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Akça, B.I. and Ismail, N. and Sengo, G. and Sun, Fei and Wörhoff, K. and Pollnau, M. and de Ridder, R.M.
(2010)
High Resolution Silicon-Oxynitride Arrayed Waveguide Grating Spectrometers.
In: Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter, 18-19 Nov 2010, Delft, The Netherlands.
pp. 125-128.
Uitgeverij TNO.
ISBN 978-90-78314-15-8
Full text available as:
 AbstractWe present experimental results of silicon-oxynitride (SiON) based arrayed waveguide grating (AWG) spectrometers operating around 800 nm and 1300 nm. A 100-channel AWG with 0.4 nm channel spacing centered at 1300 nm and a 125-channel AWG with 0.16 nm channel spacing centered at 800 nm have been fabricated and characterized. The measured crosstalk and insertion loss values near the central wavelengths were ranging between -22 and -32 dB and between 3.2 and 2 dB for 800-nm AWG and 1300-nm AWG, respectively. The highest wavelength resolution (0.16 nm) and the largest free spectral range value (38.8 nm) have been achieved in SiON technology so far.
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