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Tong, D.H. and van den Berg, A. and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C.
(2005)
Preparation of palladium-silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane.
Thin solid films, 479 (1-2).
pp. 89-94.
ISSN 0040-6090
*** ISI Impact 1,909 ***
Full text available as:
Official URL: http://dx.doi.org/10.1016/j.tsf.2004.11.179  AbstractSubmicron thick palladium–silver alloy films with 23 wt.% of silver (Pd–Ag23) have been synthesized by simultaneous sputtering from pure targets of Pd and Ag. Full characterization of the deposited films was performed by using X-ray photoelectron spectroscopy, high-resolution scanning electron microscopy, high-resolution transmission electron microscopy, and X-ray diffraction. The analytical results revealed that the deposited Pd–Ag alloy had a Ag content of about 21–22 wt.%, very close to and within measurement error of the expected Ag content of 23 wt.%. The as-deposited Pd–Ag alloy had a fine microstructure. The characterized Pd–Ag alloy films were then deposited on a supporting microsieve to form Pd–Ag membranes for hydrogen separation. The submicron thick Pd–Ag membranes obtained high separation fluxes up to 4 mol H2/m2 s with a selectivity higher than 1500 for hydrogen over helium
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