EEMCS

Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1651-1654. IEEE Computer Society. ISBN 0-7803-7731-1