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2001
Tilmans, H.A.C. and Ziad, H. and Jansen, H.V. and Di Monaco, O. and Jourdain, A. and de Raedt, W. and Rottenberg, X. and de Backer, E. and Decaussernaeker, A. and Baert, K.
(2001)
Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab.
In: International Electron Devices Meeting, 2-5 Dec 2001, Washington.
IEEE Electron Devices Society.
ISBN 0-7803-7050-3
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