EEMCS
Home > Publications
Home University of Twente
Education
Research
Prospective Students
Jobs
Publications
Intranet (internal)
 
 Nederlands
 Contact
 Sitemap
 Search
 Organisation

EEMCS EPrints Service


Author: Berenschot, J.W.
 Home Policy Brochure Browse Search User Area Contact Help

2012

Koelmans, W.W. and Peters, T. and Berenschot, J.W. and de Boer, M.J. and Siekman, M.H. and Abelmann, L. (2012) Cantilever arrays with self-aligned nanotips of uniform height. Nanotechnology, 23 (13). pp. 135301-135309. ISSN 0957-4484 *** ISI Impact 3,644 ***

2011

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Berenschot, J.W. and de Boer, M.J. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January, 2011, Cancun, Mexico. pp. 9-12. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Jansen, H.V. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics express, 19 (17). pp. 15864-15878. ISSN 1094-4087 *** ISI Impact 3,749 ***
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. Journal of micromechanics and microengineering, 21 (7). 0740041. ISSN 0960-1317 *** ISI Impact 2,276 ***
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2011) Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of micromechanics and microengineering, 21 (12). 125010. ISSN 0960-1317 *** ISI Impact 2,276 ***
Burouni, N. and Berenschot, J.W. and Elwenspoek, M.C. and Tas, N.R. (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan. pp. 940-943. IEEE-NEMS 2011. ISBN 978-1-61284-775-7
van Honschoten, J.W. and Legrain, A.B.H. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2011) Micro-assembly of three dimensional tetrahedra by capillary forces. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 Jan 2011, Cancun, Mexico. pp. 288-291. IEEE Robotics and Automation Society. ISBN 978-1-4244-9633-4
Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Micromechanically tuned ring resonator in silicon on insulator. Optics letters, 36 (7). pp. 1047-1049. ISSN 0146-9592 *** ISI Impact 3,316 ***
Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and de Ridder, R.M. (2011) Micromechanically tuned ring resonator in silicon on insulator. (Invited) In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia. Paper 4240-IT. Conference Handbook. Australian Optical Society. ISBN 978-0-9775657-7-1
Legrain, A.B.H. and Berenschot, J.W. and Sanders, R.G.P. and Ma, K. and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 250-253. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Sardan Sukas, O. and Berenschot, J.W. and de Boer, M.J. and Nguyen, Minh Duc and van Zalk, M. and Abelmann, L. (2011) Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes In: Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, 19-22 June 2011, Tonsberg, Norway. pp. 287-290. Department of micro and nano systems technology, Vestfold University College. ISBN 978-82-7860-224-9
Syed Nawazuddin, M.B. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 Jun 2011, Beijing, China. pp. 434-437. IEEE Electron Devices Society. ISBN 978-1-4577-0157-3

2010

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-D photonic crystal waveguides. In: 21st Micromechanics and Micro systems Europe Workshop (MME2010), 26-29 Sept 2010, Enschede, the Netherlands. pp. 120-123. University of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science. ISBN 978-90-81673716
Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and de Boer, M.J. and Berenschot, J.W. and de Ridder, R.M. and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5. pp. 424-427. ISSN 1877-7058
Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X
Duan, Xuexin and Zhao, Yiping and Berenschot, J.W. and Tas, N.R. and Reinhoudt, D.N. and Huskens, J. (2010) Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries. Advanced functional materials, 20 (15). pp. 2519-2526. ISSN 1616-301X *** ISI Impact 8,486 ***
Elwenspoek, M.C. and Abelmann, L. and Berenschot, J.W. and van Honschoten, J.W. and Jansen, H.V. and Tas, N.R. (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of micromechanics and microengineering, 20 (6). 064001. ISSN 0960-1317 *** ISI Impact 2,276 ***
van Honschoten, J.W. and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M.C. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied physics letters, 97 (1). 014103/1-014103/3. ISSN 0003-6951 *** ISI Impact 3,820 ***
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Krijnen, G.J.M. (2010) Fabrication of superficial neuromast inspired capacitive flow sensors. Journal of micromechanics and microengineering, 20 (8). 085041. ISSN 0960-1317 *** ISI Impact 2,276 ***
Sarajlic, E. and Geerlings, Joël and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L. (2010) Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. In: Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010), 26-29 sept 2010, Enschede, The Netherlands. pp. 24-27. University of Twente - TST. ISBN 978-90-81673716
Sarajlic, E. and Yamahata, C. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. (2010) High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1 (2). pp. 48-67. ISSN 2072-666X
Yagubizade, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. and Tas, N.R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA. pp. 128-131. IEEE Nanotechnology Council. ISBN 978-1-4244-8896-4
Zhao, Yiping and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Bouwes, D. and Girones, M. and Huskens, J. and Tas, N.R. (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of micromechanics and microengineering, 20 (9). pp. 1-13. ISSN 0960-1317 *** ISI Impact 2,276 ***

