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OrganisationEEMCS EPrints Service
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2010
Hasper, A. and Snijders, G.J. and Vandezande, L. and De Blank, M.J. and Bankras, R.G.
(2010)
Deposition of TiN films in a batch reactor. Patent US7732350 (Assigned).
2006
Hasper, A. and Snijders, G.J. and Vandezande, L. and De Blank, M.J. and Bankras, R.G.
(2006)
Deposition of TiN films in a batch reactor. Patent US20060634043 (Application).
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