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2003
Cubaynes, F.N. and Schmitz, J. and van der Marel, C. and Snijders, J.H.M. and Veloso, A. and Rothschild, A. and Olsen, C. and Date, L.
(2003)
Plasma nitridation optimization for sub-15 A gate dielectrics.
In: Symposium on silicon nitride and silicon dioxide thin insulating films, 28 April - 2 May 2003, Paris, France.
pp. 595-604.
The Electrochemical Society.
ISSN 0161-6374
ISBN 1566773474
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