EEMCS

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: Proceedings of the 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA. pp. 171-176. Materials Research Society. ISSN 0272-9172

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. Journal of micromechanics and microengineering, 3 (4). pp. 243-246. ISSN 0960-1317 *** ISI Impact 2,276 ***

Spiering, V.L. and Bouwstra, S. and Fluitman, J.H.J. (1993) Realization of mechanical decoupling zones for package-stress reduction. Sensors and actuators A: Physical, 37-38. pp. 800-804. ISSN 0924-4247 *** ISI Impact 1,933 ***

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1991) Low-temperature glass bonding for sensor application using boron oxide thin films. Journal of micromechanics and microengineering, 1 (3). pp. 157-160. ISSN 0960-1317 *** ISI Impact 2,276 ***

Legtenberg, R. and Bouwstra, S. and Fluitman, J.H.J. (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247 *** ISI Impact 1,933 ***

Spiering, V.L. and Bouwstra, S. and Spiering, R.M.E.J. and Elwenspoek, M.C. (1991) On-chip decoupling zone for package-stress reduction. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA. pp. 982-985. IEEE Computer Society. ISBN 0-87942-585-7

Tilmans, H.A.C. and Bouwstra, S. and IJntema, D.J. and Elwenspoek, M.C. and Klein, C.F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247 *** ISI Impact 1,933 ***

Bouwstra, S. and Legtenberg, R. and Tilmans, H.A.C. and Elwenspoek, M.C. (1990) Resonating microbridge mass flow sensor. Sensors and actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247 *** ISI Impact 1,933 ***

Bouwstra, S. and de Weerd, E.L. and Elwenspoek, M.C. (1990) In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Sensors and actuators A: Physical, 24 (3). pp. 227-235. ISSN 0924-4247 *** ISI Impact 1,933 ***

Lammerink, T.S.J. and Elwenspoek, M.C. and Van Ouwerkerk, R.H. and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247 *** ISI Impact 1,933 ***

Tilmans, H.A.C. and Bouwstra, S. and Fluitman, J.H.J. and Spence, S.L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247 *** ISI Impact 1,933 ***