2009

Abdulla, S.M.C. and Berenschot, J.W. and de Boer, M.J. and Kauppinen, L.J. and de Ridder, R.M. and Krijnen, G.J.M. (2009) Optimisation study of micro cantilevers for switching of photonic band gap crystals. In: Proceedings of the International Conference on Photonics in Switching 2009, 15-19 Sep 2009, Pisa, Italy. pp. 1-2. IEEE Photonics in Switching. ISBN 978-1-4244-3856-3
Abelmann, L. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. (2009) Self assembled three-dimensional nonvolatile memories. Technical Report TR-CTIT-09-29, Centre for Telematics and Information Technology University of Twente, Enschede. ISSN 1381-3625
Alberts, C.J. and de Man, S. and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement science and technology, 20 (3). 034005. ISSN 0957-0233 *** ISI Impact 1,350 ***
Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***
Berenschot, J.W. and Wissink, J.M. and Tas, N.R. and de Boer, M.J. (2009) Microneedle, microneedle array and production method therefor. Patent NL2001718 (Assigned).
Bruinink, C.M. and Jaganatharaja, R.K. and de Boer, M.J. and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Advancements in technology and design of biomimetic flow-sensor arrays. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), 25-29 Jan 2009, Sorrento, Italy. pp. 152-155. IEEE Computer Society. ISSN 1084-6999 ISBN 978-1-4244-2978-3
Bruinink, C.M. and Jaganatharaja, R.K. and de Boer, M.J. and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Developing the ultimate biomimetic flow-sensor array. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 Oct 2009, Dresden, Germany. 65. Forschungszentrum Juelich GmbH. ISSN 1433-5565 ISBN 978-3-89336-583-8
Duan, Xuexin and Zhao, Yiping and Perl, A. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced materials, 21 (27). pp. 2798-2802. ISSN 0935-9648 *** ISI Impact 10,857 ***
Hoang, Thi Hanh and Segers-Nolten, I.M. and Berenschot, J.W. and de Boer, M.J. and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of micromechanics and microengineering, 19 (065017). pp. 1-10. ISSN 0960-1317 *** ISI Impact 2,276 ***
van Honschoten, J.W. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M.C. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 09 - Proceedings 20th MicroMechanics Europe 2009, 20-22 September 2009, Toulouse, France. pp. 1-4. Laas-CNRS. ISBN not assigned
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The sense of contact, workshop sensortechnology, 8 Apr 2009, Zeist, The Netherlands. Technology foundation STW. ISBN 978-90-74702-55-3
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) A fabrication scheme for biomimetic aquatic hair sensors. In: Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany. pp. 66-66. Forschungszentrum Julich Gmbh. ISSN 1433-5565 ISBN 978-3-89336-583-8
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, Colorado, USA. pp. 1075-1078. IEEE. ISBN 978-1-4244-4193-8
Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 Nov 2009, Vung Tau, Vietnam . Vietnam National University. ISBN not assigned
Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and ter Brake, H.J.M. and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of micromechanics and microengineering, 19 (085027). pp. 1-10. ISSN 0960-1317 *** ISI Impact 2,276 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a chip, 9 (13). pp. 1966-1969. ISSN 1473-0197 *** ISI Impact 6,260 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, 25-29 January 2009, Sorrento, Italy. pp. 1-4. Technical Digest. ISSN 1084-6999
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317 *** ISI Impact 1,569 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***

