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2010
Zhao, Yiping and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Bouwes, D. and Girones, M. and Huskens, J. and Tas, N.R.
(2010)
Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication.
Journal of micromechanics and microengineering, 20 (9).
pp. 1-13.
ISSN 0960-1317
*** ISI Impact 2,276 ***
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