4243 *** ISI Impact 0,980 ***

Tas, N.R. and Sonnenberg, A.H. and Molenaar, R. and Elwenspoek, M.C. (2003) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. Journal of micromechanics and microengineering, 13 (1). N6-N15. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Prak, A. and Mateman, R. and Wissink, J.M. and van den Berg, A. (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005 *** ISI Impact 3,368 ***

Tong, D.H. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Wensink, H. and Jansen, H.V. and Nijdam, A.J. and Elwenspoek, M.C. and Gielens, F.C. and van Rijn, C.J.M. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of microelectromechanical systems, 12 (5). pp. 622-629. ISSN 1057-7157 *** ISI Impact 2,157 ***

Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, USA. pp. 1742-1745. IEEE Electron Devices Society. ISBN 0-7803-7731-1

Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. In: SESENS 2002, 29 Nov 2002, Veldhoven, the Netherlands. pp. 688-691. Technology Foundation STW. ISBN not assigned

Tong, D.H. and Hoang, Thi Hanh and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, 2-4 Nov 2003, Delft. pp. 1-4. Micro Mechanics Europe. ISBN 9080826618

2002

van Baar, J.J.J. and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Pressure sensor based on distributed temperature sensing. In: Proceedings of IEEE Sensors, 12 -14 June 2002, Orlando, USA. pp. 964-968. IEEE Computer Society. ISBN 0-7803-7454-1

van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Combined-Pirani/bending membrane-pressure sensor. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 JAN 2002, Las Vegas, NV. pp. 328-331. IEEE Computer Society. ISBN 0-7803-7185-2

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Advanced sacrificial poly-Si technology for fluidic systems. Journal of micromechanics and microengineering, 12 (5). pp. 621-624. ISSN 0960-1317 *** ISI Impact 2,276 ***

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2002) Design and fabrication of a hydrodynamic chromatography chip. Sensors and Actuators B: Chemical, 82 (1). pp. 111-116. ISSN 0925-4005 *** ISI Impact 3,368 ***

de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Smulders, E.J.T. and Gilde, M.-J. and Roelofs, G.H.M. and Sasserath, J.N. and Elwenspoek, M.C. (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of microelectromechanical systems, 11 (4). pp. 385-401. ISSN 1057-7157 *** ISI Impact 2,157 ***

Deladi, S. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2002) Three dimensional adhesion model for arbitrary rough surfaces. In: International Conference on Computational Nanoscience and Nanotechnology - ICCN 2002, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 326-329. Computational Publications. ISBN 0-9708275-6-3

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.

van Honschoten, J.W. and Svetovoy, V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation. In: Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002, 12 -14 June 2002, Orlando, USA. pp. 1298-1303. IEEE Computer Society. ISBN 0-7803-7454-1

Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France. pp. 201-206. The International Society for Optical Engineering. ISSN 0277-786X ISBN 0-8194-4529-0

Kuiper, S. and Brink, R. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Ceramic microsieves: influence of perforation shape and distribution on flow resistance and membrane strength. Journal of membrane science, 196 (2). pp. 149-157. ISSN 0376-7388 *** ISI Impact 3,673 ***

Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Raspe, O. and van Wolferen, H.A.G.M. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Filtration of lager beer with microsieves: Flux, permeate haze and in-line microscope observations. Journal of Membrane Science, 196 (2). pp. 159-170. ISSN 0376-7388 *** ISI Impact 3,673 ***

Moktadir, Z. and Bruijn, M.P. and Wiegerink, R.J. and Elwenspoek, M.C. and Ridder, M.L. and Mels, W.A. (2002) Limitations of Heat Conductivity in Cryogenic Sensors Due to Surface Roughness. In: Proceedings of IEEE Sensors, 12 - 14 June 2002, Orlando, Florida. pp. 1024-1027. IEEE Computer Society. ISBN 0-7803-7454-1

Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2227. ISSN 0003-2700 *** ISI Impact 5,874 ***

Tas, N.R. and Berenschot, J.W. and Mela, P. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2002) 2D-Confined Nanochannels Fabricated by Conventional Micromachining. Nano letters, 2 (9). pp. 1031-1032. ISSN 1530-6984 *** ISI Impact 12,186 ***

Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and van den Berg, A. (2002) Scaling behaviour of pressure-driven micro-hydraulic systems. In: Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 174-177. Computational Publications. ISBN 0970827571

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140 *** ISI Impact 3,722 ***

Tong, D.H. and Gielens, F.C. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 Jan 2002, Las Vegas, NV. pp. 268-271. IEEE Computer Society. ISBN 0-7803-7185-2

Veenstra, T.T. and Sharma, N.R. and Forster, F.K. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2002) The design of an in-plane compliance structure for microfluidical systems. Sensors and actuators B (Chemical), 81 (2-3). pp. 377-383. ISSN 0925-4005 *** ISI Impact 3,368 ***

Wensink, H. and Elwenspoek, M.C. (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators A: Physical, 102 (1-2). pp. 157-164. ISSN 0924-4247 *** ISI Impact 1,933 ***

Wensink, H. and Elwenspoek, M.C. (2002) A closer look at the ductile-brittle transition in solid particle erosion. Wear, 253 (9-10). pp. 1035-1043. ISSN 0043-1648 *** ISI Impact 1,635 ***

Wensink, H. and Schlautmann, S. and Goedbloed, M.H. and Elwenspoek, M.C. (2002) Fine tuning the roughness of powder blasted surfaces. Journal of micromechanics and microengineering, 12 (5). pp. 616-620. ISSN 0960-1317 *** ISI Impact 2,276 ***