2008

Berenschot, J.W. and Tas, N.R. (2008) A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method. Patent EP20080000094 (Application).
Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China. pp. 729-732. IEEE Computer Society. ISBN 978-1-4244-1907-4
Berenschot, J.W. and Wissink, J.M. and Tas, N.R. and de Boer, M.J. (2008) Microneedle, microneedle array and production method therefor. Patent NL20082001718 (Application).
Bruinink, C.M. and Burresi, M. and de Boer, M.J. and Segerink, F.B. and Jansen, H.V. and Berenschot, J.W. and Reinhoudt, D.N. and Huskens, J. and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984 *** ISI Impact 12,186 ***
Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247 *** ISI Impact 1,933 ***
Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy. pp. 66-69. IEEE. ISSN 1930-0395 ISBN 978-1-4244-2580-8
Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of Design, Test, Integration and Packaging of MEMS/MOEMS, 9-11 Apr 2008, Nice. 4. EDA Publisher. ISBN 978-2-35500-006-5
Escalante, M. and Zhao, Yiping and Ludden, M.J.W. and Vermeij, R. and Olsen, J.D. and Berenschot, J.W. and Hunter, C.N. and Huskens, J. and Subramaniam, V. and Otto, C. (2008) Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host--guest interactions. Journal of the American Chemical Society, 130 (28). pp. 8892-8893. ISSN 0002-7863 *** ISI Impact 9,019 ***
Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia. 700403. Proceedings SPIE 7004. SPIE. ISSN 0277-786X
Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Proceedings of Eurosensors XXII, 7-10 Sep 2008, Dresden, Germany. pp. 912-915. Verein Deutscher Ingenieure e.V. (VDI). ISBN 978-3-00-025217-4
Izadi, N. and Verlaat, B. and Berenschot, J.W. and Wiegerink, R.J. and de Boer, M.J. and Mogdans, J. and Krijnen, G.J.M. (2008) Design and fabrication process for artificial lateral line flow sensors. In: Proceedings of the International Conference on Sensor and Sensing in Biology and Engineering, 12-16 Oct 2008, Cetraro, Italy. Engineering Conferences International. ISBN not assigned
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317 *** ISI Impact 2,276 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C. (2008) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).
Wissink, J. and Berenschot, J.W. and Tas, N.R. (2008) Atom sharp needles, the missing link in microneedle drug delivery. In: Proceedings of Medical Devices Conference, 6 Oct 2008, Kopenhagen. pp. 23-26. Medical Devices Committee. ISBN not assigned
Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of micromechanics and microengineering, 18 (18). 064013. ISSN 0960-1317 *** ISI Impact 2,276 ***
Zhao, Yiping and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece. 221. Ergo publications. ISBN not assigned

2007

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) A versatile surface channel concept for microfluidic applications. Journal of micromechanics and microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317 *** ISI Impact 2,276 ***
Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: Micro Electro Mechanical Systems, Proceedings IEEE The Twentieth Annual International Conference on, 21-25 January, Kobe, Japan. pp. 123-126. IEEE Computer Society. ISBN 1-4244-0951-9
Iannuzzi, D. and Heeck, K. and Slaman, M. and de Man, S. and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement science and technology, 18 (10). pp. 3247-3252. ISSN 0957-0233 *** ISI Impact 1,350 ***
Luttge, R. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Vrouwe, E.X. and van den Berg, A. and Elwenspoek, M.C. (2007) Integrated lithographic molding for microneedle-based devices. Journal of microelectromechanical systems, 16 (4). pp. 872-884. ISSN 1057-7157 *** ISI Impact 2,157 ***
Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317 *** ISI Impact 2,276 ***
Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of vacuum science and technology B, 25 (4). pp. 1207-1216. ISSN 1071-1023 *** ISI Impact 1,268 ***
Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal. pp. 127-130. University of Minho. ISBN 978-972-98603-3-1
Zhao, Yiping and Berenschot, J.W. and de Boer, M.J. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: 18th MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimaraes, Portugal. pp. 253-256. Micro Mechanics Europe. ISBN 9789729860331

