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Brouwer, D.M. and de Jong, B.R. and de Boer, M.J. and Soemers, H.M.J.R.
(2006)
Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms.
In: Proceedings of the Annual Meeting of the American Society of Precision Engineering (ASPE), October 15-20, 2006, Monterey CA, USA.
pp. 275-278.
MEMS, LIGA & Nanotechnology.
American Society for Precision Engineering.
ISSN not assigned
Full text available as:
 AbstractConventional TEM sample manipulators often lack the crucial stability of 0.1 nm/min. A MEMS manipulator attached directly to the TEM pole would greatly increase both thermal and dynamic stability. However a stable E-beam requires no interference of electric or magnetic fields. Therefore the manipulator should be stably fixed without power. To this end a mechanical clamp is presented which clamps one of the actuators of the TEM sample manipulator (Figure 2). The clamp incorporates a relatively large clamp force of 0.5 mN with respect to the device area and is able to maintain the clamp force without external power. In previous work [1] a theoretical basis has been presented of an earlier clamp version. In this paper a rotational clamp which has been made and tested is presented. This clamp design is part of a research project for a 6 Degree of Freedom MEMS TEM sample manipulator.
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