2001

van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Pirani pressure sensor with distributed temperature sensing. In: ASME International Mechanical Engineering Congress and Exposition, Proceedings, 11-16 November 2001, New York, NY, USA. pp. 2689-2696. American Society of Mechanical Engineers. ISBN 0791835553

van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Micromachined structures for thermal measurements of fluid and flow parameters. Journal of micromechanics and microengineering, 11 (4). pp. 311-318. ISSN 0960-1317 *** ISI Impact 2,276 ***

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of micromechanics and microengineering, 11 (4). pp. 382-385. ISSN 0960-1317 *** ISI Impact 2,276 ***

Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Failure mechanisms of pressurized microchannels, model, and experiments. Journal of microelectromechanical systems, 10 (1). pp. 158-164. ISSN 1057-7157 *** ISI Impact 2,157 ***

Burger, G.J. and Holland, H.J. and Berenschot, J.W. and Seppenwodde, J.H. and ter Brake, H.J.M. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2001) 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan 2001, interlaken. pp. 418-421. IEEE Computer Society. ISBN 0-7803-5998-4

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and van den Berg, A. and Elwenspoek, M.C. (2001) Selective Wafer Bonding by Surface Roughness Control. Journal of the Electrochemical Society, 148 (4). g225-g228. ISSN 0013-4651 *** ISI Impact 2,420 ***

van Honschoten, J.W. and Krijnen, G.J.M. and Svetovoy, V. and de Bree, H.E. and Elwenspoek, M.C. (2001) Optimisation of a two-wire thermal sensor for flow and sound measurements. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan 2001, Interlaken. pp. 523-526. IEEE Computer Society. ISBN 0-7803-5998-4

Jansen, H.V. and de Boer, M.J. and Wensink, H. and Kloeck, B. and Elwenspoek, M.C. (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF₆/O₂-based chemistry with cryogenical wafer cooling and a high density ICP source Microelectronics journal, 32 (9). pp. 769-777. ISSN 0026-2692 *** ISI Impact 0,787 ***

Kuiper, S. and van Wolferen, H.A.G.M. and van Rijn, C.J.M. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Fabrication of microsieves with sub-micron pore size by laser interference lithography. Journal of micromechanics and microengineering, 11 (1). pp. 33-37. ISSN 0960-1317 *** ISI Impact 2,276 ***

Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Van Veenendaal, E. and Van Suchtelen, J. and Elwenspoek, M.C. (2001) Influence of the angle between etched (near) Si ${111}$ surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of micromechanics and microengineering, 11 (5). pp. 499-503. ISSN 0960-1317 *** ISI Impact 2,276 ***

Nijdam, A.J. and Van Veenendaal, E. and Cuppen, H.M. and Van Suchtelen, J. and Reed, M.L. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Vlieg, E. and Elwenspoek, M.C. (2001) Formation and stabilization of pyramidal etch hillocks on silicon ${100}$ in anisotropic etchants: Experiments and Monte Carlo simulation. Journal of applied physics, 89 (7). pp. 4113-4123. ISSN 0021-8979 *** ISI Impact 2,064 ***

Rusu, C.R. and Oever, R.V. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and de Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and Brugger, J. and van den Berg, A. (2001) Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers. Journal of microelectromechanical systems, 10 (2). pp. 238-246. ISSN 1057-7157 *** ISI Impact 2,157 ***

Schlautmann, S. and Wensink, H. and Schasfoort, R.B.M. and Elwenspoek, M.C. and van den Berg, A. (2001) Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors. Journal of micromechanics and microengineering, 11 (4). pp. 386-389. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tong, D.H. and Zwijze, A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and materials, 13 (4). pp. 235-246. ISSN 0914-4935 *** ISI Impact 0,349 ***

Van Veenendaal, E. and Cuppen, H.M. and Van Enckevort, W.J.P. and Van Suchtelen, J. and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2001) A Monte Carlo study of etching in the presence of a mask junction. Journal of micromechanics and microengineering, 11 (4). pp. 409-415. ISSN 0960-1317 *** ISI Impact 2,276 ***

van Veenendaal, E. and van Suchtelen, J. and van Beurden, P. and Cuppen, H.M. and van Enckevort, W.J.P. and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2001) Monte Carlo simulation of wet chemical etching of silicon. Sensors and materials, 13 (6). pp. 343-350. ISSN 0914-4935 *** ISI Impact 0,349 ***

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Use of Selective Anodic Bonding to Create Micropump Chambers with Virtually No Dead Volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651 *** ISI Impact 2,420 ***

2000

Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and van den Berg, A. (2000) Failure mechanisms of pressurized microchannels, model and experiments. In: Micro Electro Mechanical Systems, 2000. MEMS 2000. The Thirteenth Annual International Conference on, 23-27 Jan 2000, Miyazaki, Japan. pp. 199-204. IEEE Computer Society. ISBN 0-7803-5273-4

de Boer, M.J. and Tjerkstra, R.W. and Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2000) Micromachining of buried micro channels in silicon. Journal of microelectromechanical systems, 9 (1). pp. 94-103. ISSN 1057-7157 *** ISI Impact 2,157 ***

Brugger, J. and Berenschot, J.W. and Kuiper, S. and Nijdam, W. and Otter, B. and Elwenspoek, M.C. (2000) Resistless patterning of sub-micron structures by evaporation through nanostencils. Microelectronic Engineering, 53 (1). pp. 403-405. ISSN 0167-9317 *** ISI Impact 1,569 ***

van Honschoten, J.W. and van Baar, J.J.J. and de Bree, H.E. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Application of a microflown as a low-cost level sensor. Journal of Micromechanics and Microengineering, 10 (2). pp. 250-253. ISSN 0960-1317 *** ISI Impact 2,276 ***