2006

Dijkstra, M.A. and de Boer, M.J. and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Versatile surface channel concept for microfluidic applications. In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton - England. pp. 37-40. Southampton University Press. ISBN 08543-2848-3
Fernández, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of micromechanics and microengineering, 16. pp. 862-868. ISSN 0960-1317 *** ISI Impact 2,276 ***
Haneveld, J. and Berenschot, J.W. and Maury, P.A. and Jansen, H.V. (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of micromechanics and microengineering, 16. S24-S28. ISSN 0960-1317 *** ISI Impact 2,276 ***
Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and De Man, S. and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of scientific instruments, 77. 106105-1-106105-3. ISSN 0034-6748 *** ISI Impact 1,598 ***
Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on MEMS 2006, 22-26 Jan. 2006, Istanbul - Turkey. pp. 814-817. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-9475-5
Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and actuators A: Physical, 130-131. pp. 340-345. ISSN 0924-4247 *** ISI Impact 1,933 ***
Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise test of the diffusion-controlled wet isotropic etching of silicon via circular mask openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651 *** ISI Impact 2,420 ***
Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany. University of Saarbrücken. ISBN not assigned

2005

Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of scientific instruments, 76. pp. 016102-016104. ISSN 0034-6748 *** ISI Impact 1,598 ***
Deladi, S. and Berenschot, J.W. and Tas, N.R. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification. Journal of micromechanics and microengineering, 15. pp. 528-534. ISSN 0960-1317 *** ISI Impact 2,276 ***
Deladi, S. and Tas, N.R. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005, 30-01 / 03-02-2005, Miami. pp. 564-567. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Fazal, I. and Berenschot, J.W. and de Boer, J.H. and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond strength tests between silicon wafers and duran tubes (fusion bonded fluidic interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 5-9 June 2005, Seoul. pp. 936-939. Solid-State Sensors, Actuators and Microsystems 1. IEEE Computer Society. ISBN 0-7803-8994-8
Fernández, L.J. and Arz, U. and Schubert, D. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, Jaap (2005) A cmos compatible process for improved rf performance on highly doped substrates. In: Proceedings. 9th IEEE Workshop on Signal Propagation on Interconnects, 2005., 10-13 May 2005, Garmisch Partenkirchen. pp. 167-170. IEEE Computer Society. ISBN 0-7803-9054-7
Fernández, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, Jaap and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of rf devices. Electronics letters, 41 (3). pp. 1-2. ISSN 0013-5194 *** ISI Impact 1,001 ***
Haneveld, J. and Berenschot, J.W. and Pascale, M. and Jansen, H.V. (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 72-75. Chalmers University . ISBN 9163175533
Sarajlic, E. and Berenschot, J.W. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005., 30-01 / 03-02-2005, Miami. pp. 391-394. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-8732-5
Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of 3d nanowire frames by conventional micromachining technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 27-30. IEEE Computer Society. ISBN 0-7803-8994-8
Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005, 5-9 June 2005, Seoul. pp. 53-56. IEEE Computer Society. ISBN 0-7803-8994-8
Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Surface micromachined fabrication of piezoelectric ain unimorph suspension devices for rf resonator applications. In: Proceedings of the 13th International Conferences on Solid-State Sensors, Actuators and Microsystems 2005, 5-9 June 2005, Seoul. pp. 1362-1365. IEEE Computer Society. ISBN 0-7803-8994-8
Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of surface micromachined ain piezoelectric microstructures and its potential apllication to rf resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland. DTIP of MEMS & MOEMS. ISBN 2-84813-057-1
Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MME MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Gotheborg, Sweden. pp. 320-323. Chalmers University. ISBN 91-631-7553-3
Tiggelaar, R.M. and Berenschot, J.W. and de Boer, J.H. and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes. Lab on a chip, 5. pp. 326-336. ISSN 1473-0197 *** ISI Impact 6,260 ***
Tiggelaar, R.M. and Berenschot, J.W. and van Male, P. and Oosterbroek, R.E. and Gardeniers, J.G.E. and de Croon, M.H.J.M. and Schouten, J.C. and van den Berg, A. and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and actuators A: Physical, 119 (1). pp. 196-205. ISSN 0924-4247 *** ISI Impact 1,933 ***
Tong, D.H. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and de Boer, M.J. and de Boer, J.H. and van Rijn, C.J.M. and Elwenspoek, M.C. (2005) Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation. Journal of microelectromechanical systems, 14 (1). pp. 113-123. ISSN 1057-7157 *** ISI Impact 2,157 ***
Yeshurun, Y. and Hefetz, M. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Boom, G. (2005) Polymer Microneedles. Patent US6924087 (Assigned).

