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19628 Nanometer resolution TEM sample manipulator for rotational and translational positioning

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de Jong, B.R. and Brouwer, D.M. and Jansen, H.V. and de Boer, M.J. and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: Proceedings of EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain. pp. 1-4. Elsevier. ISBN 84-475-2984-3

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Abstract

The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.

Item Type:	Conference or Workshop Paper (Extended Abstract, Talk)
Research Group:	EWI-TST: Transducers Science and Technology, CTW-MA: Mechanical Automation, EWI-IOMS: Integrated Optical MicroSystems
Additional Information:	This work has been made possible by the financial support of the Dutch ministry of economic affairs program IOP Precision Technology.
Uncontrolled Keywords:	precision MEMS, nano positioning, nano manipulation, vertical combdrive
ID Code:	19628
Status:	Published
Deposited On:	21 February 2011
Refereed:	Yes
International:	Yes
More Information:	statistics metis

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