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2001
Ackaert, J.G.G. and Wang, Zhichun and De Backer, E. and Colson, P. and Coppens, P.
(2001)
Non contact surface potential measurements for charging reduction during manufacturing of metal-insulator-metal capacitors.
Microelectronics Reliability, 41 (9-10).
pp. 1403-1407.
ISSN 0026-2714
*** ISI Impact 1,066 ***
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