2004

Deladi, S. and Berenschot, J.W. and de Boer, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), 25-29 Jan 2004, Maastricht. pp. 181-184. IEEE Computer Society. ISBN 9780780382657
Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and de Boer, M.J. and de Boer, J.H. and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope-based nanopatterning. Applied physics letters, 85 (22). pp. 5361-5363. ISSN 0003-6951 *** ISI Impact 3,820 ***
Sarajlic, E. and Berenschot, J.W. (2004) Method for manufacturing a nanstructure. Patent WO2004NL00902 (Application).
Tong, D.H. and Jansen, H.V. and Gadgil, V.J. and Bostan, C.G. and Berenschot, J.W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984 *** ISI Impact 12,186 ***

2003

Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic engineering, 67-68. pp. 422-429. ISSN 0167-9317 *** ISI Impact 1,569 ***
Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2003) Wet anisotropic etching for fluidic 1d nanochannels. Journal of micromechanics and microengineering, 13 (4). S62-S66. ISSN 0960-1317 *** ISI Impact 2,276 ***
Le Minh, Phuong and Holleman, J. and Wallinga, H. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2003) Novel integration of a microchannel with a silicon light emitting diode antifuse. Journal of Micromechanics and Microengineering, 13 (3). pp. 425-429. ISSN 0960-1317 *** ISI Impact 2,276 ***
Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic engineering, 67-68 (1). pp. 430-437. ISSN 0167-9317 *** ISI Impact 1,569 ***
Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003, 23 - 27 Feb 2003, San Francisco, United States. pp. 392-395. Computational Publications. ISBN 0-9728422-0-9
Tas, N.R. and Mela, P. and Kramer, T. and Berenschot, J.W. and van den Berg, A. (2003) Capillarity Induced Negative Pressure of Water Plugs in Nanochannels. Nano letters, 3 (11). pp. 1537-1540. ISSN 1530-6984 *** ISI Impact 12,186 ***
Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Prak, A. and Mateman, R. and Wissink, J.M. and van den Berg, A. (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005 *** ISI Impact 3,368 ***
Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, 8-12 June, Boston, USA. pp. 1651-1654. IEEE Computer Society. ISBN 0-7803-7731-1
Tong, D.H. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Wensink, H. and Jansen, H.V. and Nijdam, A.J. and Elwenspoek, M.C. and Gielens, F.C. and van Rijn, C.J.M. (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of microelectromechanical systems, 12 (5). pp. 622-629. ISSN 1057-7157 *** ISI Impact 2,157 ***
Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, USA. pp. 1742-1745. IEEE Electron Devices Society. ISBN 0-7803-7731-1
Tong, D.H. and Gielens, F.C. and Hoang, Thi Hanh and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2003) Micromachined Palladium - Silver Alloy Membranes for Hydrogen Separation. In: SESENS 2002, 29 Nov 2002, Veldhoven, the Netherlands. pp. 688-691. Technology Foundation STW. ISBN not assigned
Yeshurun, Y. and Hefetz, M. and Berenschot, J.W. and de Boer, M.J. and Altpeter, D.M. and Boom, G. (2003) Polymer Microneedles. Patent US20030397359 (Application).

