EEMCS

Craciun, V. and Amirhaghi, S. and Craciun, D. and Elders, J. and Gardeniers, J.G.E. and Boyd, I.W. (1995) Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition. Applied surface science, 86 (1). pp. 99-106. ISSN 0169-4332 *** ISI Impact 1,793 ***

Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Geretovsky, J. and Boyd, I.W. (1995) Growth of ZnO thin films on GaAs by pulsed laser deposition. Thin solid films, 259 (1). pp. 1-4. ISSN 0040-6090 *** ISI Impact 1,909 ***

Elders, J. and Jansen, H.V. and Elwenspoek, M.C. and Ehrfeld, W. (1995) DEEMO: a new technology for the fabrication of microstructures. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 238-243. IEEE Computer Society. ISBN 0-7803-2503-6

Jansen, H.V. and de Boer, M.J. and Legtenberg, R. and Elders, J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Process for producing micromechanical structures by means of reactieve ion etching. Patent WO1995NL00221 (Application).

Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Boyd, I.W. (1994) Characteristics of high quality ZnO thin films deposited by pulsed laser deposition. Applied physics letters, 65 (23). pp. 2963-2965. ISSN 0003-6951 *** ISI Impact 3,820 ***

Elders, J. and Jansen, H.V. and Elwenspoek, M.C. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 170-175. IEEE Computer Society. ISBN 0-7803-1833-1

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247 *** ISI Impact 1,933 ***

Legtenberg, R. and Tilmans, H.A.C. and Elders, J. and Elwenspoek, M.C. (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247 *** ISI Impact 1,933 ***

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: Proceedings of the 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA. pp. 171-176. Materials Research Society. ISSN 0272-9172