Nederlands
Contact
Search
OrganisationEEMCS EPrints Service
 |
|
|
||||||||||||||||||||||||||||||||||
|
|
|
|
|
||||||||||||||||||||||||||||||||
|
|
|
||||||||||||||||||||||||||||||||||
|
|
|
|
|
||||||||||||||||||||||||||||||||
|
|
Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and van den Berg, A. and Elwenspoek, M.C.
(1997)
Designing, realization and characterization of a novel capacitive pressure/flow sensor.
In: Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), 16-19 June 1997, Chicago, IL, USA.
pp. 151-154.
IEEE Computer Society.
ISBN 0-7803-3829-4
Full text available as:
Official URL: http://dx.doi.org/10.1109/SENSOR.1997.613605 AbstractThis paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.
Export this item as: To correct this item please ask your editor Repository Staff Only: edit this item |
|
|
||||||||||||||||||||||||||||||||
|
|
|
||||||||||||||||||||||||||||||||||
|
|
|
|
|
||||||||||||||||||||||||||||||||
|
|
|
||||||||||||||||||||||||||||||||||