Kuiper, S. and de Boer, M.J. and van Rijn, C.J.M. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Wet and dry etching techniques for the release of sub-micrometre perforated membranes. Journal of micromechanics and microengineering, 10 (2). pp. 171-174. ISSN 0960-1317 *** ISI Impact 2,276 ***

Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Determination of particle-release conditions in microfiltration: A simple single-particle model tested on a model membrane. Journal of membrane science, 180 (1). pp. 15-28. ISSN 0376-7388 *** ISI Impact 3,673 ***

Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) New class of thermal flow sensors using $\Delta$ T = 0 as a control signal. In: 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), 23 - 27 Jan 2000, Miyazaki, Japan. pp. 525-530. IEEE Computer Society. ISBN 0-7803-5273-4

Neagu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The electrolysis of water: An actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4-5). pp. 571-581. ISSN 0957-4158 *** ISI Impact 0,944 ***

Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M.C. (2000) Etching pits and dislocations in Si ${111}$ . Sensors and actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247 *** ISI Impact 1,933 ***

Nijdam, A.J. and van Veenendaal, E. and Gardeniers, J.G.E. and Kentgens, A.P.M. and Nachtegaal, G.H. and Elwenspoek, M.C. (2000) 29Si-nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147 (6). pp. 2195-2198. ISSN 0013-4651 *** ISI Impact 2,420 ***

Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and van den Berg, A. and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of microelectromechanical systems, 9 (3). pp. 390-398. ISSN 1057-7157 *** ISI Impact 2,157 ***

Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and van den Berg, A. and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 Jan - 27 Jan 2000, Miyazaki, Jpn. pp. 429-434. IEEE Computer Society. ISBN 0-7803-5273-4

Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Greve, J. and Brugger, J. and van den Berg, A. (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3912, 26-27 Jan 2000, San Jose, CA, USA. pp. 41-49. Society of Photo-Optical Instrumentation Engineers. ISBN 0-8194-3528-7

Tas, N.R. and Gui, C. and Elwenspoek, M.C. (2000) Static friction in elastic adhesive MEMS contacts, models and experiment. In: Proceedings of the IEEE Micro Electro Mechanical Systems, 23 - 27 Jan 2000, Miyazaki, Japan. pp. 193-198. IEEE Computer Society. ISBN 0-7803-5273-4

Tas, N.R. and Lammerink, T.S.J. and Leussink, P.J. and Berenschot, J.W. and de Bree, H.E. and Elwenspoek, M.C. (2000) Towards thermal flowsensing with pL/s resolution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sept 2000, Santa Clara, CA, USA. pp. 106-121. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X

Van Veenendaal, E. and Nijdam, A.J. and Van Suchtelen, J. and Sato, K. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Elwenspoek, M.C. (2000) Simulation of anisotropic wet chemical etching using a physical model. Sensors and actuators A: Physical, 84 (3). pp. 324-329. ISSN 0924-4247 *** ISI Impact 1,933 ***

van Veenendaal, E. and van Beurden, P. and van Enckevort, W.J.P. and Vlieg, E. and van Suchtelen, J. and Elwenspoek, M.C. (2000) Monte Carlo study of kinetic smoothing during dissolution and etching of the Kossel (100) and silicon (111) surfaces. Journal of Applied Physics, 88 (8). pp. 4595-4604. ISSN 0021-8979 *** ISI Impact 2,064 ***

van Veenendaal, E. and van Suchtelen, J. and van Enckevort, W.J.P. and Sato, K. and Nijdam, A.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide. Journal of applied physics, 87 (12). pp. 8732-8740. ISSN 0021-8979 *** ISI Impact 2,064 ***

Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2000) High resolution powder blast micromachining. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 -27 Jan 2000, Miyazaki, Japa;n. pp. 769-774. IEEE Computer Society. ISBN 0-7803-5273-4

Wensink, H. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2000) Mask materials for powder blasting. Journal of micromechanics and microengineering, 10 (2). pp. 175-180. ISSN 0960-1317 *** ISI Impact 2,276 ***

Wiegerink, R.J. and Zwijze, A.F. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2000) Quasi-monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, 80 (2). pp. 189-196. ISSN 0924-4247 *** ISI Impact 1,933 ***

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sep 2000, Santa Clara, CA, USA. pp. 47-58. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2000) Low-cost piezoresistive silicon load cell independent of force distribution. Journal of micromechanics and microengineering, 10 (2). pp. 200-203. ISSN 0960-1317 *** ISI Impact 2,276 ***

1999

de Bree, H.E. and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 124-129. IEEE Computer Society. ISBN 0-7803-5194-0

de Bree, H.E. and Jansen, H.V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of micromechanics and microengineering, 9 (2). pp. 186-189. ISSN 0960-1317 *** ISI Impact 2,276 ***

Burger, J.F. and Van der Wekken, M.C. and Berenschot, J.W. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) High pressure check valve for application in a miniature cryogenic sorption cooler. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 183-188. IEEE Computer Society. ISBN 0-7803-5194-0

De Nivelle, M.J.M.E. and Bruijn, M.P. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1999) High-Tc bolometers with silicon-nitride spiderweb suspension for far-infrared detection. IEEE transactions on applied superconductivity, 9 (2, June). pp. 3350-3353. ISSN 1051-8223 *** ISI Impact 1,013 ***