2002

van Baar, J.J.J. and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Pressure sensor based on distributed temperature sensing. In: Proceedings of IEEE Sensors, 12 -14 June 2002, Orlando, USA. pp. 964-968. IEEE Computer Society. ISBN 0-7803-7454-1
van Baar, J.J.J. and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Combined-Pirani/bending membrane-pressure sensor. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 JAN 2002, Las Vegas, NV. pp. 328-331. IEEE Computer Society. ISBN 0-7803-7185-2
Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Advanced sacrificial poly-Si technology for fluidic systems. Journal of micromechanics and microengineering, 12 (5). pp. 621-624. ISSN 0960-1317 *** ISI Impact 2,276 ***
Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 Oct 2002, Sinaia, Romania. pp. 47-50. MicroMechanics Europe.
Le Minh, Phuong and Holleman, J. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2002) Integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In: Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002, 29 November 2002, Veldhoven, The Netherlands. pp. 644-648. Technology Foundation STW. ISBN 90-73461-33-2
Le Minh, Phuong and Holleman, J. and Berenschot, J.W. and Tas, N.R. and van den Berg, A. (2002) Monolithic integration of a novel microfluidic device with silicon light emitting diode-antifuse and photodetector. In: Proceedings of the 32nd European Solid-State Device Research Conference ESSDERC 2002, 24-26 September 2002, Florence, Italy. pp. 451-454. IEEE Computer Society. ISBN 88-900847-8-2
Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2227. ISSN 0003-2700 *** ISI Impact 5,874 ***
Tas, N.R. and Berenschot, J.W. and Mela, P. and Jansen, H.V. and Elwenspoek, M.C. and van den Berg, A. (2002) 2D-Confined Nanochannels Fabricated by Conventional Micromachining. Nano letters, 2 (9). pp. 1031-1032. ISSN 1530-6984 *** ISI Impact 12,186 ***
Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and van den Berg, A. (2002) Scaling behaviour of pressure-driven micro-hydraulic systems. In: Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems, 21 - 25 april 2002, San Juan, Puerto Rico. pp. 174-177. Computational Publications. ISBN 0970827571
Tong, D.H. and Gielens, F.C. and Berenschot, J.W. and de Boer, M.J. and Gardeniers, J.G.E. and Nijdam, W. and van Rijn, C.J.M. and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 20-24 Jan 2002, Las Vegas, NV. pp. 268-271. IEEE Computer Society. ISBN 0-7803-7185-2

2001

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Tijssen, R.P. and van den Berg, A. (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of micromechanics and microengineering, 11 (4). pp. 382-385. ISSN 0960-1317 *** ISI Impact 2,276 ***
Burger, G.J. and Holland, H.J. and Berenschot, J.W. and Seppenwodde, J.H. and ter Brake, H.J.M. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2001) 169 Kelvin cryogenic microcooler employing a condenser, evaporator, flow restriction and counterflow heat exchangers. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 21-25 Jan 2001, interlaken. pp. 418-421. IEEE Computer Society. ISBN 0-7803-5998-4
Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and van den Berg, A. and Elwenspoek, M.C. (2001) Selective Wafer Bonding by Surface Roughness Control. Journal of the Electrochemical Society, 148 (4). g225-g228. ISSN 0013-4651 *** ISI Impact 2,420 ***
Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Van Veenendaal, E. and Van Suchtelen, J. and Elwenspoek, M.C. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of micromechanics and microengineering, 11 (5). pp. 499-503. ISSN 0960-1317 *** ISI Impact 2,276 ***
Rusu, C.R. and Oever, R.V. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and de Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and Brugger, J. and van den Berg, A. (2001) Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers. Journal of microelectromechanical systems, 10 (2). pp. 238-246. ISSN 1057-7157 *** ISI Impact 2,157 ***
Tong, D.H. and Zwijze, A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and materials, 13 (4). pp. 235-246. ISSN 0914-4935 *** ISI Impact 0,349 ***
Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and van den Berg, A. (2001) Use of Selective Anodic Bonding to Create Micropump Chambers with Virtually No Dead Volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651 *** ISI Impact 2,420 ***

