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14699 A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method

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Berenschot, J.W. and Tas, N.R. (2008) A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method. Patent EP20080000094 (Application).

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Official URL: http://v3.espacenet.com/publicationDetails/biblio?DB=EPODOC&adjacent=true&locale=en_EP&FT=D&date=20090708&CC=EP&NR=2077249A1&KC=A1

Abstract

The invention relates to a method for making a 3D nanostructure having a nanosubstructure comprising the steps of:
1. providing a mold comprising at least one sharp concave corner
2. conformational depositing at least one structural material in the sharp concave corner
3. isotropically removing structural material
4. depositing at least one other structural material
5. removing earlier deposited structural material
6. forming a nanosubstructure and
7. removing the mold thereby providing the 3D nanostructure having the nanosubstructure

Item Type:	Patent
Research Group:	EWI-TST: Transducers Science and Technology
Research Program:	MESA-General
ID Code:	14699
Deposited On:	19 October 2009
International:	Yes
More Information:	statistics metis

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