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Izadi, N. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M.
(2009)
Fabrication of dense flow sensor arrays on flexible membranes.
In: Proceedings of the 15th International Conference on Solid State Sensors, Actuators and Microsystems, 21-25 Jun 2009, Denver, Colorado, USA.
pp. 1075-1078.
IEEE.
ISBN 978-1-4244-4193-8
Full text available as:
Official URL: http://dx.doi.org/10.1109/SENSOR.2009.5285945  AbstractBiological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.
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