Elwenspoek, M.C. (1999) Thermal flow micro sensors. In: Proceedings of the 1999 International Semiconductor Conference (CAS '99), 05-09 Oct 1999, Sinaia, Romania. pp. 423-435. IEEE Computer Society. ISBN 0-7803-5139-8

Elwenspoek, M.C. (1999) Stationary hillocks on etching silicon. Journal of micromechanics and microengineering, 9 (2). pp. 180-185. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of applied physics, 85 (10). pp. 7448-7454. ISSN 0021-8979 *** ISI Impact 2,064 ***

Gui, C. and Elwenspoek, M.C. and Tas, N.R. and Gardeniers, J.G.E. (1999) The Surface adhesion parameter: A measure for wafer bondability. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 290-295. IEEE Computer Society. ISBN 0-7803-5194-0

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem technologies, 5 (3). pp. 138-143. ISSN 0946-7076 *** ISI Impact 1,069 ***

Krijnen, G.J.M. and Lammerink, T.S.J. and Lambeck, P.V. and Elwenspoek, M.C. (1999) Optical devices based on fluidic controlled two-mode interference. Journal of micromechanics and microengineering, 9 (2). pp. 203-205. ISSN 0960-1317 *** ISI Impact 2,276 ***

Nijdam, A.J. and Berenschot, J.W. and Van Suchtelen, J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Velocity sources as an explanation for experimentally observed variations in Si ${111}$ etch rates. Journal of micromechanics and microengineering, 9 (2). pp. 135-138. ISSN 0960-1317 *** ISI Impact 2,276 ***

Nijdam, A.J. and Van Suchtelen, J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: A critical look at the ${111}$ minimum. Journal of crystal growth, 198-199 (pt 1). pp. 430-434. ISSN 0022-0248 *** ISI Impact 1,737 ***

Oosterbroek, R.E. and Berenschot, J.W. and Nijdam, A.J. and Pandraud, G. and Elwenspoek, M.C. and van den Berg, A. (1999) New design methodologies in <111>-oriented silicon wafers. In: Proceedings of SPIE - The International Society for Optical Engineering the 1999 Micromachining and Microfabrication Process Technology V, 20-22 Sept 1999, Santa Clara, CA, USA. pp. 384-394. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of micromechanics and microengineering, 9 (2). pp. 194-198. ISSN 0960-1317 *** ISI Impact 2,276 ***

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and van den Berg, A. (1999) Micromachined pressure/flow-sensor. Sensors and actuators A: Physical, 77 (3). pp. 167-177. ISSN 0924-4247 *** ISI Impact 1,933 ***

van Rijn, C.J.M. and Nijdam, W. and Kuiper, S. and Veldhuis, G.J. and van Wolferen, H.A.G.M. and Elwenspoek, M.C. (1999) Microsieves made with laser interference lithography for micro-filtration applications. Journal of micromechanics and microengineering, 9 (2). pp. 170-172. ISSN 0960-1317 *** ISI Impact 2,276 ***

Van Suchtelen, J. and Sato, K. and Van Veenendaal, E. and Nijdam, A.J. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Elwenspoek, M.C. (1999) Simulation of anisotropic wet-chemical etching using a physical model. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17 - 21 Jan 1999, Orlando, FL, USA. pp. 332-337. IEEE Computer Society. ISBN 0-7803-5194-0

Veenstra, T.T. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (1999) Characterization method for a new diffusion mixer applicable in micro flow injection analysis systems. Journal of micromechanics and microengineering, 9 (2). pp. 199-202. ISSN 0960-1317 *** ISI Impact 2,276 ***

Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 Sept 1999, Gif-Sur-Yvette, France. pp. 199-202. Université Paris-sud, Institut d'Électronique Fondamentale.

Wiegerink, R.J. and Zwijze, A.F. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 558-563. IEEE Computer Society. ISBN 0-7803-5194-0

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Low creep and hysteresis load cell based on a force-to-fluid pressure transformation. Sensors and actuators A: Physical, 78 (2-3). pp. 74-80. ISSN 0924-4247 *** ISI Impact 1,933 ***

1998

Berenschot, J.W. and Oosterbroek, R.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Micromachining of {111} plates in <001> oriented silicon Journal of micromechanics and microengineering, 8 (2). pp. 104-107. ISSN 0960-1317 *** ISI Impact 2,276 ***

den Braber, E.T. and Jansen, H.V. and de Boer, M.J. and Croes, H.J.E. and Elwenspoek, M.C. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of biomedical materials research, 40 (3). pp. 425-433. ISSN 0021-9304

de Bree, H.E. and Jansen, H.V. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (1998) Bi-directional fast flow sensor with a large dynamic range. In: Proceedings of the Micromechanics Europe, MME 1998, 3-5 June 1998, Ulvik. pp. 194-197. Micro Mechanics Europe.

