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2007
Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R.
(2007)
Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110).
Journal of vacuum science and technology B, 25 (4).
pp. 1207-1216.
ISSN 1071-1023
*** ISI Impact 1,268 ***
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