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Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and van den Berg, A. and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA. pp. 151-154. IEEE Computer Society. ISBN 0-7803-3829-4
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Official URL: http://dx.doi.org/10.1109/SENSOR.1997.613605
This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.
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