Bruijn, M.P. and De Nivelle, M.J.M.E. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1998) Low noise far-infrared detection at 90 K using high-T(c) superconducting bolometers with silicon-nitride beam suspension. In: The 32nd ESLAB Symposium on remote sensing methodology for Earth observation and planetary exploration, 15-18 Sept 1998, Noordwijk, Nederland. pp. 101-106. Estec. ISSN 0379-6566

Burger, J.F. and Berenschot, J.W. and Burger, G.J. and Visscher, H. and Elwenspoek, M.C. (1998) Piezoresistive friction force sensor for tribological research. Journal of micromechanics and microengineering, 8 (2). pp. 138-140. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gardeniers, J.G.E. and Verholen, A.G.B.J. and Tas, N.R. and Elwenspoek, M.C. (1998) Direct measurement of piezoelectric properties of Sol-Gel PZT films. Journal of the Korean Physical Society, 32 (4). S1573-S1577. ISSN 0374-4884 *** ISI Impact 0,476 ***

Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 1,933 ***

Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of chemical mechanical polishing in wafer bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651 *** ISI Impact 2,420 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of microelectromechanical systems, 7 (1). pp. 122-127. ISSN 1057-7157 *** ISI Impact 2,157 ***

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings, 25-29 Jan 1998, Heidelberg. pp. 482-487. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-4412-X

Kuiper, S. and van Rijn, C.J.M. and Nijdam, W. and Elwenspoek, M.C. (1998) Development and applications of very high flux microfiltration membranes. Journal of membrane science, 150 (1). pp. 1-8. ISSN 0376-7388 *** ISI Impact 3,673 ***

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance. Journal of microelectromechanical systems, 7 (1). pp. 87-93. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: Design and modeling. Journal of microelectromechanical systems, 7 (1). pp. 79-86. ISSN 1057-7157 *** ISI Impact 2,157 ***

Sánchez, S. and Elwenspoek, M.C. and Gui, C. and De Nivelle, M.J.M.E. and De Vries, R. and De Korte, P.A.J. and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1998) A high-TC superconductor bolometer on a silicon nitride membrane. Journal of microelectromechanical systems, 7 (1). pp. 62-68. ISSN 1057-7157 *** ISI Impact 2,157 ***

Tas, N.R. and Wissink, J. and Sander, L. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Modeling, design and testing of the electrostatic shuffle motor. Sensors and actuators A: Physical, 70 (1-2). pp. 171-178. ISSN 0924-4247 *** ISI Impact 1,933 ***

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592 *** ISI Impact 3,316 ***

Wensink, H. and de Boer, M.J. and Wiegerink, R.J. and Zwijze, A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Proceedings of the 1998 Conference on Micromachined Devices and Components IV, 21-22 Sept 1998, Santa Clara, CA, USA. pp. 424-430. SPIE. ISSN 0277-786X

1997

De Nivelle, M.J.M.E. and Bruijn, M.P. and De Vries, R. and Wijnbergen, J.J. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1997) Low noise high-Tc superconducting bolometers on silicon nitride membranes for far-infrared detection. Journal of applied physics, 82 (10). pp. 4719-4726. ISSN 0021-8979 *** ISI Impact 2,064 ***

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromachining. Microsystem technologies, 3 (3). pp. 122-128. ISSN 0946-7076 *** ISI Impact 1,069 ***

Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4

Jansen, H.V. and de Boer, M.J. and Wensink, H. and Kloeck, B. and Elwenspoek, M.C. (1997) The black silicon method. VIII. A study of the performance of etching silicon using SF₆O₂-based chemistry with cryogenical wafer cooling and a high density ICP source In: Micro- and Nano-Engineering 1997, 15 Sept 1997, Athens, Greece. pp. 1-4. Elsevier.

Jansen, H.V. and de Boer, M.J. and Wiegerink, R.J. and Tas, N.R. and Smulders, E.J.T. and Neagu, C.R. and Elwenspoek, M.C. (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317 *** ISI Impact 1,569 ***

Kasparian, J. and Elwenspoek, M.C. and Allongue, P. (1997) Digital computation and in situ STM approach of silicon anisotropic etching. Surface science, 388 (1-3). pp. 50-62. ISSN 0039-6028 *** ISI Impact 2,010 ***

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of microelectromechanical systems, 6 (3). pp. 234-241. ISSN 1057-7157 *** ISI Impact 2,157 ***

Legtenberg, R. and Gilbert, J. and Senturia, S.D. and Elwenspoek, M.C. (1997) Electrostatic curved electrode actuators. Journal of microelectromechanical systems, 6 (3). pp. 257-265. ISSN 1057-7157 *** ISI Impact 2,157 ***

Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1997) An electrochemical active valve. Electrochimica acta, 42 (20-22). pp. 3367-3373. ISSN 0013-4686 *** ISI Impact 3,642 ***

Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and actuators A: Physical, 62 (1-3 pt 3). pp. 599-611. ISSN 0924-4247 *** ISI Impact 1,933 ***

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and van den Berg, A. and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 151-154. IEEE Computer Society. ISBN 0-7803-3829-4

van Rijn, C.J.M. and Van der Wekken, M.C. and Nijdam, W. and Elwenspoek, M.C. (1997) Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining. Journal of microelectromechanical systems, 6 (1). pp. 48-54. ISSN 1057-7157 *** ISI Impact 2,157 ***

Sánchez, S. and Elwenspoek, M.C. and Gui, C. and De Nivelle, M.J.M.E. and de Vries, R. and De Korte, P.A.J. and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitride membrane. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 506-571. IEEE Computer Society. ISBN 0-7803-3744-1

Sánchez, S. and Gui, C. and Elwenspoek, M.C. (1997) Spontaneous direct bonding of thick silicon nitride. Journal of micromechanics and microengineering, 7 (3). pp. 111-113. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tas, N.R. and Sonnenberg, A.H. and Sander, A.F.M. and Elwenspoek, M.C. (1997) Surface micromachined linear electrostatic stepper motor. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 26-30 Jan 1997, Nagoya, Japan. pp. 215-220. IEEE Computer Society. ISBN 0-7803-3744-1

Tas, N.R. and Wissink, J. and Sander, L. and Lammerink, T.S.J. and Elwenspoek, M.C. (1997) Shuffle motor: a high force, high precision linear electrostatic stepper motor. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 777-780. IEEE Computer Society. ISBN 0-7803-3829-4

Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686 *** ISI Impact 3,642 ***

Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for microchannels. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 147-152. IEEE Computer Society. ISBN 0-7803-3744-1

Van Toor, M.W. and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Monsma, D.J. (1997) A novel micromechanical flow controller. Journal of micromechanics and microengineering, 7 (3). pp. 165-169. ISSN 0960-1317 *** ISI Impact 2,276 ***

1996

Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 277-284. IEEE Computer Society. ISBN 0-7803-2985-6

de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Jansen, H.V. and Lammerink, T.S.J. and Elwenspoek, M.C. (1996) The μ-flown: A novel device for measuring acoustic flows. Sensors and actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247 *** ISI Impact 1,933 ***

Bressers, P.M.M.C. and Kelly, J.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Surface morphology of p-type (100) silicon etched in aqueous alkaline solution. Journal of the Electrochemical Society, 143 (5). pp. 1744-1750. ISSN 0013-4651 *** ISI Impact 2,420 ***

De Nivelle, M.J.M.E. and Bruijn, M.P. and Frericks, M. and De Vries, R. and Wijnbergen, J.J. and De Korte, P.A.J. and Sánchez, S. and Elwenspoek, M.C. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1996) A high-Tc superconductor bolometer for remote sensing of atmospheric OH. Journal De Physique. IV : JP, 6 (3). C3-423-C3-428. ISSN 1155-4339

Elwenspoek, M.C. (1996) The form of etch rate minima in wet chemical anisotropic etching of silicon. Journal of micromechanics and microengineering, 6 (4). pp. 405-409. ISSN 0960-1317 *** ISI Impact 2,276 ***

Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1996) The black silicon method VI: high aspect ratio trench etching for MEMS applications. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems 1996, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 250-257. IEEE Computer Society. ISBN 0-7803-2985-6

Jansen, H.V. and Gardeniers, J.G.E. and de Boer, M.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of micromechanics and microengineering, 6 (1). pp. 14-28. ISSN 0960-1317 *** ISI Impact 2,276 ***

Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M.C. and Fluitman, J.H.J. and van den Berg, A. (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 389-394. IEEE Computer Society. ISBN 0-7803-2985-6

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 204-209. IEEE Computer Society. ISBN 0-7803-2985-6

Legtenberg, R. and Groeneveld, A.W. and Elwenspoek, M.C. (1996) Comb-drive actuators for large displacements. Journal of micromechanics and microengineering, 6 (3). pp. 320-329. ISSN 0960-1317 *** ISI Impact 2,276 ***

Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Kelly, J.J. (1996) An electrochemical microactuator: Principle and first results. Journal of microelectromechanical systems, 5 (1). pp. 2-9. ISSN 1057-7157 *** ISI Impact 2,157 ***

Popescu, D.S. and Dascalu, D.C. and Elwenspoek, M.C. and Lammerink, T.S.J. (1996) Ultrasonic transducer with thermomechanical excitation and piezoresistive detection. In: Proceedings of the 1996 International Semiconductor Conference, CAS'96. Part 1 (of 2), 9-12 Oct 1996, Sinaia, Romania. pp. 85-88. IEEE Computer Society. ISBN 0-7803-3223-7

van Rijn, C.J.M. and Nijdam, W. and Elwenspoek, M.C. (1996) Microsieve for leukocyte depletion of erythrocyte concentrates. In: Proceedings of the 1996 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society. Part 1 (of 5), 31 Oct - 3 Nov 1996, Amsterdam, Netherlands. pp. 256-257. IEEE Computer Society. ISSN 0589-1019 ISBN 0-7803-3811-1

Spiering, V.L. and Bergveld, P. and Elwenspoek, M.C. and van den Berg, A. (1996) A µsensor array in a fluidic system for space applications. In: Proceedings Dutch Sensor Conference, 20-21 March 1996, Delft, Netherlands. pp. 143-146. Delft University Press. ISBN 90-407-1321-9

Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. and van den Berg, A. (1996) Micro analysis systems for fluids [Sistemi di microanalisi per fluidi]. Oleodinamica pneumatica Lubrificazione, 1. pp. 76-83. ISSN 1122-5017

Tas, N.R. and Sonnenberg, A.H. and Jansen, H.V. and Legtenberg, R. and Elwenspoek, M.C. (1996) Stiction in surface micromachining. Journal of micromechanics and microengineering, 6 (4). pp. 385-397. ISSN 0960-1317 *** ISI Impact 2,276 ***

1995

de Boer, M.J. and Jansen, H.V. and Elwenspoek, M.C. (1995) The black silicon method V: a study of the fabricating of movable structures for micro electromechanical systems. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 565-568. IEEE Computer Society. ISBN 91-630-3473-5

de Bree, H.E. and Leussink, P.J. and Korthorst, M.T. and Jansen, H.V. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) The μ-flown: Novel device measuring acoustical flows. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 536-539. IEEE Computer Society. ISBN 91-630-3473-5

Elders, J. and Jansen, H.V. and Elwenspoek, M.C. and Ehrfeld, W. (1995) DEEMO: a new technology for the fabrication of microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 238-243. IEEE Computer Society. ISBN 0-7803-2503-6

Elwenspoek, M.C. (1995) Physical chemistry of wet chemical anisotropic etching of silicon. American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC, 2 (H1025B). pp. 901-907. ISSN 0022-0434 *** ISI Impact 0,410 ***

Elwenspoek, M.C. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 412-415. IEEE Computer Society. ISBN 91-630-3473-5

Gui, C. and Legtenberg, R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of micromechanics and microengineering, 5 (2). pp. 183-185. ISSN 0960-1317 *** ISI Impact 2,276 ***

Gui, C. and Legtenberg, R. and Tilmans, H.A.C. and Fluitman, J.H.J. and Elwenspoek, M.C. (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 157-162. IEEE Computer Society. ISBN 0-7803-2503-6

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) Electrochemical micro actuator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 106-110. IEEE Computer Society. ISBN 0-7803-2503-6

Jansen, H.V. and de Boer, M.J. and Burger, J.F. and Legtenberg, R. and Elwenspoek, M.C. (1995) Black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317 *** ISI Impact 1,569 ***

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elders, J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Process for producing micromechanical structures by means of reactieve ion etching. Patent WO1995NL00221 (Application).

