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17321 A method for making a glass supported system, such glass supported system, and the use of a glass support therefor

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Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Fazal, I. and Louwerse, M.C. and Mogulkoc, B. and Sanders, R.G.P. and de Boer, M.J. and Elwenspoek, M.C. (2008) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent EP20080007746 (Application).

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Official URL: http://ep.espacenet.com/publicationDetails/biblio?DB=ep.espacenet.com&adjacent=true&locale=en_EP&FT=D&date=20091028&CC=EP&NR=2112130A1&KC=A1

Abstract

The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.

Item Type:	Patent
Research Group:	EWI-TST: Transducers Science and Technology
Research Program:	MESA-General
Research Project:	Fuel Cells: A miniature solid-acid fuel cell
ID Code:	17321
Deposited On:	01 February 2010
International:	Yes
More Information:	statistics metis

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