EEMCS

Nijdam, A.J. and Van Veenendaal, E. and Cuppen, H.M. and Van Suchtelen, J. and Reed, M.L. and Gardeniers, J.G.E. and Van Enckevort, W.J.P. and Vlieg, E. and Elwenspoek, M.C. (2001) Formation and stabilization of pyramidal etch hillocks on silicon in anisotropic etchants: Experiments and Monte Carlo simulation. Journal of applied physics, 89 (7). pp. 4113-4123. ISSN 0021-8979 *** ISI Impact 2,064 ***

Van Veenendaal, E. and Cuppen, H.M. and Van Enckevort, W.J.P. and Van Suchtelen, J. and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2001) A Monte Carlo study of etching in the presence of a mask junction. Journal of micromechanics and microengineering, 11 (4). pp. 409-415. ISSN 0960-1317 *** ISI Impact 2,276 ***

van Veenendaal, E. and van Suchtelen, J. and van Beurden, P. and Cuppen, H.M. and van Enckevort, W.J.P. and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2001) Monte Carlo simulation of wet chemical etching of silicon. Sensors and materials, 13 (6). pp. 343-350. ISSN 0914-4935 *** ISI Impact 0,349 ***