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1995) The black silicon method: A universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of micromechanics and microengineering, 5 (2). pp. 115-120. ISSN 0960-1317 *** ISI Impact 2,276 ***

Jansen, H.V. and de Boer, M.J. and Otter, B. and Elwenspoek, M.C. (1995) The black silicon method IV: the fabrication of three-dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 88-93. IEEE Computer Society. ISBN 0-7803-2503-6

van Kuijk, J.C.C. and Lammerink, T.S.J. and de Bree, H.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Multi-parameter detection in fluid flows. Sensors and actuators A: Physical, 47 (1-3 pt 4). pp. 369-372. ISSN 0924-4247 *** ISI Impact 1,933 ***

Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 13-18. IEEE Computer Society. ISBN 0-7803-2503-6

Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 404-407. IEEE Computer Society. ISBN 91-630-3473-5

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators. In: : Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 37-42. IEEE Computer Society. ISBN 0-7803-2503-6

Legtenberg, R. and Jansen, H.V. and de Boer, M.J. and Elwenspoek, M.C. (1995) Anisotropic reactive ion etching of silicon using SF₆/O₂/CHF₃ gas mixtures Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651 *** ISI Impact 2,420 ***

Popescu, D.S. and Dascalu, D.C. and Elwenspoek, M.C. and Lammerink, T.S.J. (1995) Silicon active microvalves using buckled membranes for actuation. In: The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95., 25-29 June 1995, Stockholm, Sweden. pp. 305-308. IEEE Computer Society. ISBN 91-630-3473-5

van Rijn, C.J.M. and Elwenspoek, M.C. (1995) Micro filtration membrane sieve with silicon micro machining for industrial and biomedical applications. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 83-87. IEEE Computer Society. ISBN 0-7803-2503-6

van Rijn, C.J.M. and Nijdam, W. and Elwenspoek, M.C. (1995) High flow rate microsieve for bio medical applications. Proceedings of the ASME Dynamic Systems and Control Division, 57-2. pp. 995-1000. ISSN 0022-0434 *** ISI Impact 0,410 ***

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. (1995) Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back. Journal of micromechanics and microengineering, 5 (2). pp. 189-192. ISSN 0960-1317 *** ISI Impact 2,276 ***

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of microelectromechanical systems, 4 (3). pp. 151-157. ISSN 1057-7157 *** ISI Impact 2,157 ***

1994

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and actuators A: Physical, 41 ( 1-3 pt 3). pp. 338-343. ISSN 0924-4247 *** ISI Impact 1,933 ***

van den Berg, A. and Bergveld, P. and Reinhoudt, D.N. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2-4 October 1994, Nagoya, Jpn. pp. 181-184. IEEE Computer Society. ISBN 0-7803-2095-6

Elders, J. and Jansen, H.V. and Elwenspoek, M.C. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 170-175. IEEE Computer Society. ISBN 0-7803-1833-1

Elwenspoek, M.C. (1994) Some selected research item of the micro mechanics department at MESA. In: Proceedings of the 1994 5th International Symposium on Micro Machine and Human Science Proceedings, 2-4 October 1994, Nagoya, Jpn. pp. 8-31. IEEE Computer Society. ISBN 0-7803-2095-6

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Towards integrated microliquid handling systems. Journal of micromechanics and microengineering, 4 (4). pp. 227-245. ISSN 0960-1317 *** ISI Impact 2,276 ***

Elwenspoek, M.C. and Lindberg, U. and Kok, H. and Smith, L. (1994) Wet chemical etching mechanism of silicon. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 223-228. IEEE Computer Society. ISBN 0-7803-1833-1

Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived PZT films on substrates with platinum metallization. In: Proceedings of the 1994 MRS Spring Meeting, 4-8 April 1994, San Francisco, CA, USA. pp. 451-456. Materials Research Society. ISSN 0272-9172

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elwenspoek, M.C. (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe 1994, 5-6 Sept 1994, Pisa, Italy. pp. 1-5. MicroMechanics Europe.

