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Ay, F. and Geskus, D. and Iñurrategui, I. and Aravazhi, S. and Gadgil, V.J. and Wörhoff, K. and Pollnau, M. (2010) Focused Ion Beam Nanostructured Gratings in Crystalline KYW:Yb3+ Channel Waveguides In: Proceedings of the 2010 Annual Symposium of the IEEE Photonics Benelux Chapter, 18-19 November 2010, Delft, The Netherlands. pp. 265-268. Uitgeverij TNO. ISBN 978-90-78314-15-8
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We report our recent results on utilization and optimization of the focused ion beam technique for the fabrication of grating structures for potential integrated photonic devices in crystalline KY(WO4)2:Yb3+. The FIB milling procedure for the realization of grating structures in KYW channel waveguides was optimized. Grating structures more than 4 µm in depth with an improved total sidewall angle of 4.3 were achieved by varying dwell time and pixel resolution distribution. Currently optical characterization of the resonator structures for achieving on-chip waveguide lasers is ongoing.
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