2000

de Boer, M.J. and Tjerkstra, R.W. and Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and van den Berg, A. (2000) Micromachining of buried micro channels in silicon. Journal of microelectromechanical systems, 9 (1). pp. 94-103. ISSN 1057-7157 *** ISI Impact 2,157 ***
Brugger, J. and Berenschot, J.W. and Kuiper, S. and Nijdam, W. and Otter, B. and Elwenspoek, M.C. (2000) Resistless patterning of sub-micron structures by evaporation through nanostencils. Microelectronic Engineering, 53 (1). pp. 403-405. ISSN 0167-9317 *** ISI Impact 1,569 ***
Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and van den Berg, A. and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of microelectromechanical systems, 9 (3). pp. 390-398. ISSN 1057-7157 *** ISI Impact 2,157 ***
Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Elwenspoek, M.C. and Greve, J. and van den Berg, A. and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 Jan - 27 Jan 2000, Miyazaki, Jpn. pp. 429-434. IEEE Computer Society. ISBN 0-7803-5273-4
Rusu, C.R. and Van 't Oever, R. and de Boer, M.J. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. and Bennink, M.L. and Kanger, J.S. and De Grooth, B.G. and Greve, J. and Brugger, J. and van den Berg, A. (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3912, 26-27 Jan 2000, San Jose, CA, USA. pp. 41-49. Society of Photo-Optical Instrumentation Engineers. ISBN 0-8194-3528-7
Tas, N.R. and Lammerink, T.S.J. and Leussink, P.J. and Berenschot, J.W. and de Bree, H.E. and Elwenspoek, M.C. (2000) Towards thermal flowsensing with pL/s resolution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sept 2000, Santa Clara, CA, USA. pp. 106-121. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X
Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (2000) High resolution powder blast micromachining. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 23 -27 Jan 2000, Miyazaki, Japa;n. pp. 769-774. IEEE Computer Society. ISBN 0-7803-5273-4
Wensink, H. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2000) Mask materials for powder blasting. Journal of micromechanics and microengineering, 10 (2). pp. 175-180. ISSN 0960-1317 *** ISI Impact 2,276 ***
Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and de Boer, M.J. and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Proceedings of SPIE - The International Society for Optical Engineering, 18-19 Sep 2000, Santa Clara, CA, USA. pp. 47-58. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X

1999

de Bree, H.E. and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 17-21 Jan 1999, Orlando, FL, USA. pp. 124-129. IEEE Computer Society. ISBN 0-7803-5194-0
Burger, J.F. and Van der Wekken, M.C. and Berenschot, J.W. and Holland, H.J. and ter Brake, H.J.M. and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) High pressure check valve for application in a miniature cryogenic sorption cooler. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 17-21 Jan 1999, Orlando, FL, USA. pp. 183-188. IEEE Computer Society. ISBN 0-7803-5194-0
Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem technologies, 5 (3). pp. 138-143. ISSN 0946-7076 *** ISI Impact 1,069 ***
Nijdam, A.J. and Berenschot, J.W. and Van Suchtelen, J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. Journal of micromechanics and microengineering, 9 (2). pp. 135-138. ISSN 0960-1317 *** ISI Impact 2,276 ***
Nijdam, A.J. and Van Suchtelen, J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: A critical look at the {111} minimum. Journal of crystal growth, 198-199 (pt 1). pp. 430-434. ISSN 0022-0248 *** ISI Impact 1,737 ***
Oosterbroek, R.E. and Berenschot, J.W. and Nijdam, A.J. and Pandraud, G. and Elwenspoek, M.C. and van den Berg, A. (1999) New design methodologies in <111>-oriented silicon wafers. In: Proceedings of SPIE - The International Society for Optical Engineering the 1999 Micromachining and Microfabrication Process Technology V, 20-22 Sept 1999, Santa Clara, CA, USA. pp. 384-394. Society of Photo-Optical Instrumentation Engineers. ISSN 0277-786X
Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and van den Berg, A. (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of micromechanics and microengineering, 9 (2). pp. 194-198. ISSN 0960-1317 *** ISI Impact 2,276 ***
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and van den Berg, A. (1999) Micromachined pressure/flow-sensor. Sensors and actuators A: Physical, 77 (3). pp. 167-177. ISSN 0924-4247 *** ISI Impact 1,933 ***
Wensink, H. and Berenschot, J.W. and Jansen, H.V. and Elwenspoek, M.C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 Sept 1999, Gif-Sur-Yvette, France. pp. 199-202. Université Paris-sud, Institut d'Électronique Fondamentale.