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247 *** ISI Impact 1,933 ***

Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparths, 14 Nov 1994, Vienna, Austria. pp. 1-10. Unknown. ISBN Not assigned

Legtenberg, R. and Tilmans, H.A.C. and Elders, J. and Elwenspoek, M.C. (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247 *** ISI Impact 1,933 ***

Popescu, D.S. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) Buckled membranes for microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 188-192. IEEE Computer Society. ISBN 0-7803-1833-1

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 69-74. IEEE Computer Society. ISBN 0-7803-1833-1

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE transactions on ultrasonics, ferroelectrics and frequency control, 41 (1). pp. 4-6. ISSN 0885-3010 *** ISI Impact 1,460 ***

1993

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: Proceedings of the 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA. pp. 171-176. Materials Research Society. ISSN 0272-9172

Elwenspoek, M.C. (1993) On the mechanism of anisotropic etching of silicon. Journal of the Electrochemical Society, 140 (7). pp. 2075-2080. ISSN 0013-4651 *** ISI Impact 2,420 ***

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Intergrated micro-liquid dosing system. In: Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS, 7-10 Feb 1993, Fort Lauderdale, FL, USA. pp. 254-259. IEEE Computer Society. ISBN 0-7803-0958-8

Lammerink, T.S.J. and Tas, N.R. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Micro-liquid flow sensor. Sensors and actuators A: Physical, 37-38. pp. 45-50. ISSN 0924-4247 *** ISI Impact 1,933 ***

Lindberg, U. and Soderkvist, J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1993) Quasi-buckling of micromachined beams. Journal of micromechanics and microengineering, 3 (4). pp. 183-186. ISSN 0960-1317 *** ISI Impact 2,276 ***

Miyake, R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1993) Micro mixer with fast diffusion. In: Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS, 7-10 Feb 1993, Fort Lauderdale, FL, USA. pp. 248-253. IEEE Computer Society. ISBN 0-7803-0958-8

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. Journal of micromechanics and microengineering, 3 (4). pp. 243-246. ISSN 0960-1317 *** ISI Impact 2,276 ***

Tilmans, H.A.C. and Elwenspoek, M.C. (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. Journal of micromechanics and microengineering, 3 (4). pp. 193-197. ISSN 0960-1317 *** ISI Impact 2,276 ***

1992

Elwenspoek, M.C. and Smith, L. and Hok, B. (1992) Active joints for microrobot limbs. Journal of micromechanics and microengineering, 2 (3). pp. 221-223. ISSN 0960-1317 *** ISI Impact 2,276 ***

Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Selective mode excitation and detection of micromachined resonators. Journal of microelectromechanical systems, 1 (4). pp. 179-186. ISSN 1057-7157 *** ISI Impact 2,157 ***

Prak, A. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Selective mode excitation and detection of micromachined resonators. In: Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, 4-7 Feb 1992, Travemuende, Germany. pp. 220-225. IEEE Computer Society. ISBN 0-7803-0497-7

Tilmans, H.A.C. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Micro resonant force gauges. Sensors and actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247 *** ISI Impact 1,933 ***

1991

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247 *** ISI Impact 1,933 ***

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1991) Low-temperature glass bonding for sensor application using boron oxide thin films. Journal of micromechanics and microengineering, 1 (3). pp. 157-160. ISSN 0960-1317 *** ISI Impact 2,276 ***

van Mullem, C.J. and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M.C. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247 *** ISI Impact 1,933 ***

Prak, A. and Blom, F.R. and Elwenspoek, M.C. and Lammerink, T.S.J. (1991) Q-factor and frequency shift of resonating silicon diaphragms in air. Sensors and actuators A: Physical, 27 (1-3). pp. 691-698. ISSN 0924-4247 *** ISI Impact 1,933 ***

Spiering, V.L. and Bouwstra, S. and Spiering, R.M.E.J. and Elwenspoek, M.C. (1991) On-chip decoupling zone for package-stress reduction. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA. pp. 982-985. IEEE Computer Society. ISBN 0-87942-585-7

Tilmans, H.A.C. and Bouwstra, S. and IJntema, D.J. and Elwenspoek, M.C. and Klein, C.F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247 *** ISI Impact 1,933 ***

Vogels, L.J.P. and Bennema, P. and Hottenhuis, M.H.J. and Elwenspoek, M.C. (1991) On the morphology of ammonium nitrate (III): theory and observation. Journal of crystal growth, 108 (3-4). pp. 733-743. ISSN 0022-0248 *** ISI Impact 1,737 ***

1990

Blom, F.R. and Yntema, D.J. and van de Pol, F.C.M. and Elwenspoek, M.C. and Fluitman, J.H.J. and Popma, T.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247 *** ISI Impact 1,933 ***

Bouwstra, S. and Legtenberg, R. and Tilmans, H.A.C. and Elwenspoek, M.C. (1990) Resonating microbridge mass flow sensor. Sensors and actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247 *** ISI Impact 1,933 ***

Bouwstra, S. and de Weerd, E.L. and Elwenspoek, M.C. (1990) In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Sensors and actuators A: Physical, 24 (3). pp. 227-235. ISSN 0924-4247 *** ISI Impact 1,933 ***

Eijkel, C.J.M. and Branebjerg, J. and Elwenspoek, M.C. and van de Pol, F.C.M. (1990) A new technology for micromachining of silicon: Dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structures. IEEE electron device letters, 11 (12). pp. 588-589. ISSN 0741-3106 *** ISI Impact 2,714 ***

Lammerink, T.S.J. and Elwenspoek, M.C. and Van Ouwerkerk, R.H. and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247 *** ISI Impact 1,933 ***

van de Pol, F.C.M. and Van Lintel, H.T.G. and Elwenspoek, M.C. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247 *** ISI Impact 1,933 ***

Van der Heijden, A.E.D.M. and Elwenspoek, M.C. (1990) Contact nucleation. In situ and ex situ observations of surface damaging. Journal of crystal growth, 100 (3). pp. 1087-1091. ISSN 0022-0248 *** ISI Impact 1,737 ***

Vogels, L.J.P. and Marsman, H.A.M. and Verheijen, M.A. and Bennema, P. and Elwenspoek, M.C. (1990) On the growth of ammonium nitrate(III) crystals. Journal of crystal growth, 100 (3). pp. 439-446. ISSN 0022-0248 *** ISI Impact 1,737 ***