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Izadi, N. and Jaganatharaja, R.K. and Floris, J. and Krijnen, G.J.M.
(2007)
Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing.
In: Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS, 25-27 Apr 2007, Stresa, Italy.
pp. 112-115.
EDA Publishing.
ISBN 978-2-35500-000-3
Full text available as:
Official URL: http://eda-publishing.imag.fr/spip/view_proc_article.php3?id_article=301  AbstractHigh density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
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