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16403 Chemically anisotropic single-crystalline silicon nanotetrahedra
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Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). pp. 1-7. ISSN 0957-4484 *** ISI Impact 3,644 ***

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Official URL: http://dx.doi.org/10.1088/0957-4484/20/47/475302

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Abstract

We describe a method based on silicon micromachining to machine single-crystalline silicon
nanoparticles bounded by (111) faces in the form of tetrahedra. The technology allows the
fabrication of tetrahedra in a size range from 20 to 1000 nm side length, and gives the
possibility to chemically modify sites (faces, edges and/or tips) within certain limits. The
chemical modification is anticipated to facilitate the self-assembly into new supermaterials such
as photonic crystals in the diamond lattice.

Item Type:Article
Research Group:EWI-TST: Transducers Science and Technology
Research Program:MESA-General
Research Project:Capillary Origami: Fabrication of Functional 3D-microstructures using caplillary forces
ID Code:16403
Status:Published
Deposited On:10 November 2009
Refereed:Yes
International:Yes
ISI Impact Factor:3,644
More Information:statisticsmetis

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