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van Honschoten, J.W. and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M.C.
(2006)
Directional sensitivity of a three dimensional particle velocity sensor.
In: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems, 3-5 Sept 2006, Southampton.
pp. 201-204.
Southampton University Press.
ISBN 085432-848-3
Full text available as:
![]() AbstractThe omni-directional sensitivity pattern of an integrated three dimensional acoustic sensor, composed of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. We investigate the influence of the presence of the probe surface on the direction of the measured particle velocity measured by the sensors, and a description of the gas flow profile around the integrated sensor is presented.
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