1998

Berenschot, J.W. and Oosterbroek, R.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Micromachining of {111} plates in <001> oriented silicon Journal of micromechanics and microengineering, 8 (2). pp. 104-107. ISSN 0960-1317 *** ISI Impact 2,276 ***
Burger, J.F. and Berenschot, J.W. and Burger, G.J. and Visscher, H. and Elwenspoek, M.C. (1998) Piezoresistive friction force sensor for tribological research. Journal of micromechanics and microengineering, 8 (2). pp. 138-140. ISSN 0960-1317 *** ISI Impact 2,276 ***
Gui, C. and de Boer, M.J. and Gardeniers, J.G.E. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247 *** ISI Impact 1,933 ***
Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS 98 Proceedings, 25-29 Jan 1998, Heidelberg. pp. 482-487. IEEE Computer Society. ISSN 1084-6999 ISBN 0-7803-4412-X
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: Fabrication and performance. Journal of microelectromechanical systems, 7 (1). pp. 87-93. ISSN 1057-7157 *** ISI Impact 2,157 ***
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Elwenspoek, M.C. (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: Design and modeling. Journal of microelectromechanical systems, 7 (1). pp. 79-86. ISSN 1057-7157 *** ISI Impact 2,157 ***
Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592 *** ISI Impact 3,316 ***

1997

Gui, C. and Jansen, H.V. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 633-636. IEEE Computer Society. ISBN 0-7803-3829-4
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of microelectromechanical systems, 6 (3). pp. 234-241. ISSN 1057-7157 *** ISI Impact 2,157 ***
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and van den Berg, A. and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 151-154. IEEE Computer Society. ISBN 0-7803-3829-4
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686 *** ISI Impact 3,642 ***
Tjerkstra, R.W. and de Boer, M.J. and Berenschot, J.W. and Gardeniers, J.G.E. and van den Berg, A. and Elwenspoek, M.C. (1997) Etching technology for microchannels. In: Proceedings of the 1997 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 26-30 Jan 1997, Nagoya, Japan. pp. 147-152. IEEE Computer Society. ISBN 0-7803-3744-1

1996

Berenschot, J.W. and Jansen, H.V. and Burger, G.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1996) Thermally assisted ion beam etching of polytetrafluoroethylene a new technique for high aspect ratio etching of MEMS. In: Proceedings of the 1996 9th Annual International Workshop on Micro Electro Mechanical Systems, 11-15 Feb 1996, San Diego, CA, USA. pp. 277-284. IEEE Computer Society. ISBN 0-7803-2985-6
Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247 *** ISI Impact 1,933 ***
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Proceedings IEEE Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS '96, 11-15 Feb 1996, San Diego, CA, USA. pp. 204-209. IEEE Computer Society. ISBN 0-7803-2985-6

1995

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. In: Transducers '95 - Eurosensors XI Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 573-576. IEEE Computer Society. ISBN 91-630-3473-5
Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 13-18. IEEE Computer Society. ISBN 0-7803-2503-6
Legtenberg, R. and Berenschot, J.W. and van Baar, J.J.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX. Part 2 (of 2), 25-29 June 1995, Stockholm, Sweden. pp. 404-407. IEEE Computer Society. ISBN 91-630-3473-5
Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators. In: : Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE, 29 Jan - 2 Feb 1995, Amsterdam, Netherlands. pp. 37-42. IEEE Computer Society. ISBN 0-7803-2503-6
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. (1995) Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back. Journal of micromechanics and microengineering, 5 (2). pp. 189-192. ISSN 0960-1317 *** ISI Impact 2,276 ***
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of microelectromechanical systems, 4 (3). pp. 151-157. ISSN 1057-7157 *** ISI Impact 2,157 ***

1994

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of r.f.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and actuators A: Physical, 41 ( 1-3 pt 3). pp. 338-343. ISSN 0924-4247 *** ISI Impact 1,933 ***
Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 25-28 Jan 1994, Oiso, Jpn. pp. 69-74. IEEE Computer Society. ISBN 0-7803-1833-1