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Hoang, Thi Hanh
(2012)
Machining technologies for silicon-based nanochannels and some properties of aqueous solutions confined in these channels.
PhD thesis, University of Twente.
ISBN 978-90-365-3298-3
Full text available as:
Official URL: http://dx.doi.org/10.3990/1.9789036532983 AbstractThe most important motivation of this thesis is study the viscosity of water in confined nanospaces by measuring mobility of single nanoparticles. To perform mobility studies using a high numerical aperture lens from an inverted microscope, one-dimensional (1D) nanochannel devices were fabricated. 1D nanochannels were fabricated by direct bonding of a processed silicon wafer with a very thin glass wafer. We have developed a new and simple method to construct two-dimensional (2D) nanochannels using several common techniques of conventional microfabrication like underetching of a sacrificial layer, and vertically evaporation deposition. Encapsulated 2D nanochannels with both dimensions of height and width down to sub-20 nm regimes were directly obtained without requiring bonding. Fluorescence filling results proved that the fabricated channels were not leaking and that they can be used to study fluorescent solutions.
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