Nederlands
Contact
Sitemap
Search
OrganisationEEMCS EPrints Service
 |
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
1995
Elders, J. and Jansen, H.V. and Elwenspoek, M.C. and Ehrfeld, W.
(1995)
DEEMO: a new technology for the fabrication of microstructures.
In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 29 Jan - 2 Feb 1995, Amsterdam, Netherlands.
pp. 238-243.
IEEE Computer Society.
ISBN 0-7803-2503-6
|
|
|
||||||||||||
|
|
|
||||||||||||||
|
|
|
|
|
||||||||||||
|
|
|
||||||||||||||