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8042 Evanescent field sensing in hybrid integrated optical MEMS devices

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Altena, G.J. (2006) Evanescent field sensing in hybrid integrated optical MEMS devices. PhD thesis, University of Twente. ISBN 90-365-2361-3

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Item Type:	PhD Thesis
Supervisors:	Lambeck, P.V.
Assistant Supervisors:	Hoekstra, H.J.W.M.
Research Group:	EWI-IOMS: Integrated Optical MicroSystems
Research Program:	MESA-General
Research Project:	OCMMM: Optical characterisation methods for mems manufacturing
ID Code:	8042
Deposited On:	12 January 2007
More Information:	statistics metis

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