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Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C.
(2006)
Fabrication and characterization of an electrostatic contraction beams micromotor.
In: 19th IEEE International Conference on MEMS 2006, 22-26 Jan. 2006, Istanbul - Turkey.
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IEEE Computer Society.
ISSN 1084-6999
ISBN 0-7803-9475-5
Full text available as: Official URL: http://dx.doi.org/10.1109/MEMSYS.2006.1627924  AbstractWe report on fabrication and experimental characterization
of an electrostatic contraction beams motor that exhibits
both reliable operation and high performance haracteristics.
This electrostatic linear stepper micromotor is fabricated in a single polysilicon layer combining vertical trench isolation technology with standard surface micromachining. The entire motor, including two voltage-controlled clamps and eight pairs of contraction beams, fits in an area of 470 μm x 290 μm. Bidirectional stepping motion has been
successfully demonstrated, generating a stroke of ± 70 μm
by successively adding 10 nm steps. The motor was driven
up to a cycling frequency of 80 kHz. An output force of
0.49 mN was measured for actuation voltages of 60 V on
the beams and 50 V on the clamps. The motor was run for
160 hours at a cycling frequency of 10 kHz, generating
nearly 5.8 billion steps. | Item Type: | Conference or Workshop Paper (Full Paper, Other) |
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| Research Group: | EWI-TST: Transducers Science and Technology |
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| Research Program: | MESA-General |
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| Research Project: | uSPAM: A high capacity low volume Scanning Probe Array Memory for application in embedded systems |
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| ID Code: | 9188 |
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| Status: | Published |
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| Deposited On: | 01 March 2007 |
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| Refereed: | Yes |
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| International: | Yes |
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| More Information: | statisticsmetis |
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