EEMCS EPrints Service
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1997
Ducso, C. and Vazsonyi, E. and Adam, M. and Szabo, I. and Barsony, I. and Gardeniers, J.G.E. and van den Berg, A.
(1997)
Porous silicon bulk micromachining for thermally isolated membrane formation.
Sensors and actuators A: Physical, 60 (1-3 pt 1).
pp. 235-239.
ISSN 0924-4247
*** ISI Impact 1,933 ***
Dumitrescu, M. and Cobianu, C. and Lungu, D. and Dascalu, D.C. and Pascu, A. and van den Berg, A. and Gardeniers, J.G.E. and Kolev, S. and Ducso, C. and Barsony, I.
(1997)
Identification of temperature profile and heat transfer on a dielectric membrane for gas sensors by COSMOS program simulation.
In: Proceedings of the 1997 International Semiconductor Conference, CAS. Part 1 (of 2),, 7-11 October 1997, Sinaia, Romania.
pp. 145-148.
IEEE Computer Society.
ISBN 0-7803-3804-9
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