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19563 Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor

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Stranczl, M. and Sarajlic, E. and Krijnen, G.J.M. and Fujita, H. and Gijs, M.A.M. and Yamahata, C. (2011) Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor. In: Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, 23-27 January, 2011, Cancun, Mexico. pp. 1257-1260. IEEE Micro Electro Mechanical Systems. ISBN 978-1-4244-9633-4

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Official URL: http://dx.doi.org/10.1109/MEMSYS.2011.5734661

Abstract

We present the design, modeling and characterization
of a 3-phase electrostatic rotary stepper micromotor. The
proposed motor is a monolithic device fabricated using
silicon-on-insulator (SOI) technology. The rotor is
suspended with a frictionless flexural pivot bearing and
reaches an unprecedented rotational range of 30° (+/- 15°) at 65 V. We have established a mechanical model of the
deformation structure and performed finite element analysis
(FEA) simulations of the dynamic properties. These studies
are consistent with the extensive experimental characterization performed in the quasi-static, transient, and dynamic regimes.

Item Type:	Conference or Workshop Paper (Full Paper, Poster)
Research Group:	EWI-TST: Transducers Science and Technology
Research Program:	MESA-General
ID Code:	19563
Status:	Published
Deposited On:	02 February 2011
Refereed:	Yes
International:	Yes
More Information:	statistics metis

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